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Class Information
Number: 356/488
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having light beams of different frequencies (e.g., heterodyning) > For dimensional measurement (e.g., thickness gap, alignment, profile) > Displacement or distance > Polarization > Having wavefront division (e.g., by diffraction)
Description: Polarization wherein the beams to be combined are obtained by dividing the wavefront of an input beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7443518 |
Measuring instrument, in particular for transmission measurement in vacuum system |
Oct. 28, 2008 |
| 7046368 |
Position measuring arrangement |
May. 16, 2006 |
| 6919561 |
Diffraction laser encoder apparatus |
Jul. 19, 2005 |
| 6674519 |
Optical phase front measurement unit |
Jan. 6, 2004 |
| 6304318 |
Lithography system and method of manufacturing devices using the lithography system |
Oct. 16, 2001 |
| 6204926 |
Methods and system for optically correlating ultrashort optical waveforms |
Mar. 20, 2001 |
| 5818588 |
Displacement measuring method and apparatus using plural light beam beat frequency signals |
Oct. 6, 1998 |
| 5751426 |
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object |
May. 12, 1998 |
| 5682239 |
Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second l |
Oct. 28, 1997 |
| 5625453 |
System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating |
Apr. 29, 1997 |
| 5541729 |
Measuring apparatus utilizing diffraction of reflected and transmitted light |
Jul. 30, 1996 |
| 5498878 |
Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit |
Mar. 12, 1996 |
| 5448357 |
Position detecting system for detecting a position of an object by detecting beat signals produced through interference of diffraction light |
Sep. 5, 1995 |
| 5436724 |
Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam |
Jul. 25, 1995 |
| 5404220 |
Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams |
Apr. 4, 1995 |
| 5369486 |
Position detector for detecting the position of an object using a diffraction grating positioned at an angle |
Nov. 29, 1994 |
| 5327222 |
Displacement information detecting apparatus |
Jul. 5, 1994 |
| 5164789 |
Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference |
Nov. 17, 1992 |
| 5141317 |
Method of optoelectronically measuring distances and angles |
Aug. 25, 1992 |
| RE34010 |
Position detection apparatus |
Jul. 28, 1992 |
| 5118932 |
Shaft rotation rate sensor with a diffraction grating producing a velocity-related beat frequency |
Jun. 2, 1992 |
| 5050993 |
Diffraction encoded position measuring apparatus |
Sep. 24, 1991 |
| 5000572 |
Distance measuring system |
Mar. 19, 1991 |
| 4815850 |
Relative-displacement measurement method |
Mar. 28, 1989 |
| 4772119 |
Device for detecting a magnification error in an optical imaging system |
Sep. 20, 1988 |
| 4710026 |
Position detection apparatus |
Dec. 1, 1987 |
| 3930734 |
Process and apparatus for sensing magnitude and direction of lateral displacement |
Jan. 6, 1976 |
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