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Class Information
Number: 356/316
Name: Optics: measuring and testing > By dispersed light spectroscopy > With sample excitation (e.g., burning) > By high frequency field (e.g., plasma discharge)
Description: Subject matter wherein the sample is excited by the field generated by a high frequency signal.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8643840 Cell for light source Feb. 4, 2014
8633416 Plasmas and methods of using them Jan. 21, 2014
RE44603 Atmospheric pressure ion source Nov. 19, 2013
8505303 Impurity detection in combustor systems Aug. 13, 2013
8486866 Method for the quantitative measurement of biomolecular targets deposited on a biochip, and device for implementing it Jul. 16, 2013
8462335 System for analyzing a low-pressure gas by optical emission spectroscopy Jun. 11, 2013
8436991 Device for analysing materials by plasma spectroscopy May. 7, 2013
8410704 Ionization device Apr. 2, 2013
8361805 System and method for automated sample introduction Jan. 29, 2013
8358416 Methods and apparatus for normalizing optical emission spectra Jan. 22, 2013
8310673 Light source Nov. 13, 2012
8289512 Devices and systems including a boost device Oct. 16, 2012
8263897 Induction device Sep. 11, 2012
8239171 System and method of eliminating interference for impurities measurement in noble gases Aug. 7, 2012
8218141 Universal multidetection system for microplates Jul. 10, 2012
8187424 Time domain spectroscopy (TDS)-based method and system for obtaining coincident sheet material parameters May. 29, 2012
8184288 Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machine May. 22, 2012
8168957 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system May. 1, 2012
8149398 Method of measuring gadolinia content using inductively coupled plasma-atomic emission spectrometry Apr. 3, 2012
8144328 Methods and apparatus for normalizing optical emission spectra Mar. 27, 2012
RE43078 Atmospheric pressure ion source Jan. 10, 2012
8018590 Three-dimensional optical sensor and system for combustion sensing and control Sep. 13, 2011
7994478 Inspection apparatus using electromagnetic waves Aug. 9, 2011
7959810 Method for adapting a detection device to be coupled to a liquid chromatography column and equipped with means for forming and conveying an aerosol Jun. 14, 2011
7952694 Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials May. 31, 2011
7952709 Spectrochemical plasma torch and method of manufacture May. 31, 2011
7944558 Method and system for physicochemical analysis using a laser pulsed ablation May. 17, 2011
7911598 Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device Mar. 22, 2011
7908104 Plasma processing apparatus and method for detecting status of said apparatus Mar. 15, 2011
7900525 Cathode handler system Mar. 8, 2011
7901940 Method for measuring recovery of catalytic elements from fuel cells Mar. 8, 2011
7884925 Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials Feb. 8, 2011
7852471 Power generator for spectrometry Dec. 14, 2010
7847934 Method for correcting spectral interference in ICP emission spectroscopy (OES) Dec. 7, 2010
7839499 Hydrogen sensor Nov. 23, 2010
7782456 Direct ICP emission spectral analysis method of solid sample Aug. 24, 2010
7768639 Methods for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry Aug. 3, 2010
7763820 Sorting pieces of material based on photonic emissions resulting from multiple sources of stimuli Jul. 27, 2010
7741621 Apparatus and method for focused electric field enhanced plasma-based ion implantation Jun. 22, 2010
7742167 Optical emission device with boost device Jun. 22, 2010
7732759 Multi-plasma neutral beam source and method of operating Jun. 8, 2010
7733482 System and method for determining at least one constituent in an ambient gas using a microsystem gas sensor Jun. 8, 2010
7710562 Atomic analyzer May. 4, 2010
7705973 Methods and systems for monitoring state of plasma chamber Apr. 27, 2010
7701578 Planar micro-discharge gas detector Apr. 20, 2010
7670455 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system Mar. 2, 2010
7599058 Methods for plasma diagnostics and the measurement of thin films Oct. 6, 2009
7586100 Closed loop control and process optimization in plasma doping processes using a time of flight ion detector Sep. 8, 2009
7580119 Method and apparatus for chemical monitoring Aug. 25, 2009
7554660 Plasma spectroscopy system with a gas supply Jun. 30, 2009

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