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Class Information
Number: 356/505
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Gap
Description: Dimensional measurement including an arrangement for measuring (1)small changes in a space between articles or (2)a small space between two surfaces.

Sub-classes under this class:

Class Number Class Name Patents
356/507 Between slider/disc (e.g., flying height) 68
356/506 Fabry-perot type 61

Patents under this class:
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Patent Number Title Of Patent Date Issued
8456643 Method and system for mapping the shape of a head under operating conditions Jun. 4, 2013
8014891 Etching amount calculating method, storage medium, and etching amount calculating apparatus Sep. 6, 2011
7651873 Method relating to the accurate positioning of a semiconductor wafer Jan. 26, 2010
7639368 Tracking algorithm for linear array signal processor for Fabry-Perot cross-correlation pattern and method of using same Dec. 29, 2009
7564566 Method and system for analyzing low-coherence interferometry signals for information about thin film structures Jul. 21, 2009
7526967 Measuring device for detecting stresses of a bearing arrangement May. 5, 2009
7505143 Dynamic reference plane compensation Mar. 17, 2009
7440117 Highly-sensitive displacement-measuring optical device Oct. 21, 2008
7247843 Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns Jul. 24, 2007
7196800 Semiconductor die analysis as a function of optical reflections from the die Mar. 27, 2007
7139446 Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar Nov. 21, 2006
7116430 Highly-sensitive displacement-measuring optical device Oct. 3, 2006
6741335 Optical translation measurement May. 25, 2004
6657756 Method and apparatus for increasing the effective efficiency of holograms Dec. 2, 2003
6657218 Method and apparatus for measuring gap, method and apparatus for measuring shape and method for manufacturing liquid crystal device Dec. 2, 2003
6643025 Microinterferometer for distance measurements Nov. 4, 2003
6633387 Method and apparatus for measuring opposite surfaces Oct. 14, 2003
6580511 System for monitoring sealing wear Jun. 17, 2003
6577402 Sensor and method for measuring changes in environmental conditions Jun. 10, 2003
6522411 Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction Feb. 18, 2003
6426796 Fiber optic wall shear stress sensor Jul. 30, 2002
6424407 Optical translation measurement Jul. 23, 2002
6320659 Clearance measuring device and method for exposure Nov. 20, 2001
6292262 Method and device to measure the gap between variable-position elements Sep. 18, 2001
6246482 Optical translation measurement Jun. 12, 2001
6005666 Apparatus for and method of optical inspection in total internal reflection holographic imaging system Dec. 21, 1999
5912736 Optical reflection methods and apparatus for aligning communication system components Jun. 15, 1999
5870195 Method and system for determining the distance between optical fibres Feb. 9, 1999
5808742 Optical alignment apparatus having multiple parallel alignment marks Sep. 15, 1998
5636020 Zone analysis system and method for optimizing the performance of an inspection system for determining disparity between two surfaces Jun. 3, 1997
5626991 Manufacture of flat panel displays May. 6, 1997
5515167 Transparent optical chuck incorporating optical monitoring May. 7, 1996
5325177 Optical, interferometric hole gauge Jun. 28, 1994
5223912 Method and device for measuring at least one transverse dimension of a textile yarn Jun. 29, 1993
5187543 Differential displacement measuring interferometer Feb. 16, 1993
5179863 Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance Jan. 19, 1993
5133599 High accuracy linear displacement interferometer with probe Jul. 28, 1992
4932781 Gap measuring apparatus using interference fringes of reflected light Jun. 12, 1990
4932782 Channelled light spectrum analysis measurement method and device, more especially for measuring a low amplitude movement of a mobile surface, which may be representative of a variation of a ph Jun. 12, 1990
4854701 Arrangement for inspecting light waveguide end faces Aug. 8, 1989
4842410 Apparatus and method utilizing interference fringes to determine the thermal stability of a liquid Jun. 27, 1989
4815855 Interferometric load sensor and strain gage Mar. 28, 1989
4656347 Diffraction grating position adjuster using a grating and a reflector Apr. 7, 1987
4618261 Optical gap measuring Oct. 21, 1986
4560277 Process and device for qualitative and quantitative measurement of irregularities and impurities on and in transparent or semitransparent flexible sheet materials Dec. 24, 1985
4498775 Method for detecting distance deviations to a photoresist surface in an optical printer Feb. 12, 1985
4408883 Apparatus for inspecting average size of fundamental patterns Oct. 11, 1983
4403860 Apparatus for determining dimensions Sep. 13, 1983
4168911 Diffractographic and other sensors utilizing diffraction waves Sep. 25, 1979
4131365 Method and apparatus for determining object position and dimension using a diffraction wave Dec. 26, 1978

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