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Class Information
Number: 356/487
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having light beams of different frequencies (e.g., heterodyning) > For dimensional measurement (e.g., thickness gap, alignment, profile) > Displacement or distance > Polarization
Description: Distance or displacement measurement in which interacting light waves of a heterodyning interferometer are polarized.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7554670 |
Surface inspection by double pass laser doppler vibrometry |
Jun. 30, 2009 |
| 7542147 |
Data age compensation with avalanche photodiode |
Jun. 2, 2009 |
| 7528961 |
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers |
May. 5, 2009 |
| 7495770 |
Beam shear reduction in interferometry systems |
Feb. 24, 2009 |
| 7394548 |
Heterodyne laser interferometer using heterogenous mode helium-neon laser and super heterodyne phase measuring method |
Jul. 1, 2008 |
| 7375819 |
System and method for generating beams of light using an anisotropic acousto-optic modulator |
May. 20, 2008 |
| 7372576 |
System and method for generating beams of light using an anisotropic acousto-optic modulator |
May. 13, 2008 |
| 7365857 |
Precompensation of polarization errors in heterodyne interferometry |
Apr. 29, 2008 |
| 7330272 |
Discrete quarter wave plates for displacement measuring interferometers |
Feb. 12, 2008 |
| 7330237 |
Exposure apparatus equipped with interferometer and method of using same |
Feb. 12, 2008 |
| 7312876 |
Optical image measuring apparatus |
Dec. 25, 2007 |
| 7298492 |
Method and system for on-line measurement of thickness and birefringence of thin plastic films |
Nov. 20, 2007 |
| 7277180 |
Optical connection for interferometry |
Oct. 2, 2007 |
| 7251039 |
Low non-linear error displacement measuring interferometer |
Jul. 31, 2007 |
| 7242481 |
Laser vibrometry with coherent detection |
Jul. 10, 2007 |
| 7193766 |
Differential interferometric light modulator and image display device |
Mar. 20, 2007 |
| 7126695 |
Heterodyne frequency modulated signal demodulator and method of operating the same |
Oct. 24, 2006 |
| 7106451 |
Frequency splitting laser micrometer |
Sep. 12, 2006 |
| 7101053 |
Multidirectional retroreflectors |
Sep. 5, 2006 |
| 7075619 |
In-process correction of stage mirror deformations during a photolithography exposure cycle |
Jul. 11, 2006 |
| 7049155 |
Multi beam scanning with bright/dark field imaging |
May. 23, 2006 |
| 7038788 |
Angle-of-rotation measuring device and angle-of-rotation measuring method |
May. 2, 2006 |
| 7009710 |
Direct combination of fiber optic light beams |
Mar. 7, 2006 |
| 6954273 |
Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams |
Oct. 11, 2005 |
| 6943894 |
Laser distance measuring system and laser distance measuring method |
Sep. 13, 2005 |
| 6900899 |
Interferometers with coated polarizing beam splitters that are rotated to optimize extinction ratios |
May. 31, 2005 |
| 6897962 |
Interferometer using beam re-tracing to eliminate beam walk-off |
May. 24, 2005 |
| 6856402 |
Interferometer with dynamic beam steering element |
Feb. 15, 2005 |
| 6822746 |
Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes |
Nov. 23, 2004 |
| 6806960 |
Compact beam re-tracing optics to eliminate beam walk-off in an interferometer |
Oct. 19, 2004 |
| 6806961 |
Interferometric cyclic error compensation |
Oct. 19, 2004 |
| 6806962 |
Tilted interferometer |
Oct. 19, 2004 |
| 6788420 |
Heterodyne interferometer with a phase modulated source |
Sep. 7, 2004 |
| 6778280 |
Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components |
Aug. 17, 2004 |
| 6765491 |
Distance detecting device |
Jul. 20, 2004 |
| 6753968 |
Optical storage system based on scanning interferometric near-field confocal microscopy |
Jun. 22, 2004 |
| 6710881 |
Heterodyne interferometry for small spacing measurement |
Mar. 23, 2004 |
| 6631004 |
Single-pass and multi-pass interferometry systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion |
Oct. 7, 2003 |
| 6597505 |
Apparatus for producing and guiding a light beam |
Jul. 22, 2003 |
| 6573985 |
Wavelength dispersion measuring device and a method thereof |
Jun. 3, 2003 |
| 6573996 |
Method and apparatus for enhanced precision interferometric distance measurement |
Jun. 3, 2003 |
| 6556306 |
Differential time domain spectroscopy method for measuring thin film dielectric properties |
Apr. 29, 2003 |
| 6541759 |
Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection |
Apr. 1, 2003 |
| 6542247 |
Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies |
Apr. 1, 2003 |
| 6519042 |
Interferometer system for displacement and straightness measurements |
Feb. 11, 2003 |
| 6509971 |
Interferometer system |
Jan. 21, 2003 |
| 6483593 |
Hetrodyne interferometer and associated interferometric method |
Nov. 19, 2002 |
| 6452682 |
Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam |
Sep. 17, 2002 |
| 6404505 |
Positioning stage system and position measuring method |
Jun. 11, 2002 |
| 6327037 |
Optical rotation angle polarimeter |
Dec. 4, 2001 |
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