| |
 |
|
Class Information
Number: 356/388
Name: Optics: measuring and testing > By configuration comparison
Description: Subject matter including means for comparing a given configuration such as an article, record, or scale with a standard either visually or by means of a photocell, both the preceding being effected by noting the light from the margins or surfaces of the specimens and standards to an observation point.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7542140 |
Detection method using electromagnetic wave and detection apparatus |
Jun. 2, 2009 |
| 7476856 |
Sample dimension-measuring method and charged particle beam apparatus |
Jan. 13, 2009 |
| 7446887 |
Matching optical metrology tools using hypothetical profiles |
Nov. 4, 2008 |
| 7446888 |
Matching optical metrology tools using diffraction signals |
Nov. 4, 2008 |
| 7368745 |
Pattern recognition system |
May. 6, 2008 |
| 7327476 |
Thin films measurement method and system |
Feb. 5, 2008 |
| 7307715 |
Method for the formation of a structure size measured value |
Dec. 11, 2007 |
| 6969836 |
Space carving for measurement of high-curvature areas on a mechanical part |
Nov. 29, 2005 |
| 6798515 |
Method for calculating a scale relationship for an imaging system |
Sep. 28, 2004 |
| 6765282 |
Semiconductor structure and method for determining critical dimensions and overlay error |
Jul. 20, 2004 |
| 6756241 |
Method of manufacturing semiconductor device and system for manufacturing the same |
Jun. 29, 2004 |
| 6734970 |
Method and a device for determining the radiation-damage resistance of an optical material |
May. 11, 2004 |
| 6704107 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mar. 9, 2004 |
| 6671423 |
Method of suppressing geometric distortion of an image space |
Dec. 30, 2003 |
| 6643017 |
Method and system for controlling the photolithography process |
Nov. 4, 2003 |
| 6603529 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates |
Aug. 5, 2003 |
| 6545764 |
Non-contact topographical analysis apparatus and method thereof |
Apr. 8, 2003 |
| 6538739 |
Bubble diagnostics |
Mar. 25, 2003 |
| 6512584 |
Quality control for laser peening |
Jan. 28, 2003 |
| 6501549 |
Method of measuring chemical concentration based on spatial separation and resolution of luminescence |
Dec. 31, 2002 |
| 6498648 |
Procedure for taking a reference measurement |
Dec. 24, 2002 |
| 6452677 |
Method and apparatus for detecting defects in the manufacture of an electronic device |
Sep. 17, 2002 |
| 6424417 |
Method and system for controlling the photolithography process |
Jul. 23, 2002 |
| 6396942 |
Method and apparatus for locating ball grid array packages from two-dimensional image data |
May. 28, 2002 |
| 6381013 |
Test slide for microscopes and method for the production of such a slide |
Apr. 30, 2002 |
| 6373576 |
Method for measuring concentrations of dopants in a liquid carrier on a wafer surface |
Apr. 16, 2002 |
| 6336052 |
Data acquistion image analysis image manipulation interface |
Jan. 1, 2002 |
| 6326606 |
Method and apparatus for checking shape |
Dec. 4, 2001 |
| 6314812 |
Apparatus and method for binocular measurement system |
Nov. 13, 2001 |
| RE37392 |
Fired cartridge examination method and imaging apparatus |
Sep. 25, 2001 |
| 6271022 |
Device for incubating and monitoring multiwell assays |
Aug. 7, 2001 |
| 6222630 |
Measuring and compensating for warp in the inspection of printed circuit board assemblies |
Apr. 24, 2001 |
| 6211505 |
Method and apparatus for checking shape |
Apr. 3, 2001 |
| 6208418 |
Apparatus and method for measurement of the mechanical properties and electromigration of thin films |
Mar. 27, 2001 |
| 6184987 |
Process for detecting and correcting a misalignment between a fiber cable and a light source within a fiber module |
Feb. 6, 2001 |
| 6175417 |
Method and apparatus for detecting defects in the manufacture of an electronic device |
Jan. 16, 2001 |
| 6157451 |
Sample CD measurement system |
Dec. 5, 2000 |
| 6151406 |
Method and apparatus for locating ball grid array packages from two-dimensional image data |
Nov. 21, 2000 |
| 6134001 |
Fluid diagnostic technique |
Oct. 17, 2000 |
| 6100970 |
Apparatus for inspecting slight defects on a photomask pattern |
Aug. 8, 2000 |
| 6075613 |
Optical scanner calibration device |
Jun. 13, 2000 |
| 6075607 |
Method for estimating durability of optical member against excimer laser irradiation and method for selecting silica glass optical member |
Jun. 13, 2000 |
| 6069702 |
Method and apparatus configured for identification of a material |
May. 30, 2000 |
| 6067163 |
Automated substrate pattern recognition system |
May. 23, 2000 |
| 6052193 |
Apparatus and method for inspecting loading state of wafers in carrier |
Apr. 18, 2000 |
| 6040916 |
Process and apparatus for determining the condition of a road surface |
Mar. 21, 2000 |
| 6025918 |
Apparatus and method for measurement of the mechanical properties and electromigration of thin films |
Feb. 15, 2000 |
| 6023335 |
Optoelectronic sensor |
Feb. 8, 2000 |
| 6018394 |
Apparatus and method for imaging fired ammunition |
Jan. 25, 2000 |
| 6016201 |
Inspection method for a correction pattern |
Jan. 18, 2000 |
|
|
|
