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Class Information
Number: 356/394
Name: Optics: measuring and testing > By configuration comparison > With comparison to master, desired shape, or reference voltage
Description: Subject matter including optical elements to permit the simultaneous viewing and comparison by the eye or by a photocell of the configuration and (a) a standard configuration of the same type, or (b) a pattern or gauge having a desired or standard shape, (c) another configuration of the same type, or (d) a reference voltage generated as an electrical analog of a desired configuration.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7623229 |
Systems and methods for inspecting wafers |
Nov. 24, 2009 |
| 7620235 |
Device for scanning three-dimensional objects |
Nov. 17, 2009 |
| 7619729 |
Method for detecting particles and defects and inspection equipment thereof |
Nov. 17, 2009 |
| 7617075 |
Library accuracy enhancment and evaluation |
Nov. 10, 2009 |
| 7599051 |
Calibration of a substrate inspection tool |
Oct. 6, 2009 |
| 7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
Sep. 29, 2009 |
| 7595869 |
Optical metrology system optimized with a plurality of design goals |
Sep. 29, 2009 |
| 7593103 |
Light intensity measuring method and electronic device |
Sep. 22, 2009 |
| 7589845 |
Process control using an optical metrology system optimized with signal criteria |
Sep. 15, 2009 |
| 7580129 |
Method and system for improving accuracy of critical dimension metrology |
Aug. 25, 2009 |
| 7580124 |
Dual stage defect region identification and defect detection method and apparatus |
Aug. 25, 2009 |
| 7561269 |
Optical measurement system with systematic error correction |
Jul. 14, 2009 |
| 7557920 |
Method and apparatus for auto-adjusting illumination |
Jul. 7, 2009 |
| 7551767 |
Pattern inspection apparatus |
Jun. 23, 2009 |
| 7548309 |
Inspection apparatus, inspection method, and manufacturing method of pattern substrate |
Jun. 16, 2009 |
| 7542140 |
Detection method using electromagnetic wave and detection apparatus |
Jun. 2, 2009 |
| 7535560 |
Method and system for the inspection of integrated circuit devices having leads |
May. 19, 2009 |
| 7532328 |
Circuit-pattern inspection apparatus |
May. 12, 2009 |
| 7525658 |
System of correlating light measurements |
Apr. 28, 2009 |
| 7518717 |
Exposure apparatus and a device manufacturing method using the same |
Apr. 14, 2009 |
| 7476856 |
Sample dimension-measuring method and charged particle beam apparatus |
Jan. 13, 2009 |
| 7440093 |
Apparatus and methods for providing selective defect sensitivity |
Oct. 21, 2008 |
| 7433032 |
Method and apparatus for inspecting defects in multiple regions with different parameters |
Oct. 7, 2008 |
| 7421109 |
Pattern inspection apparatus |
Sep. 2, 2008 |
| 7417750 |
Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer |
Aug. 26, 2008 |
| 7415149 |
Pattern inspection apparatus |
Aug. 19, 2008 |
| 7394084 |
Method of generating image and illumination device for inspecting substrate |
Jul. 1, 2008 |
| 7369236 |
Defect detection through image comparison using relative measures |
May. 6, 2008 |
| 7365862 |
Methods and apparatus for inspecting an object |
Apr. 29, 2008 |
| 7359043 |
Pattern inspecting method and pattern inspecting apparatus |
Apr. 15, 2008 |
| 7349575 |
Pattern inspection method and apparatus, and pattern alignment method |
Mar. 25, 2008 |
| 7339661 |
Dark field inspection system |
Mar. 4, 2008 |
| 7339672 |
Solid-state image pickup device and signal reading method therefor |
Mar. 4, 2008 |
| 7339651 |
Exposure equipment and related control method |
Mar. 4, 2008 |
| 7339662 |
Exposure apparatus and a device manufacturing method using the same |
Mar. 4, 2008 |
| 7336374 |
Methods and apparatus for generating a mask |
Feb. 26, 2008 |
| 7321433 |
Method and apparatus for optically measuring the topography of nearly planar periodic structures |
Jan. 22, 2008 |
| 7295301 |
Dual stage defect region identification and defect detection method and apparatus |
Nov. 13, 2007 |
| 7292327 |
Circuit-pattern inspection apparatus |
Nov. 6, 2007 |
| 7283235 |
Optical device and inspection module |
Oct. 16, 2007 |
| 7280199 |
System for detecting anomalies and/or features of a surface |
Oct. 9, 2007 |
| 7271903 |
Apparatus and method for testing liquid crystal display panel |
Sep. 18, 2007 |
| 7271891 |
Apparatus and methods for providing selective defect sensitivity |
Sep. 18, 2007 |
| 7271904 |
Seal dispenser for fabricating liquid crystal display panel and method for detecting discontinuous portion of seal pattern using the same |
Sep. 18, 2007 |
| 7248351 |
Optimizing light path uniformity in inspection systems |
Jul. 24, 2007 |
| 7222414 |
Component transfer systems |
May. 29, 2007 |
| 7221446 |
Fluid dispenser and lens inspection device |
May. 22, 2007 |
| 7218771 |
Cam reference for inspection of contour images |
May. 15, 2007 |
| 7215419 |
Method and apparatus for position-dependent optical metrology calibration |
May. 8, 2007 |
| 7196300 |
Dynamic focusing method and apparatus |
Mar. 27, 2007 |
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