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Class Information
Number: 356/237.3
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition > Detection of object or particle on surface
Description: Inspection of surface condition wherein an article is examined for the existence of a contaminant residing on the veneer of the article.










Sub-classes under this class:

Class Number Class Name Patents
356/237.4 On patterned or topographical surface (e.g., wafer, mask, circuit board) 706


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8670116 Method and device for inspecting for defects Mar. 11, 2014
8643835 Active planar autofocus Feb. 4, 2014
8643845 Interferometric surface inspection using a slit-shaped reference beam from inspection surface Feb. 4, 2014
8638430 Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium Jan. 28, 2014
8634054 Particle detection on an object surface Jan. 21, 2014
8634069 Defect inspection device and defect inspection method Jan. 21, 2014
8629407 Contamination inspection Jan. 14, 2014
8623576 Time differential reticle inspection Jan. 7, 2014
8619528 Method and system for optical calibration Dec. 31, 2013
8605146 Apparatus for optically inspecting an at least partially reflecting surface of an object Dec. 10, 2013
8605275 Detecting defects on a wafer Dec. 10, 2013
8605276 Enhanced defect scanning Dec. 10, 2013
8570614 Determining maintenance conditions in a document scanner Oct. 29, 2013
8564767 Defect inspecting apparatus and defect inspecting method Oct. 22, 2013
8564766 Sensor element for a sorting device and method for sorting products Oct. 22, 2013
8563958 Inspection apparatus and inspection method Oct. 22, 2013
8547130 Method and device for detecting foreign particle in liquid crystal display panel Oct. 1, 2013
8547545 Method and apparatus for inspecting a surface of a substrate Oct. 1, 2013
8538168 Image pattern matching systems and methods for wafer alignment Sep. 17, 2013
8524021 In-process vision detection of flaw and FOD characteristics Sep. 3, 2013
8526705 Driven scanning alignment for complex shapes Sep. 3, 2013
8514390 Optical equipment and registration method Aug. 20, 2013
8508727 Defects inspecting apparatus and defects inspecting method Aug. 13, 2013
8493558 Surface inspection apparatus Jul. 23, 2013
8489225 Wafer alignment system with optical coherence tomography Jul. 16, 2013
8477301 Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus Jul. 2, 2013
8467047 Systems and methods for detecting defects on a wafer Jun. 18, 2013
8462330 Method and apparatus for detecting defects Jun. 11, 2013
8462328 Efficient telecentric optical system (ETOS) Jun. 11, 2013
8441627 Surface inspection apparatus and surface inspection method May. 14, 2013
8431917 System and method for rotary machine online monitoring Apr. 30, 2013
8427634 Defect inspection method and apparatus Apr. 23, 2013
8416402 Method and apparatus for inspecting defects Apr. 9, 2013
8411928 Scatterometry method and device for inspecting patterned medium Apr. 2, 2013
8405825 Method of detecting a particle and a lithographic apparatus Mar. 26, 2013
8400628 Enclosure for an optical inspection apparatus Mar. 19, 2013
8395766 Foreign matter inspection apparatus Mar. 12, 2013
8395779 Laser surveillance system Mar. 12, 2013
8363213 Method for detecting impurities on a surface Jan. 29, 2013
8363912 Method and device for evaluating fluorescence image records Jan. 29, 2013
8345233 Inspection apparatus and inspection method Jan. 1, 2013
8334972 Method and device for detecting soiling Dec. 18, 2012
8330949 Foreign substance inspection apparatus, exposure apparatus, and method of manufacturing device Dec. 11, 2012
8310668 Producing method of wired circuit board Nov. 13, 2012
8305568 Surface inspection method and surface inspection apparatus Nov. 6, 2012
8279432 Particle inspection and removal apparatus and particle inspection and removal program Oct. 2, 2012
8274656 Apparatus, system, and method for increasing measurement accuracy in a particle imaging device Sep. 25, 2012
8270699 Method for measuring coating appearance and the use thereof Sep. 18, 2012
8248594 Surface inspection method and surface inspection apparatus Aug. 21, 2012
8228494 Apparatus for inspecting defects Jul. 24, 2012

1 2 3 4 5 6 7 8










 
 
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