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Class Information
Number: 356/494
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having polarization > For dimensional measurement > Displacement or distance > Having wavefront division (e.g., by diffraction)
Description: Displacement or distance wherein the beams to be combined are obtained by dividing the wavefront of an input beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7471397 |
Position-measuring device |
Dec. 30, 2008 |
| 7443518 |
Measuring instrument, in particular for transmission measurement in vacuum system |
Oct. 28, 2008 |
| 7428059 |
Measurement method and apparatus, exposure apparatus, and device manufacturing method |
Sep. 23, 2008 |
| 7375820 |
Interference measuring apparatus for detecting a plurality of stable phase difference signals |
May. 20, 2008 |
| 7349101 |
Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby |
Mar. 25, 2008 |
| 7336367 |
Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device |
Feb. 26, 2008 |
| 7304749 |
Point diffraction interferometer and exposure apparatus and method using the same |
Dec. 4, 2007 |
| 7286245 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser |
Oct. 23, 2007 |
| 7277182 |
Apparatus for polarization-specific examination, optical imaging system, and calibration method |
Oct. 2, 2007 |
| 7187449 |
Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device |
Mar. 6, 2007 |
| 7061624 |
Grating interference type optical encoder |
Jun. 13, 2006 |
| 7034947 |
Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation |
Apr. 25, 2006 |
| 7019842 |
Position measuring device |
Mar. 28, 2006 |
| 6956654 |
Displacement measuring device with interference grating |
Oct. 18, 2005 |
| 6806962 |
Tilted interferometer |
Oct. 19, 2004 |
| 6775008 |
Opto-electronic scale reading apparatus |
Aug. 10, 2004 |
| 6771377 |
Optical displacement sensing device with reduced sensitivity to misalignment |
Aug. 3, 2004 |
| 6679609 |
Laser beam irradiation device |
Jan. 20, 2004 |
| 6639683 |
Interferometric sensor and method to detect optical fields |
Oct. 28, 2003 |
| 6631047 |
Interference device, position detecting device, positioning device and information recording apparatus using the same |
Oct. 7, 2003 |
| 6618218 |
Displacement detecting apparatus and information recording apparatus |
Sep. 9, 2003 |
| 6570660 |
Measuring instrument |
May. 27, 2003 |
| 6469793 |
Multi-channel grating interference alignment sensor |
Oct. 22, 2002 |
| 6399940 |
Optical rotary position encoder |
Jun. 4, 2002 |
| 6204926 |
Methods and system for optically correlating ultrashort optical waveforms |
Mar. 20, 2001 |
| 6111646 |
Null test fourier domain alignment technique for phase-shifting point diffraction interferometer |
Aug. 29, 2000 |
| 5973786 |
Method for absolutely measuring the diffraction grating spacing and apparatus thereof |
Oct. 26, 1999 |
| 5956140 |
Displacement detection apparatus and drive control apparatus using the same constructed to prevent collision between gratings |
Sep. 21, 1999 |
| 5926276 |
Apparatus having an afocal lens system used in optical measurement of displacement |
Jul. 20, 1999 |
| 5812320 |
Optical encoder having high resolution |
Sep. 22, 1998 |
| 5760903 |
Light measuring apparatus |
Jun. 2, 1998 |
| 5751426 |
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object |
May. 12, 1998 |
| 5541729 |
Measuring apparatus utilizing diffraction of reflected and transmitted light |
Jul. 30, 1996 |
| 5532819 |
Rotary detector having an optical system for guiding two diffracted lights |
Jul. 2, 1996 |
| 5517307 |
Probe measurement apparatus using a curved grating displacement interferometer |
May. 14, 1996 |
| 5499096 |
Optical instrument and measurement for measuring displacement of scale using different order diffraction of a diffraction grating |
Mar. 12, 1996 |
| 5424829 |
Apparatus wherein diffracted light does not return to the source |
Jun. 13, 1995 |
| 5347355 |
Signal processing apparatus and method, and displacement detecting apparatus using the same |
Sep. 13, 1994 |
| 5333048 |
Polarizing interferometric displacement measuring arrangement |
Jul. 26, 1994 |
| 5235406 |
Object displacement detection |
Aug. 10, 1993 |
| 5198873 |
Encoder utilizing interference using multi-mode semiconductor laser |
Mar. 30, 1993 |
| 5164791 |
Minute displacement detector using optical interferometry |
Nov. 17, 1992 |
| 5155553 |
Multiple-color null lens employing refractive and diffractive optical elements |
Oct. 13, 1992 |
| 5146085 |
Encoder with high resolving power and accuracy |
Sep. 8, 1992 |
| 5126562 |
Encoder for setting optical path lengths of related beams |
Jun. 30, 1992 |
| 5104225 |
Position detector and method of measuring position |
Apr. 14, 1992 |
| 5101102 |
Rotary encoder having a plurality of beams emitted by a diffraction grating |
Mar. 31, 1992 |
| 5067813 |
Optical apparatus for measuring displacement of an object |
Nov. 26, 1991 |
| 5066130 |
Displacement measuring apparatus |
Nov. 19, 1991 |
| 5038032 |
Encoder incorporating a displaceable diffraction grating |
Aug. 6, 1991 |
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