| |
 |
|
Class Information
Number: 356/399
Name: Optics: measuring and testing > By alignment in lateral direction
Description: Subject matter where two objects or an object and a light beam are laterally aligned by displacing the objects along an axis essentially normal to the line connecting them or displacing the object and light beam along an axis essentially normal to the light beam.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7388663 |
Optical position assessment apparatus and method |
Jun. 17, 2008 |
| 7382448 |
Alignment system for observation instruments |
Jun. 3, 2008 |
| 7375810 |
Overlay error detection |
May. 20, 2008 |
| 7375361 |
Optical alignment device for machine tool |
May. 20, 2008 |
| 7372029 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
May. 13, 2008 |
| 7372569 |
Method of correcting alignment errors in a segmented reflective surface |
May. 13, 2008 |
| 7369237 |
Substrate processing apparatus and substrate processing system |
May. 6, 2008 |
| 7369238 |
Lens blank alignment and blocking device and method |
May. 6, 2008 |
| 7369214 |
Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors |
May. 6, 2008 |
| 7368206 |
Automated overlay metrology system |
May. 6, 2008 |
| 7359053 |
Optical array with beam alignment feature |
Apr. 15, 2008 |
| 7355675 |
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus |
Apr. 8, 2008 |
| 7339282 |
Topographically indexed support substrates |
Mar. 4, 2008 |
| 7332255 |
Overlay box structure for measuring process induced line shortening effect |
Feb. 19, 2008 |
| 7333199 |
Aligning optical components with three degrees of translational freedom |
Feb. 19, 2008 |
| 7315373 |
Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device |
Jan. 1, 2008 |
| 7315374 |
Real-time monitoring optically trapped carbon nanotubes |
Jan. 1, 2008 |
| 7312864 |
Measurement device and process for determining the straightness of hollow cylindrical or hollow conical bodies and their orientation relative to one another |
Dec. 25, 2007 |
| 7312870 |
Optical alignment detection system |
Dec. 25, 2007 |
| 7312871 |
Method and apparatus for alignment of components |
Dec. 25, 2007 |
| 7310130 |
Lithographic apparatus and position measuring method |
Dec. 18, 2007 |
| 7307727 |
Method and apparatus for forming substrate for semiconductor or the like |
Dec. 11, 2007 |
| 7304738 |
Method for actively aligning an optoelectronic device |
Dec. 4, 2007 |
| 7301604 |
Method to predict and identify defocus wafers |
Nov. 27, 2007 |
| 7289212 |
Lithographic apparatus, device manufacturing method and device manufacturing thereby |
Oct. 30, 2007 |
| 7286230 |
Alignment system, device and method |
Oct. 23, 2007 |
| 7280211 |
Method of adjusting monitor axis |
Oct. 9, 2007 |
| 7277173 |
Active optical alignment using MEMS mirrors |
Oct. 2, 2007 |
| 7277185 |
Method of measuring overlay |
Oct. 2, 2007 |
| 7274451 |
Optical beam translation device and method utilizing a pivoting optical fiber |
Sep. 25, 2007 |
| 7268877 |
Method and apparatus for orienting semiconductor wafers in semiconductor fabrication |
Sep. 11, 2007 |
| 7265364 |
Level sensor for lithographic apparatus |
Sep. 4, 2007 |
| 7265840 |
Coupling method for coupling high power optical beams into an optical waveguide |
Sep. 4, 2007 |
| 7261983 |
Reference wafer and process for manufacturing same |
Aug. 28, 2007 |
| 7262850 |
Method for inspection of periodic grating structures on lithography masks |
Aug. 28, 2007 |
| 7256833 |
Method and apparatus for automatically optimizing optical contrast in automated equipment |
Aug. 14, 2007 |
| 7256865 |
Methods and apparatuses for applying wafer-alignment marks |
Aug. 14, 2007 |
| 7248335 |
Exposure apparatus, device manufacturing method, stage apparatus, and alignment method |
Jul. 24, 2007 |
| 7244623 |
Method of manufacturing semiconductor device and apparatus of automatically adjusting semiconductor pattern |
Jul. 17, 2007 |
| 7242475 |
Method of determining aberration of a projection system of a lithographic apparatus |
Jul. 10, 2007 |
| 7242465 |
Device and process for quantitative assessment of the orientation of two machines relative to one another |
Jul. 10, 2007 |
| 7227144 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
Jun. 5, 2007 |
| 7222414 |
Component transfer systems |
May. 29, 2007 |
| 7221178 |
Working system for circuit boards |
May. 22, 2007 |
| 7215425 |
Optical alignment for flow cytometry |
May. 8, 2007 |
| 7202952 |
Fabrication and alignment device |
Apr. 10, 2007 |
| 7199878 |
Scan exposure apparatus and method, and device manufacturing method |
Apr. 3, 2007 |
| 7193713 |
Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the same |
Mar. 20, 2007 |
| 7193714 |
Lens blank alignment and blocking device and method |
Mar. 20, 2007 |
| 7193728 |
Processing apparatus, processing method and position detecting device |
Mar. 20, 2007 |
|
|
|
