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Class Information
Number: 356/401
Name: Optics: measuring and testing > By alignment in lateral direction > With registration indicia (e.g., scale)
Description: Subject matter wherein visual marking are used to determine the degree of alignment.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619738 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection |
Nov. 17, 2009 |
| 7619737 |
Method of measurement, an inspection apparatus and a lithographic apparatus |
Nov. 17, 2009 |
| 7616313 |
Apparatus and methods for detecting overlay errors using scatterometry |
Nov. 10, 2009 |
| 7612882 |
Optical gratings, lithography tools including such optical gratings and methods for using same for alignment |
Nov. 3, 2009 |
| 7612881 |
Method of alignment of an optical module and an optical module using thereof |
Nov. 3, 2009 |
| 7608468 |
Apparatus and methods for determining overlay and uses of same |
Oct. 27, 2009 |
| 7602492 |
Overlay measuring method and related semiconductor fabrication equipment management system |
Oct. 13, 2009 |
| 7602491 |
Optical gain approach for enhancement of overlay and alignment systems performance |
Oct. 13, 2009 |
| 7599064 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods |
Oct. 6, 2009 |
| 7599063 |
Method for checking alignment accuracy using overlay mark |
Oct. 6, 2009 |
| 7586609 |
Method for analyzing overlay errors |
Sep. 8, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7580131 |
Angularly resolved scatterometer and inspection method |
Aug. 25, 2009 |
| 7576859 |
Alignment apparatus and alignment method |
Aug. 18, 2009 |
| 7576858 |
Position detecting method |
Aug. 18, 2009 |
| 7573584 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Aug. 11, 2009 |
| 7573580 |
Optical position measuring system and method using a low coherence light source |
Aug. 11, 2009 |
| 7573574 |
Lithographic apparatus and device manufacturing method |
Aug. 11, 2009 |
| 7564557 |
Apparatus and methods for detecting overlay errors using scatterometry |
Jul. 21, 2009 |
| 7564556 |
Method and apparatus for lens contamination control |
Jul. 21, 2009 |
| 7564555 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Jul. 21, 2009 |
| 7564554 |
Wafer-based optical pattern recognition targets using regions of gratings |
Jul. 21, 2009 |
| 7564534 |
Alignment system and method |
Jul. 21, 2009 |
| 7561282 |
Techniques for determining overlay and critical dimension using a single metrology tool |
Jul. 14, 2009 |
| 7561270 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Jul. 14, 2009 |
| 7557921 |
Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools |
Jul. 7, 2009 |
| 7547884 |
Pattern defect inspection method and apparatus thereof |
Jun. 16, 2009 |
| 7545497 |
Alignment routine for optically based tools |
Jun. 9, 2009 |
| 7545480 |
Reticle, exposure apparatus, and methods for measuring the alignment state thereof |
Jun. 9, 2009 |
| 7541601 |
Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
Jun. 2, 2009 |
| 7535001 |
Method and system for focusing a charged particle beam |
May. 19, 2009 |
| 7528954 |
Method of adjusting optical imaging system, positional deviation detecting mark, method of detecting positional deviation, method of detecting position, position detecting device and mark iden |
May. 5, 2009 |
| 7528953 |
Target acquisition and overlay metrology based on two diffracted orders imaging |
May. 5, 2009 |
| 7525671 |
Registration method and apparatus therefor |
Apr. 28, 2009 |
| 7522262 |
Method for determining position of reference point |
Apr. 21, 2009 |
| 7521679 |
Inspection method and inspection system using charged particle beam |
Apr. 21, 2009 |
| 7518726 |
Compact optical detection system for a microfluidic device |
Apr. 14, 2009 |
| 7511817 |
Reticle, reticle inspection method and reticle inspection apparatus |
Mar. 31, 2009 |
| 7508515 |
System and method for manufacturing printed circuit boards employing non-uniformly modified images |
Mar. 24, 2009 |
| 7505116 |
Lithographic apparatus and device manufacturing method |
Mar. 17, 2009 |
| 7495780 |
Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing method |
Feb. 24, 2009 |
| 7486397 |
Device for aligning substrate with mask and method using the same |
Feb. 3, 2009 |
| 7477403 |
Optical position assessment apparatus and method |
Jan. 13, 2009 |
| 7477390 |
Exposure method and apparatus, and device manufacturing method |
Jan. 13, 2009 |
| 7474401 |
Multi-layer alignment and overlay target and measurement method |
Jan. 6, 2009 |
| 7468795 |
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same |
Dec. 23, 2008 |
| 7466414 |
Position detection apparatus and method |
Dec. 16, 2008 |
| 7466413 |
Marker structure, mask pattern, alignment method and lithographic method and apparatus |
Dec. 16, 2008 |
| 7466412 |
Method of detecting displacement of exposure position marks |
Dec. 16, 2008 |
| 7463337 |
Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus |
Dec. 9, 2008 |
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