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Class Information
Number: 356/492
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having polarization > For dimensional measurement
Description: Polarized light wherein the interference pattern is indicative of the height, width, depth, thickness or change in a position of an object.

Sub-classes under this class:

Class Number Class Name Patents
356/495 Contour or profile 157
356/493 Displacement or distance 163

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
8649019 Shape determining device Feb. 11, 2014
8422023 Compact high resolution imaging apparatus Apr. 16, 2013
8379219 Compound interferometer with monolithic measurement cavity Feb. 19, 2013
8345258 Synchronous frequency-shift mechanism in fizeau interferometer Jan. 1, 2013
8255181 Correcting tilt-induced cyclic variations in signals from radially arrayed spectrophotometer sensors Aug. 28, 2012
8169612 System and method for performing ellipsometric measurements on an arbitrarily large or continuously moving sample May. 1, 2012
7952722 Optical image measurement device May. 31, 2011
7929148 Optical coherence tomography implementation apparatus and method of use Apr. 19, 2011
7929120 Apparatus for controlling optical fringe generation member based on detected optical fringe and method therefor Apr. 19, 2011
7898670 Distortion measurement imaging system Mar. 1, 2011
7894074 Laser doppler vibrometer employing active frequency feedback Feb. 22, 2011
7860681 Dynamic analyzer of a mechanical motion transmission system Dec. 28, 2010
7852485 Single trace multi-channel low coherence interferometric sensor Dec. 14, 2010
7812962 Polarization mode dispersion measurement using an improved fixed analyzer method Oct. 12, 2010
7710577 Multiplexing spectrum interference optical coherence tomography May. 4, 2010
7675628 Synchronous frequency-shift mechanism in Fizeau interferometer Mar. 9, 2010
7650018 Image creation device, image creation method, and image creation program Jan. 19, 2010
7623246 Optical sensing devices with SPR sensors based on differential phase interrogation and measuring method using the same Nov. 24, 2009
7612888 Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate Nov. 3, 2009
7609386 Optical characteristic measuring apparatus Oct. 27, 2009
7542149 Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector Jun. 2, 2009
7538885 Optical characteristic measuring apparatus May. 26, 2009
7471396 Dual polarization interferometers for measuring opposite sides of a workpiece Dec. 30, 2008
7339682 Heterodyne reflectometer for film thickness monitoring and method for implementing Mar. 4, 2008
7298492 Method and system for on-line measurement of thickness and birefringence of thin plastic films Nov. 20, 2007
7268886 Method and apparatus for simultaneously measuring displacement and angular variations Sep. 11, 2007
7268887 Overlapping common-path interferometers for two-sided measurement Sep. 11, 2007
7239397 Device for high-accuracy measurement of dimensional changes Jul. 3, 2007
7196797 Differential interferometer with improved cyclic nonlinearity Mar. 27, 2007
7180599 Polarization effect averaging Feb. 20, 2007
7173714 Apparatus for parallel detection of the behaviour of mechanical micro-oscillators Feb. 6, 2007
7116429 Determining thickness of slabs of materials by inventors Oct. 3, 2006
7034947 Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation Apr. 25, 2006
6897031 Multiparameter FACS assays to detect alterations in exocytosis May. 24, 2005
6888639 In-situ film thickness measurement using spectral interference at grazing incidence May. 3, 2005
6876453 Metrology system for precision 3D motion Apr. 5, 2005
6876451 Monolithic multiaxis interferometer Apr. 5, 2005
6870628 Alignment of optical fiber to optical port of integrated optical circuit Mar. 22, 2005
6856403 Optically stimulated electron emission contamination monitor and method Feb. 15, 2005
6822745 Optical systems for measuring form and geometric dimensions of precision engineered parts Nov. 23, 2004
6819431 Polymer retarder Nov. 16, 2004
6806962 Tilted interferometer Oct. 19, 2004
6804009 Wollaston prism phase-stepping point diffraction interferometer and method Oct. 12, 2004
6788220 Multi-speed capacitive displacement encoder Sep. 7, 2004
6760113 Crystal based fringe generator system Jul. 6, 2004
6726103 Imaging system with built-in diagnostics Apr. 27, 2004
6727992 Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements Apr. 27, 2004
6710883 Apparatus and method for measuring flatness of thin plate Mar. 23, 2004
6636322 Method and device for measuring cell gap of liquid crystal display using near-IR radiation Oct. 21, 2003
6624892 Method and apparatus for fly height testing using light emitting diodes Sep. 23, 2003

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