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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
8102521 Optical inspection system and method Jan. 24, 2012
8102520 Methods and systems for inspection and/or identification of pellet-shaped articles Jan. 24, 2012
8098372 Optical inspection tool featuring multiple speed modes Jan. 17, 2012
8094298 Method for detecting particles and defects and inspection equipment thereof Jan. 10, 2012
8094297 Laser-based maintenance apparatus for inspecting flaws Jan. 10, 2012
8094296 Optical inspection of surfaces open to different directions in a piece of material Jan. 10, 2012
8087799 Illumination means and inspection means having an illumination means Jan. 3, 2012
8081840 Appliance for controlling transparent or reflective elements Dec. 20, 2011
8077327 Method for controlling a machine tool and apparatus therefor Dec. 13, 2011
8072591 Optical inspection system and method Dec. 6, 2011
8059268 Inspecting a workpiece using polarization of scattered light Nov. 15, 2011
8059257 Exposure apparatus and device manufacturing method Nov. 15, 2011
8055057 Method for detecting defects in a substrate having a semiconductor device thereon Nov. 8, 2011
8049903 High resolution monitoring of CD variations Nov. 1, 2011
8049877 Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system Nov. 1, 2011
8045150 Semiconductor wafer inspection method Oct. 25, 2011
8045149 Apparatus for detecting defects using multiple coordinate systems Oct. 25, 2011
8045148 System for monitoring foreign particles, process processing apparatus and method of electronic commerce Oct. 25, 2011
8045147 Method for determining the surface quality of a substrate and associated machine for converting the substrate Oct. 25, 2011
8045146 Method and apparatus for reviewing defect Oct. 25, 2011
8045145 Systems and methods for acquiring information about a defect on a specimen Oct. 25, 2011
8045144 Apparatus and method for the inspection of the surface of a component Oct. 25, 2011
8041106 Methods and systems for detecting defects on a reticle Oct. 18, 2011
8040503 Method of inspecting a semiconductor device and an apparatus thereof Oct. 18, 2011
8040502 Optical inspection of flat media using direct image technology Oct. 18, 2011
8031931 Printed fourier filtering in optical inspection tools Oct. 4, 2011
8023110 Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers Sep. 20, 2011
8018586 Metrology of thin film devices using an addressable micromirror array Sep. 13, 2011
8018585 Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing Sep. 13, 2011
8013989 Defects inspecting apparatus and defects inspecting method Sep. 6, 2011
8010315 Multi-modality inspection method with data validation and data fusion Aug. 30, 2011
8008641 Method and apparatus for inspecting objects using multiple images having varying optical properties Aug. 30, 2011
8004667 Inspection apparatus for containers Aug. 23, 2011
8004666 Apparatus for inspecting defects Aug. 23, 2011
8004270 Inspecting apparatus for photovoltaic devices Aug. 23, 2011
7999932 Inspection apparatus and inspection method Aug. 16, 2011
7997847 Automated robotic system for handling surgical instruments Aug. 16, 2011
7995199 Method for detection of oversized sub-resolution assist features Aug. 9, 2011
7990530 Optical inspection method and optical inspection apparatus Aug. 2, 2011
7986405 Foreign matter inspection method and foreign matter inspection apparatus Jul. 26, 2011
7986404 Inspection system employing illumination that is selectable over a continuous range angles Jul. 26, 2011
7986402 Three dimensional profile inspecting apparatus Jul. 26, 2011
7983788 Method for analyzing reflection properties Jul. 19, 2011
7982867 Methods for depth profiling in semiconductors using modulated optical reflectance technology Jul. 19, 2011
7978328 Vision inspection system device and method Jul. 12, 2011
7973932 Apparatus for determining optical surface properties of workpieces Jul. 5, 2011
7973920 Apparatus and method for inspecting defects Jul. 5, 2011
7973919 High resolution wafer inspection system Jul. 5, 2011
7969567 Method and device for detecting shape of surface of medium Jun. 28, 2011
7969566 Apparatus and method for detection of a film on a surface Jun. 28, 2011

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