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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
7755776 Inspection system and inspection method Jul. 13, 2010
7755752 Combined modulated optical reflectance and photoreflectance system Jul. 13, 2010
7755751 Optical inspection method and optical inspection apparatus Jul. 13, 2010
7751037 Method and apparatus for detecting defects Jul. 6, 2010
7751036 Apparatus of inspecting defect in semiconductor and method of the same Jul. 6, 2010
7746461 Optical defect inspection apparatus Jun. 29, 2010
7746460 Device and method for scanning pieces of solid wood Jun. 29, 2010
7746459 Systems configured to inspect a wafer Jun. 29, 2010
7742168 Measuring a surface characteristic Jun. 22, 2010
7742162 Mask defect inspection data generating method, mask defect inspection method and mask production method Jun. 22, 2010
7741629 Apparatus for analysing surface properties with indirect illumination Jun. 22, 2010
7738092 System and method for reducing speckle noise in die-to-die inspection systems Jun. 15, 2010
7738090 Fourier filters, systems for fabricating fourier filters, and systems and methods for inspecting a specimen using fourier filters Jun. 15, 2010
7733506 Optical tilt monitoring apparatus Jun. 8, 2010
7733475 Defect inspecting apparatus Jun. 8, 2010
7733474 Defect inspection system Jun. 8, 2010
7733473 Inspection apparatus and inspection method Jun. 8, 2010
7733472 Method and system for determining condition of process performed for coating film before immersion light exposure Jun. 8, 2010
7732332 Chemical mechanical polishing method with inspection pre and post processing Jun. 8, 2010
7728968 Excimer laser inspection system Jun. 1, 2010
7728967 Laser-based maintenance apparatus Jun. 1, 2010
7728966 Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same Jun. 1, 2010
7724360 Method and apparatus for inspecting foreign particle defects May. 25, 2010
7724358 Illuminator for darkfield inspection May. 25, 2010
7724357 Backside contamination inspection device May. 25, 2010
7719672 Macro inspection apparatus and microscopic inspection method May. 18, 2010
7719671 Foreign matter inspection method and foreign matter inspection apparatus May. 18, 2010
7715022 Apparatus and method for measuring shape May. 11, 2010
7714999 High resolution wafer inspection system May. 11, 2010
7714998 Image splitting in optical inspection systems May. 11, 2010
7714997 Apparatus for inspecting defects May. 11, 2010
7710556 Inspection system May. 4, 2010
7705979 Method and system for immersion based inspection Apr. 27, 2010
7705978 Method and apparatus for inspection of multi-junction solar cells Apr. 27, 2010
7705977 Methods for depth profiling in semiconductors using modulated optical reflectance technology Apr. 27, 2010
7701569 Dark field lighting testing device Apr. 20, 2010
7700916 Logical CAD navigation for device characteristics evaluation system Apr. 20, 2010
7700381 Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Apr. 20, 2010
7697131 Automated display quality measurement device Apr. 13, 2010
7697128 Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object Apr. 13, 2010
7692778 Transfer/inspection apparatus and transfer apparatus Apr. 6, 2010
7688435 Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect Mar. 30, 2010
7688434 In-process vision detection of flaw and FOD characteristics Mar. 30, 2010
7684032 Multi-wavelength system and method for detecting epitaxial layer defects Mar. 23, 2010
7684031 Visual inspection apparatus, visual inspection method, and peripheral edge inspection unit that can be mounted on visual inspection apparatus Mar. 23, 2010
7679736 System and method for optical photomask inspection through pellicle Mar. 16, 2010
7679735 Optical system for detecting anomalies and/or features of surfaces Mar. 16, 2010
7679734 Curved surface shape inspection method, fiber optical block, and curved surface shape inspection device Mar. 16, 2010
7675613 Defect inspection method Mar. 9, 2010
7674309 Honeycomb filter defect detecting method and apparatus Mar. 9, 2010

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