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Class Information
Number: 356/237.4
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition > Detection of object or particle on surface > On patterned or topographical surface (e.g., wafer, mask, circuit board)
Description: Detection of an object or particle wherein the inspected article further includes a motif or raised three dimensional configuration.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7623229 |
Systems and methods for inspecting wafers |
Nov. 24, 2009 |
| 7619729 |
Method for detecting particles and defects and inspection equipment thereof |
Nov. 17, 2009 |
| 7619730 |
Mask inspection DNIR replacement based on location of tri-tone level database images--2P shapes |
Nov. 17, 2009 |
| 7601954 |
Method and apparatus for reviewing defects |
Oct. 13, 2009 |
| 7602483 |
Device for dark field illumination and method for optically scanning of object |
Oct. 13, 2009 |
| 7599051 |
Calibration of a substrate inspection tool |
Oct. 6, 2009 |
| 7599053 |
Pattern defect inspection method, photomask manufacturing method, and display device substrate manufacturing method |
Oct. 6, 2009 |
| 7595869 |
Optical metrology system optimized with a plurality of design goals |
Sep. 29, 2009 |
| 7592616 |
Detecting micropipes |
Sep. 22, 2009 |
| 7586595 |
Method of scanning and scanning apparatus |
Sep. 8, 2009 |
| 7586599 |
Method and system for detecting defects |
Sep. 8, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7583833 |
Method and apparatus for manufacturing data indexing |
Sep. 1, 2009 |
| 7580124 |
Dual stage defect region identification and defect detection method and apparatus |
Aug. 25, 2009 |
| 7570354 |
Image intensification for low light inspection |
Aug. 4, 2009 |
| 7570797 |
Methods and systems for generating an inspection process for an inspection system |
Aug. 4, 2009 |
| 7561263 |
Apparatus for illuminating and inspecting a surface |
Jul. 14, 2009 |
| 7554654 |
Surface characteristic analysis |
Jun. 30, 2009 |
| 7554655 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques |
Jun. 30, 2009 |
| 7551273 |
Mask defect inspection apparatus |
Jun. 23, 2009 |
| 7542134 |
System, method and apparatus for in-situ substrate inspection |
Jun. 2, 2009 |
| 7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput |
Jun. 2, 2009 |
| 7535561 |
Defect inspecting apparatus |
May. 19, 2009 |
| 7528942 |
Method and apparatus for detecting defects |
May. 5, 2009 |
| 7528943 |
Method and apparatus for simultaneous high-speed acquisition of multiple images |
May. 5, 2009 |
| 7525634 |
Monitoring apparatus and method particularly useful in photolithographically |
Apr. 28, 2009 |
| 7515258 |
Semiconductor device, and method and apparatus for inspecting appearance thereof |
Apr. 7, 2009 |
| 7511806 |
Apparatus and method for inspecting defects |
Mar. 31, 2009 |
| 7508504 |
Automatic wafer edge inspection and review system |
Mar. 24, 2009 |
| 7499156 |
Closed region defect detection system |
Mar. 3, 2009 |
| 7499157 |
System for monitoring foreign particles, process processing apparatus and method of electronic commerce |
Mar. 3, 2009 |
| 7492451 |
Simultaneous multi-spot inspection and imaging |
Feb. 17, 2009 |
| 7489393 |
Enhanced simultaneous multi-spot inspection and imaging |
Feb. 10, 2009 |
| 7486391 |
System and method for haze control in semiconductor processes |
Feb. 3, 2009 |
| 7486392 |
Method of inspecting for defects and apparatus for performing the method |
Feb. 3, 2009 |
| 7483804 |
Method of real time dynamic CD control |
Jan. 27, 2009 |
| 7483128 |
Foreign matter inspection apparatus and method |
Jan. 27, 2009 |
| 7483127 |
Method and apparatus for generating an image of biomolecular sensor target area |
Jan. 27, 2009 |
| 7474394 |
Apparatus of inspecting defect in semiconductor and method of the same |
Jan. 6, 2009 |
| 7471382 |
Surface inspection system with improved capabilities |
Dec. 30, 2008 |
| 7466405 |
Pattern inspection method, pattern inspection system and pattern inspection program of photomask |
Dec. 16, 2008 |
| 7463350 |
Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal |
Dec. 9, 2008 |
| 7463351 |
Process and assembly for non-destructive surface inspection |
Dec. 9, 2008 |
| 7463352 |
Method and apparatus for article inspection including speckle reduction |
Dec. 9, 2008 |
| 7460221 |
Method and system for detecting defects |
Dec. 2, 2008 |
| 7460218 |
Device and method for determining the properties of surfaces |
Dec. 2, 2008 |
| 7453561 |
Method and apparatus for inspecting foreign particle defects |
Nov. 18, 2008 |
| 7443497 |
Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes) |
Oct. 28, 2008 |
| 7440092 |
Method and apparatus for detecting defects |
Oct. 21, 2008 |
| 7440093 |
Apparatus and methods for providing selective defect sensitivity |
Oct. 21, 2008 |
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