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Class Information
Number: 356/237.5
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition > On patterned or topographical surface (e.g., wafer, mask, circuit board)
Description: Inspection of surface condition wherein the inspected article further includes a motif or raised three dimensional configuration.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7417723 |
Method of inspecting a semiconductor device and an apparatus thereof |
Aug. 26, 2008 |
| 7417750 |
Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer |
Aug. 26, 2008 |
| 7410737 |
System and method for process variation monitor |
Aug. 12, 2008 |
| 7411669 |
Substrate defect inspection method, computer readable storage medium, and defect inspection apparatus |
Aug. 12, 2008 |
| 7405817 |
Method and apparatus for classifying defects of an object |
Jul. 29, 2008 |
| 7403278 |
Surface inspection apparatus and surface inspection method |
Jul. 22, 2008 |
| 7400393 |
Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen |
Jul. 15, 2008 |
| 7397557 |
Serrated Fourier filters and inspection systems |
Jul. 8, 2008 |
| 7397554 |
Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage |
Jul. 8, 2008 |
| 7397552 |
Optical inspection with alternating configurations |
Jul. 8, 2008 |
| 7394554 |
Selecting a hypothetical profile to use in optical metrology |
Jul. 1, 2008 |
| 7394534 |
Process excursion detection |
Jul. 1, 2008 |
| 7391510 |
System and method for inspecting patterned devices having microscopic conductors |
Jun. 24, 2008 |
| 7388979 |
Method and apparatus for inspecting pattern defects |
Jun. 17, 2008 |
| 7385686 |
Method and apparatus for inspecting semiconductor device |
Jun. 10, 2008 |
| 7385688 |
Multi-spot illumination and collection optics for highly tilted wafer planes |
Jun. 10, 2008 |
| 7385689 |
Method and apparatus for inspecting substrate pattern |
Jun. 10, 2008 |
| 7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information |
Jun. 3, 2008 |
| 7382450 |
Method of detecting an edge bead removal line on a wafer |
Jun. 3, 2008 |
| 7382451 |
Method of defect inspection |
Jun. 3, 2008 |
| 7379174 |
Wafer detecting device |
May. 27, 2008 |
| 7379176 |
Mask defect inspection apparatus |
May. 27, 2008 |
| 7379175 |
Methods and systems for reticle inspection and defect review using aerial imaging |
May. 27, 2008 |
| 7379173 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques |
May. 27, 2008 |
| 7375362 |
Method and apparatus for reducing or eliminating stray light in an optical test head |
May. 20, 2008 |
| 7375829 |
Method for inspecting an insulator with a library of optic images |
May. 20, 2008 |
| 7372632 |
Apparatus and methods for the inspection of microvias in printed circuit boards |
May. 13, 2008 |
| 7372561 |
Method and apparatus for inspecting defects and a system for inspecting defects |
May. 13, 2008 |
| 7372560 |
Pattern inspection apparatus |
May. 13, 2008 |
| 7372559 |
Systems and methods for inspecting a wafer with increased sensitivity |
May. 13, 2008 |
| 7372556 |
Apparatus and methods for inspecting a composite structure for inconsistencies |
May. 13, 2008 |
| 7372555 |
Method of fabrication of semiconductor integrated circuit device |
May. 13, 2008 |
| 7369224 |
Surface inspection apparatus, surface inspection method and exposure system |
May. 6, 2008 |
| 7369236 |
Defect detection through image comparison using relative measures |
May. 6, 2008 |
| 7365837 |
Vision inspection apparatus using a full reflection mirror |
Apr. 29, 2008 |
| 7365836 |
High speed laser scanning inspection system |
Apr. 29, 2008 |
| 7361909 |
Method and apparatus for correcting drift during automated FIB processing |
Apr. 22, 2008 |
| 7362428 |
Highly sensitive defect detection method |
Apr. 22, 2008 |
| 7359045 |
High speed laser scanning inspection system |
Apr. 15, 2008 |
| 7359044 |
Method and apparatus for inspecting pattern defects |
Apr. 15, 2008 |
| 7355690 |
Double inspection of reticle or wafer |
Apr. 8, 2008 |
| 7355692 |
System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery |
Apr. 8, 2008 |
| 7355693 |
Pattern inspection apparatus |
Apr. 8, 2008 |
| 7352456 |
Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes |
Apr. 1, 2008 |
| 7352457 |
Multiple beam inspection apparatus and method |
Apr. 1, 2008 |
| 7349106 |
Apparatus and method for thin-layer metrology |
Mar. 25, 2008 |
| 7345755 |
Defect inspecting apparatus and defect inspection method |
Mar. 18, 2008 |
| 7345754 |
Fourier filters and wafer inspection systems |
Mar. 18, 2008 |
| 7345753 |
Apparatus and methods for analyzing defects on a sample |
Mar. 18, 2008 |
| 7345752 |
Multi-spot illumination and collection optics for highly tilted wafer planes |
Mar. 18, 2008 |
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