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Class Information
Number: 356/401
Name: Optics: measuring and testing > By alignment in lateral direction > With registration indicia (e.g., scale)
Description: Subject matter wherein visual marking are used to determine the degree of alignment.

Patents under this class:

Patent Number Title Of Patent Date Issued
8706442 Alignment system, lithographic system and method Apr. 22, 2014
8705007 Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Apr. 22, 2014
8681313 Diffraction elements for alignment targets Mar. 25, 2014
8675175 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8674524 Alignment marks and a semiconductor workpiece Mar. 18, 2014
8668872 Fluorescent nanoscopy device and method Mar. 11, 2014
8654351 Offset amount calibrating method and surface profile measuring machine Feb. 18, 2014
8643842 Method and system for use in monitoring properties of patterned structures Feb. 4, 2014
8638438 Self-calibrated alignment and overlay target and measurement Jan. 28, 2014
8634034 Stereoscopic image display and alignment method thereof Jan. 21, 2014
8625096 Method and system for increasing alignment target contrast Jan. 7, 2014
8592287 Overlay alignment mark and method of detecting overlay alignment error using the mark Nov. 26, 2013
8592107 Method and apparatus of providing overlay Nov. 26, 2013
8587782 Optical-component fabricating method and optical-component fabricating apparatus Nov. 19, 2013
8582102 TFT-LCD array substrate, method and apparatus for detecting size or alignment deviation of multilayer patterns Nov. 12, 2013
8570516 Infrared direct illumination machine vision technique for semiconductor processing equipment Oct. 29, 2013
8564143 Overlay mark for multiple pre-layers and currently layer Oct. 22, 2013
8554510 Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product Oct. 8, 2013
8546962 Mark structure and method for measuring alignment accuracy between former layer and latter layer Oct. 1, 2013
8532366 Position detecting method Sep. 10, 2013
8514395 Exposure method, exposure apparatus, and device manufacturing method Aug. 20, 2013
RE44434 Optical position measuring system and method using a low coherence light source Aug. 13, 2013
8508736 Tunable wavelength illumination system Aug. 13, 2013
8502979 Methods and systems for determining a critical dimension and overlay of a specimen Aug. 6, 2013
8502978 Surface position detecting apparatus, exposure apparatus, surface position detecting method, and device manufacturing method Aug. 6, 2013
8497997 Semiconductor device and method of manufacturing the same Jul. 30, 2013
8489227 Transport method and transport apparatus Jul. 16, 2013
8482732 Alignment system for various materials and material flows Jul. 9, 2013
8477310 Measurement method, measurement apparatus, exposure method, and exposure apparatus Jul. 2, 2013
8467058 Light source assembly and related lens testing device Jun. 18, 2013
8450685 Electron probe microanalyzer and data processing method implemented therein May. 28, 2013
8436998 Method of measuring focus of a lithographic projection apparatus May. 7, 2013
8435593 Method of inspecting a substrate and method of preparing a substrate for lithography May. 7, 2013
8432548 Alignment for edge field nano-imprinting Apr. 30, 2013
8432534 Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturin Apr. 30, 2013
8426857 Semiconductor device and method for producing the same Apr. 23, 2013
8417018 Method for inspecting and judging photomask blank or intermediate thereof Apr. 9, 2013
8416412 Method for determination of residual errors Apr. 9, 2013
8411271 Pattern forming method, pattern forming apparatus, and device manufacturing method Apr. 2, 2013
8411270 Monitoring stage alignment and related stage and calibration target Apr. 2, 2013
8400634 Semiconductor wafer alignment markers, and associated systems and methods Mar. 19, 2013
8395755 Lithographic apparatus and device manufacturing method Mar. 12, 2013
8390809 Exposure method, exposure apparatus, and method of manufacturing device Mar. 5, 2013
8390808 Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Mar. 5, 2013
8384900 Exposure apparatus Feb. 26, 2013
8379204 System and method for automatic laser beam alignment Feb. 19, 2013
8363220 Method of determining overlay error and a device manufacturing method Jan. 29, 2013
8363219 Lateral shift measurement using an optical technique Jan. 29, 2013
8363218 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Jan. 29, 2013
8361876 Manufacturing method of semiconductor device Jan. 29, 2013

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