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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/400
Name: Optics: measuring and testing > By alignment in lateral direction > With light detector (e.g., photocell)
Description: Subject matter including means responsive to light.










Patents under this class:

Patent Number Title Of Patent Date Issued
8709687 Substrate and patterning device for use in metrology, metrology method and device manufacturing method Apr. 29, 2014
8705007 Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Apr. 22, 2014
8675180 Maskless exposure apparatus and method of alignment for overlay in maskless exposure Mar. 18, 2014
8675175 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8638438 Self-calibrated alignment and overlay target and measurement Jan. 28, 2014
8618510 Optically integrated microfluidic cytometers for high throughput screening of photophysical properties of cells or particles Dec. 31, 2013
8542358 Optical calibration and testing device for machine tools Sep. 24, 2013
8535821 Optical leak detection sensor Sep. 17, 2013
8531666 Method for positioning viewing center of parallax barrier Sep. 10, 2013
8525994 Periodic patterns and technique to control misaligment between two layers Sep. 3, 2013
8524426 Method of manufacturing a photomask Sep. 3, 2013
8514395 Exposure method, exposure apparatus, and device manufacturing method Aug. 20, 2013
8514382 Optical device and method for measuring the rotation of an object Aug. 20, 2013
8497983 Optical authentication Jul. 30, 2013
8493563 Overlay measurement apparatus and method Jul. 23, 2013
8489227 Transport method and transport apparatus Jul. 16, 2013
8482732 Alignment system for various materials and material flows Jul. 9, 2013
8477310 Measurement method, measurement apparatus, exposure method, and exposure apparatus Jul. 2, 2013
8455804 Apparatus for adjusting optical mirrors Jun. 4, 2013
8451524 Modifying the output of a laser to achieve a flat top in the laser's Gaussian beam intensity profile May. 28, 2013
8451426 Exposure method and exposure apparatus May. 28, 2013
8441653 Apparatus and method for batch non-contact material characterization May. 14, 2013
8436994 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like May. 7, 2013
8435593 Method of inspecting a substrate and method of preparing a substrate for lithography May. 7, 2013
8421934 Method for orienting an optical element on a screen Apr. 16, 2013
8416411 Methods and apparatuses for adjusting a variable sheave pulley Apr. 9, 2013
RE44116 Substrate-alignment using detector of substrate material Apr. 2, 2013
8411270 Monitoring stage alignment and related stage and calibration target Apr. 2, 2013
8408461 System and method for image analysis pointing-error correction Apr. 2, 2013
8395755 Lithographic apparatus and device manufacturing method Mar. 12, 2013
8390809 Exposure method, exposure apparatus, and method of manufacturing device Mar. 5, 2013
8390808 Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Mar. 5, 2013
8363219 Lateral shift measurement using an optical technique Jan. 29, 2013
8354209 Lithographic apparatus and device manufacturing method Jan. 15, 2013
8339613 Making method of sample for evaluation of laser irradiation position and making apparatus thereof and evaluation method of stability of laser irradiation position and evaluation apparatus ther Dec. 25, 2012
8325325 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method Dec. 4, 2012
8289516 Method of measuring focus of a lithographic projection apparatus Oct. 16, 2012
8284399 Alignment system for optical lithography Oct. 9, 2012
8248608 Imprint lithography Aug. 21, 2012
8248583 Lithographic apparatus and calibration method Aug. 21, 2012
8244399 Transport method and transport apparatus Aug. 14, 2012
8243273 Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Aug. 14, 2012
8243259 Lithographic apparatus Aug. 14, 2012
8208140 Alignment system and alignment marks for use therewith Jun. 26, 2012
8208139 Alignment system and alignment marks for use therewith Jun. 26, 2012
8208128 Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufa Jun. 26, 2012
8197071 Light source device and image display apparatus Jun. 12, 2012
8189195 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method May. 29, 2012
8187778 Method for correcting a position error of lithography apparatus May. 29, 2012
8182099 Noise immune optical encoder for high ambient light projection imaging systems May. 22, 2012











 
 
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