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Class Information
Number: 356/487
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having light beams of different frequencies (e.g., heterodyning) > For dimensional measurement (e.g., thickness gap, alignment, profile) > Displacement or distance > Polarization
Description: Distance or displacement measurement in which interacting light waves of a heterodyning interferometer are polarized.

Sub-classes under this class:

Class Number Class Name Patents
356/488 Having wavefront division (e.g., by diffraction) 32

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8654342 Interferometric distance-measuring method with delayed chirp signal and such an apparatus Feb. 18, 2014
8629985 Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Jan. 14, 2014
8610880 Distance measuring apparatus and distance measuring method Dec. 17, 2013
8610897 High-resolution surface plasmon microscope with heterodyne interferometry in radial polarization mode Dec. 17, 2013
8559015 Measuring apparatus Oct. 15, 2013
8363226 Optical interference measuring apparatus Jan. 29, 2013
8325348 Laser interferometer system for measuring roll angle Dec. 4, 2012
8284406 Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope Oct. 9, 2012
8220066 Vibration compensation in probe microscopy Jul. 10, 2012
8209134 Methods for modeling the structural health of a civil structure based on electronic distance measurements Jun. 26, 2012
8171051 Quantum-based oblivious transfer and private data sampling protocols and systems for performing the same May. 1, 2012
7973939 Differential-phase polarization-sensitive optical coherence tomography system Jul. 5, 2011
7895015 Method for measuring the structural health of a civil structure Feb. 22, 2011
7864332 Differential-phase interferometric system Jan. 4, 2011
7856334 Method for calibrating a laser-based spherical coordinate measurement system by a mechanical harmonic oscillator Dec. 21, 2010
RE41877 Multidirectional retroreflectors Oct. 26, 2010
7705994 Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs Apr. 27, 2010
7692796 Optical characteristic measuring apparatus Apr. 6, 2010
7663764 Measuring device and method to optically measure an object Feb. 16, 2010
7554670 Surface inspection by double pass laser doppler vibrometry Jun. 30, 2009
7542147 Data age compensation with avalanche photodiode Jun. 2, 2009
7528961 Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers May. 5, 2009
7495770 Beam shear reduction in interferometry systems Feb. 24, 2009
7394548 Heterodyne laser interferometer using heterogenous mode helium-neon laser and super heterodyne phase measuring method Jul. 1, 2008
7375819 System and method for generating beams of light using an anisotropic acousto-optic modulator May. 20, 2008
7372576 System and method for generating beams of light using an anisotropic acousto-optic modulator May. 13, 2008
7365857 Precompensation of polarization errors in heterodyne interferometry Apr. 29, 2008
7330272 Discrete quarter wave plates for displacement measuring interferometers Feb. 12, 2008
7330237 Exposure apparatus equipped with interferometer and method of using same Feb. 12, 2008
7312876 Optical image measuring apparatus Dec. 25, 2007
7298492 Method and system for on-line measurement of thickness and birefringence of thin plastic films Nov. 20, 2007
7277180 Optical connection for interferometry Oct. 2, 2007
7251039 Low non-linear error displacement measuring interferometer Jul. 31, 2007
7242481 Laser vibrometry with coherent detection Jul. 10, 2007
7193766 Differential interferometric light modulator and image display device Mar. 20, 2007
7126695 Heterodyne frequency modulated signal demodulator and method of operating the same Oct. 24, 2006
7106451 Frequency splitting laser micrometer Sep. 12, 2006
7101053 Multidirectional retroreflectors Sep. 5, 2006
7075619 In-process correction of stage mirror deformations during a photolithography exposure cycle Jul. 11, 2006
7049155 Multi beam scanning with bright/dark field imaging May. 23, 2006
7038788 Angle-of-rotation measuring device and angle-of-rotation measuring method May. 2, 2006
7009710 Direct combination of fiber optic light beams Mar. 7, 2006
6954273 Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams Oct. 11, 2005
6943894 Laser distance measuring system and laser distance measuring method Sep. 13, 2005
6900899 Interferometers with coated polarizing beam splitters that are rotated to optimize extinction ratios May. 31, 2005
6897962 Interferometer using beam re-tracing to eliminate beam walk-off May. 24, 2005
6856402 Interferometer with dynamic beam steering element Feb. 15, 2005
6822746 Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes Nov. 23, 2004
6806960 Compact beam re-tracing optics to eliminate beam walk-off in an interferometer Oct. 19, 2004
6806961 Interferometric cyclic error compensation Oct. 19, 2004

1 2 3 4

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