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Class Information
Number: 356/506
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Gap > Fabry-perot type
Description: Gap measurement wherein a gap is created by at least two surfaces in optical alignment, at least one of which is partially transmissive, forming a resonant cavity.

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
4768182 Apparatus for monitoring optical path differences utilizing an etalon Aug. 30, 1988
4729654 Laser interferometer Mar. 8, 1988
4645349 Method of measuring film thickness Feb. 24, 1987
4596466 Method for the measurement of lengths and displacements Jun. 24, 1986
4589772 Pulsed remote gauge May. 20, 1986
4558952 Method for measuring an optical length of light path and a laser interferometer for carrying same into effect Dec. 17, 1985
4558950 Interferometric distance and direction measurement Dec. 17, 1985
4492464 Apparatus and method for distance measurement by laser interferometry Jan. 8, 1985
4452533 External cavity diode laser sensor Jun. 5, 1984
4309109 Pulsed interferometric remote gauge Jan. 5, 1982
4160600 Pressure-responsive apparatus Jul. 10, 1979

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