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Class Information
Number: 356/237.5
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition > On patterned or topographical surface (e.g., wafer, mask, circuit board)
Description: Inspection of surface condition wherein the inspected article further includes a motif or raised three dimensional configuration.

Patents under this class:

Patent Number Title Of Patent Date Issued
8711349 High throughput thin film characterization and defect detection Apr. 29, 2014
8711348 Method of inspecting wafer Apr. 29, 2014
8711346 Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks Apr. 29, 2014
8705050 Providing thermal compensation for topographic measurement at an elevated temperature using a non-contact vibration transducer Apr. 22, 2014
8705027 Optical defect amplification for improved sensitivity on patterned layers Apr. 22, 2014
8705026 Inspection apparatus Apr. 22, 2014
8692986 EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Apr. 8, 2014
8687182 Surface inspection apparatus and surface inspection method Apr. 1, 2014
8670118 Diffraction based overlay metrology tool and method of diffraction based overlay metrology Mar. 11, 2014
8670117 Inspection apparatus Mar. 11, 2014
8670116 Method and device for inspecting for defects Mar. 11, 2014
8665430 Exposure condition determining method and surface inspection apparatus Mar. 4, 2014
8654324 Device and method for inspecting semiconductor wafers Feb. 18, 2014
8643836 Inspection method for inspecting defects of wafer surface Feb. 4, 2014
8643835 Active planar autofocus Feb. 4, 2014
8639019 Method and apparatus for inspecting pattern defects Jan. 28, 2014
8638430 Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium Jan. 28, 2014
8634070 Method and apparatus for optically inspecting a magnetic disk Jan. 21, 2014
8629979 Inspection system, inspection method, and program Jan. 14, 2014
8629407 Contamination inspection Jan. 14, 2014
8625090 Method and apparatus for inspecting substrates Jan. 7, 2014
8623576 Time differential reticle inspection Jan. 7, 2014
8610891 Gantry apparatus Dec. 17, 2013
8605278 Method and apparatus for inspecting patterned media disk Dec. 10, 2013
8605277 Method of inspecting semiconductor device Dec. 10, 2013
8599369 Defect inspection device and inspection method Dec. 3, 2013
8593625 Examining apparatus and examining method Nov. 26, 2013
8576393 Method and apparatus for optical inspection, detection and analysis of double sided wafer macro defects Nov. 5, 2013
8570516 Infrared direct illumination machine vision technique for semiconductor processing equipment Oct. 29, 2013
8564767 Defect inspecting apparatus and defect inspecting method Oct. 22, 2013
8559001 Inspection guided overlay metrology Oct. 15, 2013
8559000 Method of inspecting a semiconductor device and an apparatus thereof Oct. 15, 2013
8553218 Calibration method and apparatus Oct. 8, 2013
8553217 EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Oct. 8, 2013
8553216 Defect inspection device using catadioptric objective lens Oct. 8, 2013
8553215 Back quartersphere scattered light analysis Oct. 8, 2013
8553214 Method and equipment for detecting pattern defect Oct. 8, 2013
8551791 Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis Oct. 8, 2013
8547548 Final defect inspection system Oct. 1, 2013
8547547 Optical surface defect inspection apparatus and optical surface defect inspection method Oct. 1, 2013
8547545 Method and apparatus for inspecting a surface of a substrate Oct. 1, 2013
8525984 Inspection apparatus and inspection method Sep. 3, 2013
8520220 Apparatus for measuring the dimensions of an object Aug. 27, 2013
8520208 Segmented polarizer for optimizing performance of a surface inspection system Aug. 27, 2013
8520200 Advanced inspection method utilizing short pulses LED illumination Aug. 27, 2013
8520051 Videoconferencing terminal with a persistence of vision display and a method of operation thereof to maintain eye contact Aug. 27, 2013
8514390 Optical equipment and registration method Aug. 20, 2013
8514388 Flaw inspecting method and device therefor Aug. 20, 2013
8514386 Technique for verifying the microstructure of lead-free interconnects in semiconductor assemblies Aug. 20, 2013
8497991 Thin-film inspection apparatus and inspection method Jul. 30, 2013

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