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Class Information
Number: 356/506
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Gap > Fabry-perot type
Description: Gap measurement wherein a gap is created by at least two surfaces in optical alignment, at least one of which is partially transmissive, forming a resonant cavity.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8512492 Optical filter, analytical instrument, optical apparatus, and method of manufacturing optical filter Aug. 20, 2013
8512493 Method of manufacturing optical filter, analytical instrument, and optical apparatus Aug. 20, 2013
8115937 Methods and apparatus for measuring multiple Fabry-Perot gaps Feb. 14, 2012
8007609 Parallel plate arrangement and method of formation Aug. 30, 2011
7869055 Process control monitors for interferometric modulators Jan. 11, 2011
7767444 Cell analysis using laser with external cavity Aug. 3, 2010
7688452 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs Mar. 30, 2010
7626707 Dual cavity displacement sensor Dec. 1, 2009
7561276 Demodulation method and apparatus for fiber optic sensors Jul. 14, 2009
7551295 Displacement sensor Jun. 23, 2009
7538889 Calibration feedback-control circuit for diffraction light devices May. 26, 2009
7518737 Displacement-measuring optical device with orifice Apr. 14, 2009
7492463 Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor Feb. 17, 2009
7388704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs Jun. 17, 2008
7359066 Electro-optical measurement of hysteresis in interferometric modulators Apr. 15, 2008
7355720 Optical displacement sensor Apr. 8, 2008
7289220 Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure Oct. 30, 2007
7259865 Process control monitors for interferometric modulators Aug. 21, 2007
7242509 MEMS Fabry Perot filter for integrated spectroscopy system Jul. 10, 2007
7242482 Capacitance gap calibration Jul. 10, 2007
7180605 Vibration sensor utilizing a feedback stabilized fabry-perot filter Feb. 20, 2007
7164479 Optical displacement sensor Jan. 16, 2007
7136169 Etalon testing system and process Nov. 14, 2006
7110122 Interferometer calibration methods and apparatus Sep. 19, 2006
7061681 Fabry-Perot interferometer Jun. 13, 2006
6886365 Fiber optic Fabry-Perot interferometer and associated methods May. 3, 2005
6831450 Electronic method and apparatus for measuring optical wavelength and locking to a set optical wavelength of Fabry-Perot tunable cavity opto-electronic devices Dec. 14, 2004
6822798 Tunable optical filter Nov. 23, 2004
6763718 Micro-electro-mechanical systems ultra-sensitive accelerometer with independent sensitivity adjustment Jul. 20, 2004
6700706 Fabry-perot optical filter device Mar. 2, 2004
6687011 Transmission-type extrinsic fabry-perot interferometric optical fiber sensor Feb. 3, 2004
6628405 Optical angle finder and coaxial alignment device Sep. 30, 2003
6581465 Micro-electro-mechanical systems ultra-sensitive accelerometer Jun. 24, 2003
6246480 Stepped etalon Jun. 12, 2001
6186937 Method and device for obtaining a desired phase of optical characteristic of a fabry-perot etalon Feb. 13, 2001
5646728 Ultrasensitive interferometer suitable for detecting gravitational waves Jul. 8, 1997
5598264 Noise compensated interferometric measuring device and method using signal and reference interferometers Jan. 28, 1997
5565987 Fabry-Perot probe profilometer having feedback loop to maintain resonance Oct. 15, 1996
5555089 Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source Sep. 10, 1996
5528370 Apparatus and method for measuring variations in thickness of an optical interference element Jun. 18, 1996
5502563 Transporter for optical spectrum analyzer in alignment system Mar. 26, 1996
5412474 System for measuring distance between two points using a variable frequency coherent source May. 2, 1995
5353115 System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer Oct. 4, 1994
5185643 Arrangement for operating a laser diode Feb. 9, 1993
5155550 Accurate correlator of rotational and translational motions and control method and apparatus Oct. 13, 1992
5141319 Displacement detection device with adjacent semiconductor diode lasers Aug. 25, 1992
5128537 Device for optically measuring a pressure differential Jul. 7, 1992
5103572 Feeler pin using an optical contact sensor Apr. 14, 1992
4991962 High precision alignment system for microlithography Feb. 12, 1991
4973131 Modulator mirror Nov. 27, 1990

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