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Class Information
Number: 356/486
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > Having light beams of different frequencies (e.g., heterodyning) > For dimensional measurement (e.g., thickness gap, alignment, profile) > Displacement or distance
Description: Dimensional measurement wherein the interferometer is arranged to measure small changes in position of an article or small length of space between two points.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7576868 |
Cyclic error compensation in interferometry systems |
Aug. 18, 2009 |
| 7545508 |
Interferometric apparatus utilizing a cantilever array to measure a surface |
Jun. 9, 2009 |
| 7535578 |
Lithographic apparatus and interferometer system |
May. 19, 2009 |
| 7511824 |
Chirped coherent laser radar system and method |
Mar. 31, 2009 |
| 7477398 |
Multi-beam heterodyne laser doppler vibrometer |
Jan. 13, 2009 |
| 7436519 |
System and method for interferometer non-linearity compensation |
Oct. 14, 2008 |
| 7420689 |
Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor |
Sep. 2, 2008 |
| 7324712 |
Quality factor |
Jan. 29, 2008 |
| 7317538 |
Optical two-dimensional velocity and/or movement detector |
Jan. 8, 2008 |
| 7193721 |
Systems using polarization-manipulating retroreflectors |
Mar. 20, 2007 |
| 7126695 |
Heterodyne frequency modulated signal demodulator and method of operating the same |
Oct. 24, 2006 |
| 7116426 |
Multi-beam heterodyne laser Doppler vibrometer |
Oct. 3, 2006 |
| 7095504 |
Apodization of beams in an optical interferometer |
Aug. 22, 2006 |
| 7057736 |
Cyclic error reduction in average interferometric position measurements |
Jun. 6, 2006 |
| 7046367 |
Interferometric servo control system for stage metrology |
May. 16, 2006 |
| 6972846 |
Multi-beam heterodyne laser doppler vibrometer |
Dec. 6, 2005 |
| 6956656 |
Interferometric servo control system for stage metrology |
Oct. 18, 2005 |
| 6954273 |
Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams |
Oct. 11, 2005 |
| 6950192 |
Cyclic error compensation in interferometry systems |
Sep. 27, 2005 |
| 6943894 |
Laser distance measuring system and laser distance measuring method |
Sep. 13, 2005 |
| 6934035 |
System and method for measuring optical distance |
Aug. 23, 2005 |
| 6900895 |
Phase noise compensation in an interferometric system |
May. 31, 2005 |
| 6897961 |
Heterodyne lateral grating interferometric encoder |
May. 24, 2005 |
| 6876453 |
Metrology system for precision 3D motion |
Apr. 5, 2005 |
| 6847455 |
Heterodyne interferometer with angstrom-level periodic nonlinearity |
Jan. 25, 2005 |
| 6839141 |
Method and apparatus for compensation of time-varying optical properties of gas in interferometry |
Jan. 4, 2005 |
| 6806962 |
Tilted interferometer |
Oct. 19, 2004 |
| 6795197 |
Interferometer system and litographic step-and-scan apparatus provided with such a system |
Sep. 21, 2004 |
| 6792811 |
Method and system for measuring vibration of an object |
Sep. 21, 2004 |
| 6747744 |
Interferometric servo control system for stage metrology |
Jun. 8, 2004 |
| 6724486 |
Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry |
Apr. 20, 2004 |
| 6710880 |
Interferometric apparatus for ultra-high precision displacement measurement |
Mar. 23, 2004 |
| 6646723 |
High precision laser range sensor |
Nov. 11, 2003 |
| 6603561 |
Chromatic diffraction range finder |
Aug. 5, 2003 |
| 6538746 |
Method and device for measuring absolute interferometric length |
Mar. 25, 2003 |
| 6512588 |
Method and system for correcting an interferometric angle measurement for the effects of dispersion |
Jan. 28, 2003 |
| 6496266 |
Measuring device for absolute measurement of displacement |
Dec. 17, 2002 |
| 6472981 |
Machine tool probe with wireless signal transmission |
Oct. 29, 2002 |
| 6441907 |
High accuracy ring laser interferometer using an external cavity ring laser |
Aug. 27, 2002 |
| 6417927 |
Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer |
Jul. 9, 2002 |
| 6411390 |
Interferometric system for measurement disturbance of a sample |
Jun. 25, 2002 |
| 6384899 |
Lithographic projection apparatus |
May. 7, 2002 |
| 6351312 |
Interference-type distance measuring device |
Feb. 26, 2002 |
| 6285455 |
Mark detection method, optical system and mark position detector |
Sep. 4, 2001 |
| 6243168 |
Dynamic optical micrometer |
Jun. 5, 2001 |
| 6208424 |
Interferometric apparatus and method for measuring motion along multiple axes |
Mar. 27, 2001 |
| 6137574 |
Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry |
Oct. 24, 2000 |
| 6137585 |
Method and apparatus for recording three-dimensional distribution of light backscattering potential in transparent and semi-transparent structures |
Oct. 24, 2000 |
| 6008902 |
Method and device for heterodyne interferometer error correction |
Dec. 28, 1999 |
| 5828454 |
Optical heterodyne interferometer for measurement of ocular displacement |
Oct. 27, 1998 |
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