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Class Information
Number: 356/504
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Thickness > Refraction from surfaces of different refractive index
Description: Thickness measurement wherein refractions of wavefronts from different surfaces due to Snells law are used to produce an interference pattern.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8593640 Optics for forming a linear beam in optical coherence tomography Nov. 26, 2013
8514404 Multiple path interferometer and method Aug. 20, 2013
8502982 Flow cell and system for detection of target in aqueous environment using arrayed imaging reflectometry Aug. 6, 2013
8451519 Method and apparatus for controlling color in multicolor marking platform May. 28, 2013
8422026 Spectrally controllable light sources in interferometry Apr. 16, 2013
8269980 White light scanning interferometer with simultaneous phase-shifting module Sep. 18, 2012
8112146 Three-dimensional imaging using a luminescent surface and a differentially attenuating medium Feb. 7, 2012
7835018 Optical method for controlling thin film growth Nov. 16, 2010
7773232 Apparatus and method for determining trench parameters Aug. 10, 2010
7751061 Non-contact apparatus and method for measuring a property of a dielectric layer on a wafer Jul. 6, 2010
7705995 Method of determining substrate etch depth Apr. 27, 2010
7692798 Method for biomolecular detection and system thereof Apr. 6, 2010
7692801 Optical stacked structure inspecting method and optical stacked structure inspecting apparatus Apr. 6, 2010
7649633 Method and instrument for measuring complex dielectric constant of a sample by optical spectral measurement Jan. 19, 2010
7649634 Methods and systems for white light interferometry and characterization of films Jan. 19, 2010
7646489 Apparatus and method for measuring film thickness Jan. 12, 2010
7589843 Self referencing heterodyne reflectometer and method for implementing Sep. 15, 2009
7586622 Measuring thickness of a device layer using reflectance and transmission profiles of baseline devices Sep. 8, 2009
7580134 Method of measuring micro-structure, micro-structure measurement apparatus, and micro-structure analytical system Aug. 25, 2009
7573582 Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring Aug. 11, 2009
7564566 Method and system for analyzing low-coherence interferometry signals for information about thin film structures Jul. 21, 2009
7551294 System and method for brewster angle straddle interferometry Jun. 23, 2009
7545503 Self referencing heterodyne reflectometer and method for implementing Jun. 9, 2009
7492467 Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate Feb. 17, 2009
7483148 Ellipsometric investigation of very thin films Jan. 27, 2009
7468799 Scanning interferometry for thin film thickness and surface measurements Dec. 23, 2008
7443512 Apparatus and method for measurement of film thickness using improved fast fourier transformation Oct. 28, 2008
7439073 Kit for biochemical sensor and measuring apparatus Oct. 21, 2008
7411685 Spectrometric measuring instrument Aug. 12, 2008
7394551 Vacuum ultraviolet referencing reflectometer Jul. 1, 2008
7375360 Light device of arranging thin film inspection sensor array, and method and apparatus for arranging sensor array using the same May. 20, 2008
7372579 Apparatus and method for monitoring trench profiles and for spectrometrologic analysis May. 13, 2008
7365860 System capable of determining applied and anodized coating thickness of a coated-anodized product Apr. 29, 2008
7362448 Characterizing residue on a sample Apr. 22, 2008
7339682 Heterodyne reflectometer for film thickness monitoring and method for implementing Mar. 4, 2008
7333022 Safety monitoring mechanism of a wafer fabrication platform Feb. 19, 2008
7327468 Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films Feb. 5, 2008
7324210 Scanning interferometry for thin film thickness and surface measurements Jan. 29, 2008
7321431 Method and system for analyzing low-coherence interferometry signals for information about thin film structures Jan. 22, 2008
7307735 Method for determining the depth of a buried structure Dec. 11, 2007
7304744 Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light Dec. 4, 2007
7301149 Apparatus and method for determining a thickness of a deposited material Nov. 27, 2007
7292349 Method for biomolecular sensing and system thereof Nov. 6, 2007
7286242 Apparatus for measuring characteristics of thin film by means of two-dimensional detector and method of measuring the same Oct. 23, 2007
7286243 Beam profile complex reflectance system and method for thin film and critical dimension measurements Oct. 23, 2007
7277184 Method of characterization of liquid crystal cell Oct. 2, 2007
7274463 Anodizing system with a coating thickness monitor and an anodized product Sep. 25, 2007
7248372 Technologies for measuring thickness of an optical disc Jul. 24, 2007
7236253 Optical method measuring thin film growth Jun. 26, 2007
7202954 Target detecting apparatus, target detection method and target detection substrate Apr. 10, 2007

1 2 3 4

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