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Class Information
Number: 356/493
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having polarization > For dimensional measurement > Displacement or distance
Description: Dimensional measurement wherein the interferometer is arranged to measure small changes in position of an article or small length of space between two points.

Sub-classes under this class:

Class Number Class Name Patents
356/494 Having wavefront division (e.g., by diffraction) 70

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8687200 Method and device for measuring motion error of linear stage Apr. 1, 2014
8665448 Sensor arrangement and detection method Mar. 4, 2014
8659761 Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light Feb. 25, 2014
8643844 Laser distance measuring apparatus with beam switch Feb. 4, 2014
8629985 Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Jan. 14, 2014
8610880 Distance measuring apparatus and distance measuring method Dec. 17, 2013
8559015 Measuring apparatus Oct. 15, 2013
8514405 Tracking type laser gauge interferometer with rotation mechanism correction Aug. 20, 2013
8479310 Dynamic probe detection system Jul. 2, 2013
8441649 Multi-beam interferometer displacement measuring system utilized in a large measuring range May. 14, 2013
8423171 Method for processing workpiece in tool machine and behavior measurement device Apr. 16, 2013
8411278 Measurement of small accelerations by optical weak value amplification Apr. 2, 2013
8284406 Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Oct. 9, 2012
8223342 Methods and systems for measuring target movement with an interferometer Jul. 17, 2012
8220066 Vibration compensation in probe microscopy Jul. 10, 2012
8195015 Method and device for dynamic measurement of the radial deformation of a rolling bearing ring Jun. 5, 2012
8081315 Displacement measuring instrument and displacement measuring method Dec. 20, 2011
8064066 Method and apparatus for measuring displacement of a sample to be inspected using an interference light Nov. 22, 2011
8031344 Z-stage configuration and application thereof Oct. 4, 2011
7999918 Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method Aug. 16, 2011
7952720 Apparatus and method for using a counter-propagating signal method for locating events May. 31, 2011
7869056 Linear displacement and tilting angle measuring device Jan. 11, 2011
7860681 Dynamic analyzer of a mechanical motion transmission system Dec. 28, 2010
7732750 Wavefront coding interference contrast imaging systems Jun. 8, 2010
7663764 Measuring device and method to optically measure an object Feb. 16, 2010
7652771 Interferometer with Double Polarizing Beam Splitter Jan. 26, 2010
7612321 Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner Nov. 3, 2009
7612889 Method and apparatus for measuring displacement of a sample Nov. 3, 2009
7599070 Optical axis polarization type laser interferometer Oct. 6, 2009
7561278 Interferometer using integrated retarders to reduce physical volume Jul. 14, 2009
7554671 Absolute position measurement apparatus Jun. 30, 2009
7551290 Absolute position measurement apparatus Jun. 23, 2009
7542149 Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector Jun. 2, 2009
7532330 Angle interferometers May. 12, 2009
7528961 Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers May. 5, 2009
7525665 Polarising interferometer Apr. 28, 2009
7499176 Apparatus and method for using a counter-propagating signal method for locating events Mar. 3, 2009
7499177 Apparatus and method for using a counter-propagating signal method for locating events Mar. 3, 2009
7391521 Position detection apparatus and method Jun. 24, 2008
7382466 Coating for reflective optical components Jun. 3, 2008
7379187 Detector configuration for interferometric distance measurement May. 27, 2008
7372577 Monolithic, spatially-separated, common path interferometer May. 13, 2008
7358516 System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an Apr. 15, 2008
7355719 Interferometer for measuring perpendicular translations Apr. 8, 2008
7333214 Detector for interferometric distance measurement Feb. 19, 2008
7330272 Discrete quarter wave plates for displacement measuring interferometers Feb. 12, 2008
7330237 Exposure apparatus equipped with interferometer and method of using same Feb. 12, 2008
7317539 Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method Jan. 8, 2008
7315380 Laser interferometer for repeatable mounting on the wall of a vacuum chamber Jan. 1, 2008
7315381 Monolithic quadrature detector Jan. 1, 2008

1 2 3 4

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