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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
7869022 Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system Jan. 11, 2011
7860686 Process of geometrical characterisation of structures and device for implementing said process Dec. 28, 2010
7860297 Method and apparatus for detecting the deformation of objects Dec. 28, 2010
7859656 Defect inspection method and system Dec. 28, 2010
7852459 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Dec. 14, 2010
7851753 Method and apparatus for reviewing defects Dec. 14, 2010
7847929 Methods and apparatus for inspecting a plurality of dies Dec. 7, 2010
7843558 Optical inspection tools featuring light shaping diffusers Nov. 30, 2010
7839495 System and method for controlling a beam source in a workpiece surface inspection system Nov. 23, 2010
7838816 Speckle reduction method and apparatus Nov. 23, 2010
7835564 Non-destructive, below-surface defect rendering using image intensity analysis Nov. 16, 2010
7834994 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate Nov. 16, 2010
7834993 Surface inspection apparatus and surface inspection method Nov. 16, 2010
7834992 Method and its apparatus for detecting defects Nov. 16, 2010
7834991 Determining surface properties with angle offset correction Nov. 16, 2010
7826068 Method for correcting measured values resulting from the bending of a substrate Nov. 2, 2010
7826048 Apparatus for measuring doctor blade geometric deviations Nov. 2, 2010
7826047 Apparatus and method for optical inspection Nov. 2, 2010
7821644 Apparatus for visual inspection Oct. 26, 2010
7821627 Fabrication and test methods and systems Oct. 26, 2010
7817263 Mounting apparatus, inspecting apparatus, inspecting method, and mounting method Oct. 19, 2010
7817262 Device for measuring positions of structures on a substrate Oct. 19, 2010
7817261 Method of apparatus for detecting particles on a specimen Oct. 19, 2010
7817260 Beam delivery system for laser dark-field illumination in a catadioptric optical system Oct. 19, 2010
7812942 Method for detecting surface defects on a substrate and device using said method Oct. 12, 2010
7808629 Methods, assemblies and systems for inspecting a photomask Oct. 5, 2010
7805258 System and method for film stress and curvature gradient mapping for screening problematic wafers Sep. 28, 2010
7804590 Multi mode inspection method and apparatus Sep. 28, 2010
7800748 Edge inspection apparatus Sep. 21, 2010
7796805 Defect detection Sep. 14, 2010
7796249 Mask haze early detection Sep. 14, 2010
7796248 Defect inspection method and apparatus for transparent plate-like members Sep. 14, 2010
7791721 Surface inspection with variable digital filtering Sep. 7, 2010
7787114 Systems and methods for inspecting a specimen with light at varying power levels Aug. 31, 2010
7782513 Fast variable angle of incidence illumination for a machine vision inspection system Aug. 24, 2010
7782452 Systems and method for simultaneously inspecting a specimen with two distinct channels Aug. 24, 2010
7782451 Device for and method of inspecting surface condition having different curvatures Aug. 24, 2010
7778786 Method for estimating surface moisture content of wood chips Aug. 17, 2010
7777897 Veneer roughness detection Aug. 17, 2010
7777875 Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation Aug. 17, 2010
7777874 Noncontact surface form measuring apparatus Aug. 17, 2010
7773210 Appearance inspection apparatus Aug. 10, 2010
7768635 Apparatus and method for inspecting defects Aug. 3, 2010
7768634 Defects inspecting apparatus and defects inspecting method Aug. 3, 2010
7767956 Methods and systems for lithography process control Aug. 3, 2010
7764823 Stamping in-line crack detection system and method Jul. 27, 2010
7764367 Surface inspection method and surface inspection apparatus Jul. 27, 2010
7764366 Robotic die sorter with optical inspection system Jul. 27, 2010
7761246 Surface inspection method and surface inspection apparatus Jul. 20, 2010
7760350 Glazing inspection Jul. 20, 2010

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