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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
7969565 Device for inspecting a surface Jun. 28, 2011
7969564 System and method for defect localization on electrical test structures Jun. 28, 2011
7968354 Methods for correlating backside and frontside defects detected on a specimen and classification of backside defects Jun. 28, 2011
7965917 Illuminating apparatus and surface inspection system using illuminating apparatus Jun. 21, 2011
7965386 Method and its apparatus for inspecting defects Jun. 21, 2011
7961309 Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Jun. 14, 2011
7960701 EUV light source components and methods for producing, using and refurbishing same Jun. 14, 2011
7957066 Split field inspection system using small catadioptric objectives Jun. 7, 2011
7953567 Defect inspection apparatus and defect inspection method May. 31, 2011
7953269 Method for inspecting pattern defect occured on patterns formed on a substrate May. 31, 2011
7952700 Method of apparatus for detecting particles on a specimen May. 31, 2011
7952699 Apparatus of inspecting defect in semiconductor and method of the same May. 31, 2011
7952085 Surface inspection apparatus and method thereof May. 31, 2011
7948618 Defect inspection method and apparatus with a threshold value determination May. 24, 2011
7944562 Device and method for the topographical determination of surface properties May. 17, 2011
7944554 Inspection head supporting structure in surface inspecting apparatus and surface inspecting apparatus May. 17, 2011
7940391 Pre-aligned metrology system and modules May. 10, 2011
7940383 Method of detecting defects on an object May. 10, 2011
7933026 High resolution monitoring of CD variations Apr. 26, 2011
7929129 Inspection systems for glass sheets Apr. 19, 2011
7929128 Apparatus for the optical inspection of the thermal protection tiles of a space shuttle Apr. 19, 2011
7924419 Illumination system for optical inspection Apr. 12, 2011
7924418 Inspection apparatus and method Apr. 12, 2011
7919760 Operation stage for wafer edge inspection and review Apr. 5, 2011
7916288 Defect inspection method Mar. 29, 2011
7912679 Determining profile parameters of a structure formed on a semiconductor wafer using a dispersion function relating process parameter to dispersion Mar. 22, 2011
7911601 Apparatus and method for inspecting pattern Mar. 22, 2011
7911600 Apparatus and a method for inspection of a mask blank, a method for manufacturing a reflective exposure mask, a method for reflective exposure, and a method for manufacturing semiconductor int Mar. 22, 2011
7907289 Substrate measuring stage Mar. 15, 2011
7903244 Method for inspecting defect and apparatus for inspecting defect Mar. 8, 2011
7901096 Illumination for projecting an image Mar. 8, 2011
7898653 Foreign matter inspection apparatus Mar. 1, 2011
7898652 Method and apparatus for detecting defects on a disk surface Mar. 1, 2011
7898651 Methods and apparatus for inspecting an object Mar. 1, 2011
7898650 Inspection method for transparent article Mar. 1, 2011
7894052 Optical defect inspection apparatus Feb. 22, 2011
7894051 Reticle defect inspection apparatus and reticle defect inspection method Feb. 22, 2011
7889907 Apparatus and methods for inspecting tape lamination Feb. 15, 2011
7889347 Surface plasmon resonance spectrometer with an actuator driven angle scanning mechanism Feb. 15, 2011
7889333 Visual inspection system for ceramic balls Feb. 15, 2011
7884948 Surface inspection tool and surface inspection method Feb. 8, 2011
7881520 Defect inspection system Feb. 1, 2011
7880889 Angularly resolved scatterometer and inspection method Feb. 1, 2011
7880875 Apparatus and method for inspecting circuit structures Feb. 1, 2011
7880874 Surface particle counter Feb. 1, 2011
7876431 Foreign matter inspection apparatus and foreign matter inspection method Jan. 25, 2011
7873432 Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection an Jan. 18, 2011
7872741 Method and apparatus for scatterfield microscopical measurement Jan. 18, 2011
7869024 Method and its apparatus for inspecting defects Jan. 11, 2011
7869023 System for detecting anomalies and/or features of a surface Jan. 11, 2011

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