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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/399
Name: Optics: measuring and testing > By alignment in lateral direction
Description: Subject matter where two objects or an object and a light beam are laterally aligned by displacing the objects along an axis essentially normal to the line connecting them or displacing the object and light beam along an axis essentially normal to the light beam.










Sub-classes under this class:

Class Number Class Name Patents
356/400 With light detector (e.g., photocell) 1,073
356/401 With registration indicia (e.g., scale) 1,423


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8705007 Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Apr. 22, 2014
8692995 Optical system for projecting an IR or UV test signal with optical alignment of the projection axis in the visible spectral region Apr. 8, 2014
8681313 Diffraction elements for alignment targets Mar. 25, 2014
8675175 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8675180 Maskless exposure apparatus and method of alignment for overlay in maskless exposure Mar. 18, 2014
8638438 Self-calibrated alignment and overlay target and measurement Jan. 28, 2014
8617774 Method and calibration mask for calibrating a position measuring apparatus Dec. 31, 2013
8614796 Measuring station for high-gloss surfaces Dec. 24, 2013
8603905 Dual alignment strategy for optimizing contact layer alignment Dec. 10, 2013
8593646 Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method Nov. 26, 2013
8593632 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method Nov. 26, 2013
8593000 Semiconductor device and manufacturing method thereof Nov. 26, 2013
8582102 TFT-LCD array substrate, method and apparatus for detecting size or alignment deviation of multilayer patterns Nov. 12, 2013
8570516 Infrared direct illumination machine vision technique for semiconductor processing equipment Oct. 29, 2013
8570515 Periodic patterns and technique to control misalignment between two layers Oct. 29, 2013
8542358 Optical calibration and testing device for machine tools Sep. 24, 2013
8524426 Method of manufacturing a photomask Sep. 3, 2013
8514374 Alignment method for semiconductor processing Aug. 20, 2013
8514395 Exposure method, exposure apparatus, and device manufacturing method Aug. 20, 2013
8508735 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method Aug. 13, 2013
8497976 Substrate measurement method and apparatus Jul. 30, 2013
8497997 Semiconductor device and method of manufacturing the same Jul. 30, 2013
8488109 Exposure method, exposure apparatus, and device manufacturing method Jul. 16, 2013
8489227 Transport method and transport apparatus Jul. 16, 2013
8489237 High throughput method of in transit wafer position correction in a system using multiple robots Jul. 16, 2013
8482732 Alignment system for various materials and material flows Jul. 9, 2013
8477310 Measurement method, measurement apparatus, exposure method, and exposure apparatus Jul. 2, 2013
8472009 Exposure apparatus and device manufacturing method Jun. 25, 2013
8462331 Laser processing method and laser processing apparatus Jun. 11, 2013
8455804 Apparatus for adjusting optical mirrors Jun. 4, 2013
8446665 Catadioptric projection objective May. 21, 2013
8441639 Metrology systems and methods May. 14, 2013
8441640 Non-contact substrate support position sensing system and corresponding adjustments May. 14, 2013
8435593 Method of inspecting a substrate and method of preparing a substrate for lithography May. 7, 2013
8436994 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like May. 7, 2013
8436998 Method of measuring focus of a lithographic projection apparatus May. 7, 2013
8422015 Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Apr. 16, 2013
8416411 Methods and apparatuses for adjusting a variable sheave pulley Apr. 9, 2013
8411270 Monitoring stage alignment and related stage and calibration target Apr. 2, 2013
RE44116 Substrate-alignment using detector of substrate material Apr. 2, 2013
8399263 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Mar. 19, 2013
8390809 Exposure method, exposure apparatus, and method of manufacturing device Mar. 5, 2013
8379204 System and method for automatic laser beam alignment Feb. 19, 2013
8363218 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Jan. 29, 2013
8363220 Method of determining overlay error and a device manufacturing method Jan. 29, 2013
8363219 Lateral shift measurement using an optical technique Jan. 29, 2013
8363090 Combining stereo image layers for display Jan. 29, 2013
8355142 Mounting position measuring device Jan. 15, 2013
8345242 Optical system for use in stage control Jan. 1, 2013
8345243 Overlay metrology target Jan. 1, 2013

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16










 
 
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