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Class Information
Number: 356/493
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having polarization > For dimensional measurement > Displacement or distance
Description: Dimensional measurement wherein the interferometer is arranged to measure small changes in position of an article or small length of space between two points.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612321 |
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
Nov. 3, 2009 |
| 7612889 |
Method and apparatus for measuring displacement of a sample |
Nov. 3, 2009 |
| 7599070 |
Optical axis polarization type laser interferometer |
Oct. 6, 2009 |
| 7561278 |
Interferometer using integrated retarders to reduce physical volume |
Jul. 14, 2009 |
| 7554671 |
Absolute position measurement apparatus |
Jun. 30, 2009 |
| 7551290 |
Absolute position measurement apparatus |
Jun. 23, 2009 |
| 7542149 |
Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector |
Jun. 2, 2009 |
| 7532330 |
Angle interferometers |
May. 12, 2009 |
| 7528961 |
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers |
May. 5, 2009 |
| 7525665 |
Polarising interferometer |
Apr. 28, 2009 |
| 7499176 |
Apparatus and method for using a counter-propagating signal method for locating events |
Mar. 3, 2009 |
| 7499177 |
Apparatus and method for using a counter-propagating signal method for locating events |
Mar. 3, 2009 |
| 7391521 |
Position detection apparatus and method |
Jun. 24, 2008 |
| 7382466 |
Coating for reflective optical components |
Jun. 3, 2008 |
| 7379187 |
Detector configuration for interferometric distance measurement |
May. 27, 2008 |
| 7372577 |
Monolithic, spatially-separated, common path interferometer |
May. 13, 2008 |
| 7358516 |
System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an |
Apr. 15, 2008 |
| 7355719 |
Interferometer for measuring perpendicular translations |
Apr. 8, 2008 |
| 7333214 |
Detector for interferometric distance measurement |
Feb. 19, 2008 |
| 7330272 |
Discrete quarter wave plates for displacement measuring interferometers |
Feb. 12, 2008 |
| 7330237 |
Exposure apparatus equipped with interferometer and method of using same |
Feb. 12, 2008 |
| 7317539 |
Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method |
Jan. 8, 2008 |
| 7315381 |
Monolithic quadrature detector |
Jan. 1, 2008 |
| 7315380 |
Laser interferometer for repeatable mounting on the wall of a vacuum chamber |
Jan. 1, 2008 |
| 7310152 |
Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies |
Dec. 18, 2007 |
| 7298493 |
Interferometric optical assemblies and systems including interferometric optical assemblies |
Nov. 20, 2007 |
| 7283248 |
Multi-axis interferometers and methods and systems using multi-axis interferometers |
Oct. 16, 2007 |
| 7276718 |
System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an |
Oct. 2, 2007 |
| 7274468 |
Optical beam shearing apparatus |
Sep. 25, 2007 |
| 7268886 |
Method and apparatus for simultaneously measuring displacement and angular variations |
Sep. 11, 2007 |
| 7224466 |
Compact multi-axis interferometer |
May. 29, 2007 |
| 7212290 |
Differential interferometers creating desired beam patterns |
May. 1, 2007 |
| 7193721 |
Systems using polarization-manipulating retroreflectors |
Mar. 20, 2007 |
| 7158236 |
Heterodyne laser interferometer for measuring wafer stage translation |
Jan. 2, 2007 |
| 7139446 |
Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar |
Nov. 21, 2006 |
| 7139080 |
Interferometry systems involving a dynamic beam-steering assembly |
Nov. 21, 2006 |
| 7130057 |
Method and apparatus for controlling the position of a probe location relative to a fixed reference point of a probe processing equipment |
Oct. 31, 2006 |
| 7110120 |
Movement-direction determination apparatus |
Sep. 19, 2006 |
| 7046370 |
Interferometer with reduced shear |
May. 16, 2006 |
| 7030993 |
Athermal zero-shear interferometer |
Apr. 18, 2006 |
| 7009711 |
Retroreflector coating for an interferometer |
Mar. 7, 2006 |
| 6961130 |
Heterodyne beam delivery with active control of two orthogonal polarizations |
Nov. 1, 2005 |
| 6961129 |
Active control of two orthogonal polarizations for heterodyne interferometry |
Nov. 1, 2005 |
| 6947148 |
Interferometric apparatus and method with phase shift compensation |
Sep. 20, 2005 |
| 6934036 |
Configuration measuring apparatus and method |
Aug. 23, 2005 |
| 6914682 |
Interferometer and position measuring device |
Jul. 5, 2005 |
| 6897962 |
Interferometer using beam re-tracing to eliminate beam walk-off |
May. 24, 2005 |
| 6876453 |
Metrology system for precision 3D motion |
Apr. 5, 2005 |
| 6856402 |
Interferometer with dynamic beam steering element |
Feb. 15, 2005 |
| 6836335 |
Multi-axis interferometer |
Dec. 28, 2004 |
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