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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
8248595 Laser-based maintenance apparatus for inspecting flaws based on a generated surface wave Aug. 21, 2012
8248594 Surface inspection method and surface inspection apparatus Aug. 21, 2012
8248593 Interference measuring device Aug. 21, 2012
8243263 Optical inspection method and optical inspection apparatus Aug. 14, 2012
8233145 Pattern defect inspection apparatus and method Jul. 31, 2012
8228495 Defects inspecting apparatus and defects inspecting method Jul. 24, 2012
8228494 Apparatus for inspecting defects Jul. 24, 2012
8228493 Carrying device and appearance inspection device for test objects Jul. 24, 2012
8224060 Image processing method, paint inspection method and paint inspection system Jul. 17, 2012
8223328 Surface inspecting apparatus and surface inspecting method Jul. 17, 2012
8223327 Systems and methods for detecting defects on a wafer Jul. 17, 2012
8218138 Apparatus and method for inspecting defects Jul. 10, 2012
8208356 Optical checking method and apparatus for defects in magnetic disks Jun. 26, 2012
8208135 Method and device for the optical assessment of welding quality during welding Jun. 26, 2012
8203706 Method and apparatus for inspecting defects Jun. 19, 2012
8203705 Inspection apparatus and inspection method Jun. 19, 2012
8194241 Apparatus and method for inspecting edge of semiconductor wafer Jun. 5, 2012
8189194 Direct illumination machine vision technique for processing semiconductor wafers May. 29, 2012
8186359 System for analyzing a filter element associated with a smoking article, and associated method May. 29, 2012
8184283 Optical defect inspection apparatus May. 22, 2012
8184282 Method and system for defect detection using transmissive bright field illumination and transmissive dark field illumination May. 22, 2012
8179524 Hard disk inspection apparatus May. 15, 2012
8178837 Logical CAD navigation for device characteristics evaluation system May. 15, 2012
8174690 Apparatus for characterizing a surface structure May. 8, 2012
8169613 Segmented polarizer for optimizing performance of a surface inspection system May. 1, 2012
8169606 Appearance inspection apparatus May. 1, 2012
8169605 Apparatus and method for inspecting liquid crystal display May. 1, 2012
8164758 Internal inspection system and method Apr. 24, 2012
8158428 Methods, systems and apparatus for detecting material defects in combustors of combustion turbine engines Apr. 17, 2012
8149395 Apparatus and method for inspecting pattern Apr. 3, 2012
8148705 Method and apparatus for inspecting defects of patterns formed on a hard disk medium Apr. 3, 2012
8139842 Device and method for inspecting rechargeable battery connection structure Mar. 20, 2012
8135207 Optical inspection tools featuring parallel post-inspection analysis Mar. 13, 2012
8135204 Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe Mar. 13, 2012
8134701 Defect inspecting method and apparatus Mar. 13, 2012
8134699 Illumination system for optical inspection Mar. 13, 2012
8134698 Dynamic range extension in surface inspection systems Mar. 13, 2012
8131057 Defect distribution pattern comparison method and system Mar. 6, 2012
8130373 Metrology of thin film devices using an addressable micromirror array Mar. 6, 2012
8130372 Wafer holding mechanism Mar. 6, 2012
8125632 Fabrication method of semiconductor integrated circuit device Feb. 28, 2012
8120766 Inspection apparatus Feb. 21, 2012
8115936 Laser ultrasonic detection device including a laser oscillating device which includes a seed laser oscillating element Feb. 14, 2012
8115915 Defect inspection method and apparatus Feb. 14, 2012
8111899 Substrate-check equipment Feb. 7, 2012
8111390 Method and apparatus for residue detection in the edge deleted area of a substrate Feb. 7, 2012
8107065 Method and apparatus for detecting defects Jan. 31, 2012
8107064 Disc wafer inspecting device and inspecting method Jan. 31, 2012
8107063 Transparent article Jan. 31, 2012
8102522 Inspection apparatus and inspection method Jan. 24, 2012

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