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Class Information
Number: 356/492
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having polarization > For dimensional measurement
Description: Polarized light wherein the interference pattern is indicative of the height, width, depth, thickness or change in a position of an object.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7623246 |
Optical sensing devices with SPR sensors based on differential phase interrogation and measuring method using the same |
Nov. 24, 2009 |
| 7612888 |
Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate |
Nov. 3, 2009 |
| 7609386 |
Optical characteristic measuring apparatus |
Oct. 27, 2009 |
| 7542149 |
Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector |
Jun. 2, 2009 |
| 7538885 |
Optical characteristic measuring apparatus |
May. 26, 2009 |
| 7471396 |
Dual polarization interferometers for measuring opposite sides of a workpiece |
Dec. 30, 2008 |
| 7339682 |
Heterodyne reflectometer for film thickness monitoring and method for implementing |
Mar. 4, 2008 |
| 7298492 |
Method and system for on-line measurement of thickness and birefringence of thin plastic films |
Nov. 20, 2007 |
| 7268887 |
Overlapping common-path interferometers for two-sided measurement |
Sep. 11, 2007 |
| 7268886 |
Method and apparatus for simultaneously measuring displacement and angular variations |
Sep. 11, 2007 |
| 7239397 |
Device for high-accuracy measurement of dimensional changes |
Jul. 3, 2007 |
| 7196797 |
Differential interferometer with improved cyclic nonlinearity |
Mar. 27, 2007 |
| 7180599 |
Polarization effect averaging |
Feb. 20, 2007 |
| 7173714 |
Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
Feb. 6, 2007 |
| 7116429 |
Determining thickness of slabs of materials by inventors |
Oct. 3, 2006 |
| 7034947 |
Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation |
Apr. 25, 2006 |
| 6897031 |
Multiparameter FACS assays to detect alterations in exocytosis |
May. 24, 2005 |
| 6888639 |
In-situ film thickness measurement using spectral interference at grazing incidence |
May. 3, 2005 |
| 6876451 |
Monolithic multiaxis interferometer |
Apr. 5, 2005 |
| 6876453 |
Metrology system for precision 3D motion |
Apr. 5, 2005 |
| 6870628 |
Alignment of optical fiber to optical port of integrated optical circuit |
Mar. 22, 2005 |
| 6856403 |
Optically stimulated electron emission contamination monitor and method |
Feb. 15, 2005 |
| 6822745 |
Optical systems for measuring form and geometric dimensions of precision engineered parts |
Nov. 23, 2004 |
| 6819431 |
Polymer retarder |
Nov. 16, 2004 |
| 6806962 |
Tilted interferometer |
Oct. 19, 2004 |
| 6804009 |
Wollaston prism phase-stepping point diffraction interferometer and method |
Oct. 12, 2004 |
| 6788220 |
Multi-speed capacitive displacement encoder |
Sep. 7, 2004 |
| 6760113 |
Crystal based fringe generator system |
Jul. 6, 2004 |
| 6726103 |
Imaging system with built-in diagnostics |
Apr. 27, 2004 |
| 6727992 |
Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements |
Apr. 27, 2004 |
| 6710883 |
Apparatus and method for measuring flatness of thin plate |
Mar. 23, 2004 |
| 6636322 |
Method and device for measuring cell gap of liquid crystal display using near-IR radiation |
Oct. 21, 2003 |
| 6624892 |
Method and apparatus for fly height testing using light emitting diodes |
Sep. 23, 2003 |
| 6594021 |
Analysis system for interferometric scanning of donor corneal tissue |
Jul. 15, 2003 |
| 6552798 |
Position detecting method and system for use in exposure apparatus |
Apr. 22, 2003 |
| 6542247 |
Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies |
Apr. 1, 2003 |
| 6538744 |
Method for measuring simultaneously absolute molecular orientation with effective second order nonlinear optical constant and apparatus therefor |
Mar. 25, 2003 |
| 6480285 |
Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation |
Nov. 12, 2002 |
| 6476912 |
Method of measuring surface form of semiconductor thin film |
Nov. 5, 2002 |
| 6459487 |
System and method for fabricating components of precise optical path length |
Oct. 1, 2002 |
| 6411389 |
Optical monitor for real time thickness change measurements via lateral-translation induced phase-stepping interferometry |
Jun. 25, 2002 |
| 6307633 |
Method and apparatus for performing scanning optical coherence confocal microscopy through a scattering medium |
Oct. 23, 2001 |
| 6252666 |
Method and apparatus for performing optical coherence-domain reflectometry and imaging through a scattering medium employing a power-efficient interferometer |
Jun. 26, 2001 |
| 6233055 |
Method and apparatus for performing optical coherence-domain reflectometry and imaging through a scattering medium |
May. 15, 2001 |
| 6104486 |
Fabrication process of a semiconductor device using ellipsometry |
Aug. 15, 2000 |
| 6084673 |
Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders |
Jul. 4, 2000 |
| 5973785 |
Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabri |
Oct. 26, 1999 |
| 5953125 |
Optical gap measuring apparatus and method |
Sep. 14, 1999 |
| 5949546 |
Interference apparatus for measuring absolute and differential motions of same or different testing surface |
Sep. 7, 1999 |
| 5898500 |
Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack |
Apr. 27, 1999 |
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