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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
7673502 Inspection of a continuously variable transmission belt member Mar. 9, 2010
7672799 Defect inspection apparatus and defect inspection method Mar. 2, 2010
7672485 Method and device for measuring at least a geometric quantity of an optically reflecting surface Mar. 2, 2010
7671981 System for spectroscopic carpet identification Mar. 2, 2010
7671980 Surface inspection method and surface inspection apparatus Mar. 2, 2010
7667834 Method and configuration for detecting material defects in workpieces Feb. 23, 2010
7664614 Method of inspecting photomask defect Feb. 16, 2010
7664608 Defect inspection method and apparatus Feb. 16, 2010
7663766 Incorporating film optical property measurements into scatterometry metrology Feb. 16, 2010
7663746 Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool Feb. 16, 2010
7663745 Plural light source and camera to detect surface flaws Feb. 16, 2010
7659979 Optical inspection apparatus and method Feb. 9, 2010
7659974 System and method for controlling light scattered from a workpiece surface in a surface inspection system Feb. 9, 2010
7659973 Wafer inspection using short-pulsed continuous broadband illumination Feb. 9, 2010
7656520 Illumination device for product examination via pulsed illumination Feb. 2, 2010
7656519 Wafer edge inspection Feb. 2, 2010
7656518 Method of measuring asymmetry in a scatterometer, a method of measuring an overlay error in a substrate and a metrology apparatus Feb. 2, 2010
7656516 Pattern inspection apparatus Feb. 2, 2010
7656515 Apparatus and method for analysis of optical storage media Feb. 2, 2010
7649624 Systems and methods for detecting scratches on non-semiconductor wafer surfaces Jan. 19, 2010
7643140 Method and apparatus for inspecting a semiconductor device Jan. 5, 2010
7643138 Method of inspecting a semiconductor device and an apparatus thereof Jan. 5, 2010
7643137 Defect inspection apparatus, defect inspection method and method of inspecting hole pattern Jan. 5, 2010
7639351 Automated process control using optical metrology with a photonic nanojet Dec. 29, 2009
7639350 Apparatus and method for testing defects Dec. 29, 2009
7639349 Method and system for inspecting surfaces Dec. 29, 2009
7636649 Automated process control of a fabrication tool using a dispersion function relating process parameter to dispersion Dec. 22, 2009
7636164 Device having a field mirror for optically testing a surface Dec. 22, 2009
7634372 Method and apparatus for monitoring cable stranding Dec. 15, 2009
7633612 Apparatus and method for determining surface properties Dec. 15, 2009
7633611 Method and apparatus for testing imager devices using a center turning optic Dec. 15, 2009
7631999 Line light irradiation device Dec. 15, 2009
7630086 Surface finish roughness measurement Dec. 8, 2009
7630071 Inspecting apparatus for glass substrate Dec. 8, 2009
7630070 Scatterometer, a lithographic apparatus and a focus analysis method Dec. 8, 2009
7630069 Illumination system for optical inspection Dec. 8, 2009
7626692 Automated imaging of part inconsistencies Dec. 1, 2009
7623427 Surface inspection by amplitude modulated specular light detection Nov. 24, 2009
7623228 Front face and edge inspection Nov. 24, 2009
7623227 System and method for inspecting a workpiece surface using polarization of scattered light Nov. 24, 2009
7623226 Optical method and device for detecting surface and structural defects of a travelling hot product Nov. 24, 2009
7619728 Methods and systems for in-situ machinery inspection Nov. 17, 2009
7616300 Edge flaw detection device Nov. 10, 2009
7616299 Surface inspection method and surface inspection apparatus Nov. 10, 2009
7609373 Reducing variations in energy reflected from a sample due to thin film interference Oct. 27, 2009
7605915 System and method to create haze standard Oct. 20, 2009
7605913 System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece Oct. 20, 2009
7602481 Method and apparatus for inspecting a surface Oct. 13, 2009
7599075 Automatic optical inspection using multiple objectives Oct. 6, 2009
7599054 Pattern inspection apparatus Oct. 6, 2009

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