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Class Information
Number: 356/316
Name: Optics: measuring and testing > By dispersed light spectroscopy > With sample excitation (e.g., burning) > By high frequency field (e.g., plasma discharge)
Description: Subject matter wherein the sample is excited by the field generated by a high frequency signal.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
7542140 Detection method using electromagnetic wave and detection apparatus Jun. 2, 2009
7532322 Method and apparatus for measuring electron density of plasma and plasma processing apparatus May. 12, 2009
7511246 Induction device for generating a plasma Mar. 31, 2009
7460225 Miniaturized source devices for optical and mass spectrometry Dec. 2, 2008
7456939 Method and apparatus for chemical monitoring Nov. 25, 2008
7453566 Hybrid plasma element monitor Nov. 18, 2008
7440097 Laser plasma spectroscopy apparatus and method for in situ depth profiling Oct. 21, 2008
7417730 Apparatus and method for monitoring breath acetone and diabetic diagnostics Aug. 26, 2008
7403283 Detecting minority gaseous species by light-emission spectroscopy Jul. 22, 2008
7397560 Surface contamination detection Jul. 8, 2008
7372563 Method and device for carrying out emission spectrometry May. 13, 2008
7319316 Apparatus for measuring a set of electrical characteristics in a plasma Jan. 15, 2008
7317186 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry Jan. 8, 2008
7312857 Method and system for monitoring plasma using optical emission spectrometry Dec. 25, 2007
7280202 Ingredient analysis method and ingredient analysis apparatus Oct. 9, 2007
7241361 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system Jul. 10, 2007
7202946 Method and device utilizing plasma source for real-time gas sampling Apr. 10, 2007
7123361 Microplasma emission spectrometer Oct. 17, 2006
7110110 Sensing component used to monitor material buildup and material erosion of consumables by optical emission Sep. 19, 2006
7106438 ICP-OES and ICP-MS induction current Sep. 12, 2006
7072028 Method and apparatus for chemical monitoring Jul. 4, 2006
7064812 Method of using a sensor gas to determine erosion level of consumable system components Jun. 20, 2006
7053994 Method and apparatus for etch endpoint detection May. 30, 2006
7054008 Method and apparatus for elemental and isotope measurements and diagnostics-microwave induced plasma-cavity ring-down spectroscopy May. 30, 2006
7030979 Microwave plasma source Apr. 18, 2006
7019829 Method and device utilizing plasma source for real-time gas sampling Mar. 28, 2006
6989529 Plasma torch Jan. 24, 2006
6987565 Organometallic compound vaporizing/feeding system Jan. 17, 2006
6979817 Microspray column, mass spectrometer, and mass spectrometry Dec. 27, 2005
6977383 Method and apparatus for generating a membrane target for laser produced plasma Dec. 20, 2005
6949741 Atmospheric pressure ion source Sep. 27, 2005
6950178 Method and system for monitoring plasma using optical emission spectroscopy Sep. 27, 2005
6943879 Method for monitoring and/or controlling the status of a plasma in a plasma spectrometer and spectrometer for implementing such a method Sep. 13, 2005
6894769 Monitoring erosion of system components by optical emission May. 17, 2005
6891605 Multimode sample introduction system May. 10, 2005
6876447 Sighting device and emission spectrometer with inductively coupled plasma source comprising such a device Apr. 5, 2005
6867859 Inductively coupled plasma spectrometer for process diagnostics and control Mar. 15, 2005
6864974 System for use in conditioning a sample for introduction into a sample analysis system Mar. 8, 2005
6859272 Spectrometer sample generating and injecting system using a microliter nebulizer Feb. 22, 2005
6852969 Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media Feb. 8, 2005
6806949 Monitoring material buildup on system components by optical emission Oct. 19, 2004
6784989 Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample Aug. 31, 2004
6774993 Method and apparatus for atomic emission spectroscopy Aug. 10, 2004
6757061 Method and device utilizing real-time gas sampling Jun. 29, 2004
6749715 System and method for analyzing a semiconductor surface Jun. 15, 2004
6750977 Apparatus for monitoring thickness of deposited layer in reactor and dry processing method Jun. 15, 2004
6734964 Pulsed, atmospheric pressure plasma source for emission spectrometry May. 11, 2004
6717666 Method and apparatus for measuring nitrogen in a gas Apr. 6, 2004
6709632 ICP analyzer Mar. 23, 2004
6690462 Calibration scheme for continuous monitoring of mercury emissions from stationary sources by plasma emission spectrometry Feb. 10, 2004

1 2 3 4 5 6 7

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