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Class Information
Number: 356/239.3
Name: Optics: measuring and testing > Inspection of flaws or impurities > Transparent or translucent material > Patterned surface
Description: Inspection of transparent or translucent material further comprising an applied design or three dimensional configuration.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7385689 |
Method and apparatus for inspecting substrate pattern |
Jun. 10, 2008 |
| 7339664 |
System and method for inspecting a light-management film and method of making the light-management film |
Mar. 4, 2008 |
| 7289655 |
Device for inspecting illumination optical device and method for inspecting illumination optical device |
Oct. 30, 2007 |
| 7215418 |
Inspection of transparent substrates for defects |
May. 8, 2007 |
| 7193697 |
Apparatus for feature detection |
Mar. 20, 2007 |
| 7142295 |
Inspection of transparent substrates for defects |
Nov. 28, 2006 |
| 7042577 |
Architectures for high-resolution photomask phase metrology |
May. 9, 2006 |
| 6904164 |
Method of inspecting accuracy in stitching pattern elements |
Jun. 7, 2005 |
| 6788403 |
Checking machine for checking tape automated bonding region of display module |
Sep. 7, 2004 |
| 6750465 |
Device for evaluating diffractive authenticity features |
Jun. 15, 2004 |
| 6686602 |
Patterned wafer inspection using spatial filtering |
Feb. 3, 2004 |
| 6674522 |
Efficient phase defect detection system and method |
Jan. 6, 2004 |
| 6636632 |
Image processor and image processing method |
Oct. 21, 2003 |
| 6598663 |
Method for detecting density gradients |
Jul. 29, 2003 |
| 6532300 |
Method of automatically analyzing patterns |
Mar. 11, 2003 |
| 6441911 |
Measuring instrument and method for measuring patterns on substrates of various thicknesses |
Aug. 27, 2002 |
| 6411376 |
Method and apparatus for measuring the direction and position of rotating bodies |
Jun. 25, 2002 |
| 6184976 |
Apparatus and method for measuring an aerial image using transmitted light and reflected light |
Feb. 6, 2001 |
| 6130747 |
Method of measuring aberrations of lens |
Oct. 10, 2000 |
| 5966212 |
High-speed, high-resolution, large area inspection using multiple optical fourier transform cells |
Oct. 12, 1999 |
| 5757480 |
Method for laser alignment in mask repair |
May. 26, 1998 |
| 5751841 |
Method and apparatus for scanning bank notes |
May. 12, 1998 |
| 5602645 |
Pattern evaluation apparatus and a method of pattern evaluation |
Feb. 11, 1997 |
| 5563702 |
Automated photomask inspection apparatus and method |
Oct. 8, 1996 |
| 5555315 |
Pinhole inspection device and method |
Sep. 10, 1996 |
| 5548401 |
Photomask inspecting method and apparatus |
Aug. 20, 1996 |
| 5497234 |
Inspection apparatus |
Mar. 5, 1996 |
| 4465350 |
Method and device for inspecting micromask patterns |
Aug. 14, 1984 |
| 4299443 |
Apparatus for detecting the defects of a pattern with directional characteristics using a filter having arm sections of curved shape |
Nov. 10, 1981 |
| 4218142 |
Mask analysis |
Aug. 19, 1980 |
| 4153336 |
Optimized spatial filter for defect detection |
May. 8, 1979 |
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