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Class Information
Number: 356/399
Name: Optics: measuring and testing > By alignment in lateral direction
Description: Subject matter where two objects or an object and a light beam are laterally aligned by displacing the objects along an axis essentially normal to the line connecting them or displacing the object and light beam along an axis essentially normal to the light beam.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7602489 |
Lithographic apparatus and device manufacturing method |
Oct. 13, 2009 |
| 7602490 |
Liquid ejecting head alignment apparatus and liquid ejecting head alignment method |
Oct. 13, 2009 |
| 7602491 |
Optical gain approach for enhancement of overlay and alignment systems performance |
Oct. 13, 2009 |
| 7593104 |
Method for manufacturing optical module, positioning apparatus, evaluation method and evaluation apparatus for evaluating optical module |
Sep. 22, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7573585 |
Detection apparatus detecting predetermined positions of member |
Aug. 11, 2009 |
| 7562809 |
Method for detecting component placement errors in product assembly and assemblies made therewith |
Jul. 21, 2009 |
| 7561260 |
System for verifying the accuracy of lens holder attachment, lens attachment stage, and lens processing system |
Jul. 14, 2009 |
| 7548798 |
Paste dispenser and method for controlling the same |
Jun. 16, 2009 |
| 7542141 |
Stage controller and exposure method in which position of the stage is controlled based on position measurements of first and second laser interferometers |
Jun. 2, 2009 |
| 7535001 |
Method and system for focusing a charged particle beam |
May. 19, 2009 |
| 7532305 |
Lithographic apparatus and device manufacturing method using overlay measurement |
May. 12, 2009 |
| 7522262 |
Method for determining position of reference point |
Apr. 21, 2009 |
| 7515281 |
Lithographic apparatus and device manufacturing method |
Apr. 7, 2009 |
| 7508512 |
Continuous optical self-alignment for light curtains and optical presence sensors for simplification and maintenance of alignment |
Mar. 24, 2009 |
| 7508513 |
Measuring apparatus and measuring method |
Mar. 24, 2009 |
| 7508514 |
Correction of off-axis translation of optical elements in an optical zoom assembly |
Mar. 24, 2009 |
| 7505134 |
Automated ellipsometer and the like systems |
Mar. 17, 2009 |
| 7486397 |
Device for aligning substrate with mask and method using the same |
Feb. 3, 2009 |
| 7480051 |
Apparatus and method for hard-docking a tester to a tiltable imager |
Jan. 20, 2009 |
| 7471395 |
Light-emitting module and methods for optically aligning and assembling the same |
Dec. 30, 2008 |
| 7466412 |
Method of detecting displacement of exposure position marks |
Dec. 16, 2008 |
| 7466411 |
Replacement and alignment of laser |
Dec. 16, 2008 |
| 7459247 |
Lithographic apparatus and device manufacturing method |
Dec. 2, 2008 |
| 7460229 |
Beam alignment in spectroscopic microscopes |
Dec. 2, 2008 |
| 7456966 |
Alignment mark system and method to improve wafer alignment search range |
Nov. 25, 2008 |
| 7446872 |
Positioning apparatus and positioning method using the same |
Nov. 4, 2008 |
| 7443505 |
Optical alignment method and apparatus |
Oct. 28, 2008 |
| 7417580 |
Object detection system and object detection method |
Aug. 26, 2008 |
| 7414713 |
Method of measuring focal point, instrument used therefor, and method of fabricating semiconductor device |
Aug. 19, 2008 |
| 7411678 |
Alignment apparatus, control method thereof, exposure apparatus and method of manufacturing semiconductor device by exposure apparatus controlled by the same control method |
Aug. 12, 2008 |
| 7410880 |
Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate |
Aug. 12, 2008 |
| 7408642 |
Registration target design for managing both reticle grid error and wafer overlay |
Aug. 5, 2008 |
| 7405388 |
Video centerscope for machine alignment |
Jul. 29, 2008 |
| 7388663 |
Optical position assessment apparatus and method |
Jun. 17, 2008 |
| 7382448 |
Alignment system for observation instruments |
Jun. 3, 2008 |
| 7375810 |
Overlay error detection |
May. 20, 2008 |
| 7375361 |
Optical alignment device for machine tool |
May. 20, 2008 |
| 7372569 |
Method of correcting alignment errors in a segmented reflective surface |
May. 13, 2008 |
| 7372029 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
May. 13, 2008 |
| 7368206 |
Automated overlay metrology system |
May. 6, 2008 |
| 7369214 |
Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors |
May. 6, 2008 |
| 7369237 |
Substrate processing apparatus and substrate processing system |
May. 6, 2008 |
| 7369238 |
Lens blank alignment and blocking device and method |
May. 6, 2008 |
| 7359053 |
Optical array with beam alignment feature |
Apr. 15, 2008 |
| 7355675 |
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus |
Apr. 8, 2008 |
| 7339282 |
Topographically indexed support substrates |
Mar. 4, 2008 |
| 7333199 |
Aligning optical components with three degrees of translational freedom |
Feb. 19, 2008 |
| 7332255 |
Overlay box structure for measuring process induced line shortening effect |
Feb. 19, 2008 |
| 7315373 |
Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device |
Jan. 1, 2008 |
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