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Class Information
Number: 356/369
Name: Optics: measuring and testing > By polarized light examination > Of surface reflection
Description: Subject matter wherein a material or article is examined for surface reflection characteristics by means of polarized light.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619736 |
Apparatus and method for obtaining sample information by detecting electromagnetic wave |
Nov. 17, 2009 |
| 7620276 |
Optimized grating based biosensor and substrate combination |
Nov. 17, 2009 |
| 7616312 |
Apparatus and method for probing integrated circuits using laser illumination |
Nov. 10, 2009 |
| 7616319 |
Spectroscopic ellipsometer and polarimeter systems |
Nov. 10, 2009 |
| 7617075 |
Library accuracy enhancment and evaluation |
Nov. 10, 2009 |
| 7612321 |
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
Nov. 3, 2009 |
| 7612880 |
Advanced polarization imaging method, apparatus, and computer program product for retinal imaging, liquid crystal testing, active remote sensing, and other applications |
Nov. 3, 2009 |
| 7602307 |
Portable modular detection system |
Oct. 13, 2009 |
| 7596422 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables |
Sep. 29, 2009 |
| 7595879 |
Optically measuring substances using propagation modes of light |
Sep. 29, 2009 |
| 7589303 |
Method of determining and/or evaluating a differential optical signal |
Sep. 15, 2009 |
| 7586605 |
Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization state |
Sep. 8, 2009 |
| 7586607 |
Polarization imaging |
Sep. 8, 2009 |
| 7586623 |
Optical metrology of single features |
Sep. 8, 2009 |
| 7583392 |
Surface profile measuring apparatus |
Sep. 1, 2009 |
| 7583834 |
Laser etched fiducials in roll-roll display |
Sep. 1, 2009 |
| 7567345 |
Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample |
Jul. 28, 2009 |
| 7567351 |
High resolution monitoring of CD variations |
Jul. 28, 2009 |
| 7564552 |
Systems and methods for measurement of a specimen with vacuum ultraviolet light |
Jul. 21, 2009 |
| 7565037 |
Reducing depolarisation |
Jul. 21, 2009 |
| 7557918 |
Spectral polarimetric image detection and analysis methods and apparatus |
Jul. 7, 2009 |
| 7557919 |
Apparatus for detecting position of substrate, ellipsometer, and film thickness measuring apparatus |
Jul. 7, 2009 |
| 7554662 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation |
Jun. 30, 2009 |
| 7551281 |
Position sensor |
Jun. 23, 2009 |
| 7541600 |
Lithographic and measurement techniques using the optical properties of biaxial crystals |
Jun. 2, 2009 |
| 7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput |
Jun. 2, 2009 |
| 7535566 |
Beam chromatic shifting and directing means |
May. 19, 2009 |
| 7525657 |
System and method for active optical target detection with polarized receiver |
Apr. 28, 2009 |
| 7518724 |
Image acquisition, processing, and display |
Apr. 14, 2009 |
| 7518725 |
Temperature controlled lens |
Apr. 14, 2009 |
| 7515266 |
System and method for enhancing confocal reflectance images of tissue specimens |
Apr. 7, 2009 |
| 7515253 |
System for measuring a sample with a layer containing a periodic diffracting structure |
Apr. 7, 2009 |
| 7515265 |
Imaging systems and methods to improve backscattering imaging using circular polarization memory |
Apr. 7, 2009 |
| 7508511 |
Method and apparatus for improved ellipsometric measurement of ultrathin films |
Mar. 24, 2009 |
| 7505134 |
Automated ellipsometer and the like systems |
Mar. 17, 2009 |
| 7505133 |
Optical metrology systems and methods |
Mar. 17, 2009 |
| 7505154 |
Optical method for the characterization of laterally patterned samples in integrated circuits |
Mar. 17, 2009 |
| 7499162 |
Method and apparatus for observing and inspecting defects |
Mar. 3, 2009 |
| 7492455 |
Discrete polarization state spectroscopic ellipsometer system and method of use |
Feb. 17, 2009 |
| 7489399 |
Spectroscopic multi angle ellipsometry |
Feb. 10, 2009 |
| 7489400 |
System and method of applying xenon arc-lamps to provide 193 nm wavelengths |
Feb. 10, 2009 |
| 7483148 |
Ellipsometric investigation of very thin films |
Jan. 27, 2009 |
| 7480047 |
Time-domain computation of scattering spectra for use in spectroscopic metrology |
Jan. 20, 2009 |
| 7480050 |
Lithographic system, sensor, and method of measuring properties of a substrate |
Jan. 20, 2009 |
| 7477388 |
Sample masking in ellipsometer and the like systems including detection of substrate backside reflections |
Jan. 13, 2009 |
| 7468794 |
Rotating compensator ellipsometer system with spatial filter equivalent |
Dec. 23, 2008 |
| 7465591 |
Evaluating a geometric or material property of a multilayered structure |
Dec. 16, 2008 |
| 7463355 |
Nondestructive optical technique for simultaneously measuring optical constants and thickness of thin films |
Dec. 9, 2008 |
| 7463369 |
Systems and methods for measuring one or more characteristics of patterned features on a specimen |
Dec. 9, 2008 |
| 7460230 |
Deviation angle self compensating substantially achromatic retarder |
Dec. 2, 2008 |
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