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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
8379196 Method for judging whether semiconductor wafer is non-defective wafer by using laser scattering method Feb. 19, 2013
8368881 Optical inspection system and method Feb. 5, 2013
8363214 Surface inspection apparatus Jan. 29, 2013
8358406 Defect inspection method and defect inspection system Jan. 22, 2013
RE43925 Three dimensional profile inspecting apparatus Jan. 15, 2013
8351051 System and method of measuring irregularity of a glass substrate Jan. 8, 2013
8345264 Laser reflection optical fiber sensor Jan. 1, 2013
8345233 Inspection apparatus and inspection method Jan. 1, 2013
8345232 Optical inspection system and method Jan. 1, 2013
8345231 Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process Jan. 1, 2013
8339594 Method for measuring semiconductor wafer profile and device for measuring the same used therefor Dec. 25, 2012
8339593 System and method of two-stepped laser scattering defect inspection Dec. 25, 2012
8339577 Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Dec. 25, 2012
8334971 Apparatus for imaging the inner surface of a cavity within a workpiece Dec. 18, 2012
8330948 Semiconductor test instrument and the method to test semiconductor Dec. 11, 2012
8330947 Back quartersphere scattered light analysis Dec. 11, 2012
8325334 Substrate edge inspection Dec. 4, 2012
8325331 Method for obtaining incident angle Dec. 4, 2012
8319960 Defect inspection system Nov. 27, 2012
8319959 System and method for quality assurance for reticles used in manufacturing of integrated circuits Nov. 27, 2012
8315464 Method of pore detection Nov. 20, 2012
8314929 Method and its apparatus for inspecting defects Nov. 20, 2012
8314628 Method and device for the independent extraction of carrier concentration level and electrical junction depth in a semiconductor substrate Nov. 20, 2012
8314398 EUV light source components and methods for producing, using and refurbishing same Nov. 20, 2012
8311777 Coke oven wall surface evaluation apparatus, coke oven wall surface repair supporting apparatus, coke oven wall surface evaluation method, coke oven wall surface repair supporting method and c Nov. 13, 2012
8310668 Producing method of wired circuit board Nov. 13, 2012
8310666 Apparatus of inspecting defect in semiconductor and method of the same Nov. 13, 2012
8305569 Apparatus for optical inspection Nov. 6, 2012
8300919 Apparatus for data analysis Oct. 30, 2012
8294890 Method and device for inspecting defects on both surfaces of magnetic disk Oct. 23, 2012
8294889 Method for inspecting nano-imprint template Oct. 23, 2012
8294888 Surface defect inspection method and apparatus Oct. 23, 2012
8294887 Fast laser power control with improved reliability for surface inspection Oct. 23, 2012
8289508 Defect detection recipe definition Oct. 16, 2012
8289507 Method of apparatus for detecting particles on a specimen Oct. 16, 2012
8285418 Dual scanning stage Oct. 9, 2012
8285025 Method and apparatus for detecting defects using structured light Oct. 9, 2012
8284394 Methods and systems for determining a characteristic of a wafer Oct. 9, 2012
8284392 Method and apparatus for the three-dimensional measurement of the shape and the local surface normal of preferably specular objects Oct. 9, 2012
8279431 Spectral detection method and device, and defect inspection method and apparatus using the same Oct. 2, 2012
8274652 Defect inspection system and method of the same Sep. 25, 2012
8274651 Method of inspecting a semiconductor device and an apparatus thereof Sep. 25, 2012
8270703 Defect inspection apparatus, defect inspection method, and manufacture method for semiconductor device Sep. 18, 2012
8264691 Surface plasmon resonance spectrometer with an actuator driven angle scanning mechanism Sep. 11, 2012
8264679 Inspection apparatus Sep. 11, 2012
8260004 Method and apparatus for the quantitative determination of surface properties Sep. 4, 2012
8259295 Fabrication method of semiconductor integrated circuit device Sep. 4, 2012
8254662 System for monitoring foreign particles, process processing apparatus and method of electronic commerce Aug. 28, 2012
8253935 Disk surface inspection apparatus, inspection system thereof, and inspection method thereof Aug. 28, 2012
8253934 Method and apparatus for inspecting a pattern formed on a substrate Aug. 28, 2012

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