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Class Information
Number: 356/400
Name: Optics: measuring and testing > By alignment in lateral direction > With light detector (e.g., photocell)
Description: Subject matter including means responsive to light.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619738 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection |
Nov. 17, 2009 |
| 7586626 |
Measurement method, exposure method, exposure apparatus, and device fabrication method |
Sep. 8, 2009 |
| 7583834 |
Laser etched fiducials in roll-roll display |
Sep. 1, 2009 |
| 7583359 |
Reduction of fit error due to non-uniform sample distribution |
Sep. 1, 2009 |
| 7573584 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Aug. 11, 2009 |
| 7562809 |
Method for detecting component placement errors in product assembly and assemblies made therewith |
Jul. 21, 2009 |
| 7561270 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Jul. 14, 2009 |
| 7541601 |
Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
Jun. 2, 2009 |
| 7542151 |
Method of placing at least one component on at least one substrate as well as such a system |
Jun. 2, 2009 |
| 7535551 |
Projection lens unit with focus and level control, related exposure apparatus and method |
May. 19, 2009 |
| 7525659 |
System for detection of water defects |
Apr. 28, 2009 |
| 7511816 |
Methods and systems for determining drift in a position of a light beam with respect to a chuck |
Mar. 31, 2009 |
| 7508514 |
Correction of off-axis translation of optical elements in an optical zoom assembly |
Mar. 24, 2009 |
| 7501602 |
Optical path axis aligning device of laser beam machine |
Mar. 10, 2009 |
| 7499186 |
Laser survey device |
Mar. 3, 2009 |
| 7495780 |
Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing method |
Feb. 24, 2009 |
| 7486397 |
Device for aligning substrate with mask and method using the same |
Feb. 3, 2009 |
| 7477403 |
Optical position assessment apparatus and method |
Jan. 13, 2009 |
| 7471395 |
Light-emitting module and methods for optically aligning and assembling the same |
Dec. 30, 2008 |
| 7462814 |
Methods and systems for lithography process control |
Dec. 9, 2008 |
| 7436513 |
Wafer pre-alignment apparatus and method |
Oct. 14, 2008 |
| 7433038 |
Alignment of substrates for bonding |
Oct. 7, 2008 |
| 7414722 |
Alignment measurement arrangement and alignment measurement method |
Aug. 19, 2008 |
| 7414713 |
Method of measuring focal point, instrument used therefor, and method of fabricating semiconductor device |
Aug. 19, 2008 |
| 7405810 |
Method and apparatus for positioning a substrate on a substrate table |
Jul. 29, 2008 |
| 7397039 |
Real-time compensation of mechanical position error in pattern generation or imaging applications |
Jul. 8, 2008 |
| 7388663 |
Optical position assessment apparatus and method |
Jun. 17, 2008 |
| 7385700 |
Management system, apparatus, and method, exposure apparatus, and control method therefor |
Jun. 10, 2008 |
| 7375795 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
May. 20, 2008 |
| 7375361 |
Optical alignment device for machine tool |
May. 20, 2008 |
| 7368206 |
Automated overlay metrology system |
May. 6, 2008 |
| 7369237 |
Substrate processing apparatus and substrate processing system |
May. 6, 2008 |
| 7365848 |
System and method using visible and infrared light to align and measure alignment patterns on multiple layers |
Apr. 29, 2008 |
| 7359053 |
Optical array with beam alignment feature |
Apr. 15, 2008 |
| 7348574 |
Position measurement system and lithographic apparatus |
Mar. 25, 2008 |
| 7332732 |
Alignment systems and methods for lithographic systems |
Feb. 19, 2008 |
| 7332255 |
Overlay box structure for measuring process induced line shortening effect |
Feb. 19, 2008 |
| 7329888 |
Alignment systems and methods for lithographic systems |
Feb. 12, 2008 |
| 7319506 |
Alignment system and method |
Jan. 15, 2008 |
| 7316938 |
Adjustable film frame aligner |
Jan. 8, 2008 |
| 7313873 |
Surface position measuring method, exposure apparatus, and device manufacturing method |
Jan. 1, 2008 |
| 7315348 |
Exposure apparatus, focal point detecting method, exposure method and device manufacturing method |
Jan. 1, 2008 |
| 7312871 |
Method and apparatus for alignment of components |
Dec. 25, 2007 |
| 7312872 |
System and method for automated positioning of camera |
Dec. 25, 2007 |
| 7312870 |
Optical alignment detection system |
Dec. 25, 2007 |
| 7312846 |
Lithographic apparatus and device manufacturing method |
Dec. 25, 2007 |
| 7312461 |
Laparoscopic tumor therapy using high energy electron irradiation |
Dec. 25, 2007 |
| 7304738 |
Method for actively aligning an optoelectronic device |
Dec. 4, 2007 |
| 7301163 |
Lateral shift measurement using an optical technique |
Nov. 27, 2007 |
| 7300163 |
Slide misload detection system and method |
Nov. 27, 2007 |
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