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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
6559937 Inspection apparatus and method May. 6, 2003
6560547 Real time sampling system and method for measuring an interrupted surface May. 6, 2003
6556290 Defect inspection method and apparatus therefor Apr. 29, 2003
6556291 Defect inspection method and defect inspection apparatus Apr. 29, 2003
6556292 Head slap characterization using optical surface analyzer Apr. 29, 2003
6556293 Optical inspection of laser vias Apr. 29, 2003
6556298 Method and system for non-destructive dye penetration testing of a surface Apr. 29, 2003
6549278 Contaminant inspecting device with multi-color light source Apr. 15, 2003
6538725 Method for determination of structural defects of coatings Mar. 25, 2003
6538729 Unit for inspecting a surface Mar. 25, 2003
6538730 Defect detection system Mar. 25, 2003
6532065 Device and method for controlling the surface of an object Mar. 11, 2003
6532066 Vision system for identification of defects in wet polymeric coatings Mar. 11, 2003
6529270 Apparatus and method for detecting defects in the surface of a workpiece Mar. 4, 2003
6526164 Intelligent photomask disposition Feb. 25, 2003
6522777 Combined 3D- and 2D-scanning machine-vision system and method Feb. 18, 2003
6515745 Optical measurement system using polarized light Feb. 4, 2003
6512578 Method and apparatus for surface inspection Jan. 28, 2003
6509964 Multi-beam apparatus for measuring surface quality Jan. 21, 2003
6509965 Wafer inspection system for distinguishing pits and particles Jan. 21, 2003
6509966 Optical system for detecting surface defect and surface defect tester using the same Jan. 21, 2003
6501544 Inspection apparatus for surfaces of spheres Dec. 31, 2002
6501545 Defect detecting apparatus Dec. 31, 2002
6498642 Endoscope inspection system Dec. 24, 2002
6498867 Method and apparatus for differential illumination image-capturing and defect handling Dec. 24, 2002
6496254 Method and device for inspecting objects Dec. 17, 2002
6496255 Measurement of crystal face orientation Dec. 17, 2002
6493076 Method and arrangement for measuring wood Dec. 10, 2002
6486946 Method for discriminating between holes in and particles on a film covering a substrate Nov. 26, 2002
6486952 Semiconductor test apparatus Nov. 26, 2002
6480272 System and method for in-situ particle contamination measurement using shadowgrams Nov. 12, 2002
6473168 Method and apparatus for detecting irregularities in a product Oct. 29, 2002
6469784 Optical inspection method and apparatus utilizing a variable angle design Oct. 22, 2002
6461035 Device and method for non-contact detection of structural and/or surface faults in large surface bodies Oct. 8, 2002
6462813 Surface defect inspection system and method Oct. 8, 2002
6462814 Beam delivery and imaging for optical probing of a device operating under electrical test Oct. 8, 2002
6462815 Device for optically testing surfaces Oct. 8, 2002
6452671 Illuminator for macro inspection, macro inspecting apparatus and macro inspecting method Sep. 17, 2002
6449036 Sensor unit, process and device for inspecting the surface of an object Sep. 10, 2002
6445447 Near field optical certifying head for disc asperity mapping Sep. 3, 2002
6437862 Defect inspection apparatus Aug. 20, 2002
6433867 Contrast imaging method for inspecting specular surface devices Aug. 13, 2002
6414752 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Jul. 2, 2002
6411376 Method and apparatus for measuring the direction and position of rotating bodies Jun. 25, 2002
6411378 Mask, structures, and method for calibration of patterned defect inspections Jun. 25, 2002
6407808 Pattern inspecting system and pattern inspecting method Jun. 18, 2002
6384910 Sample inspection system May. 7, 2002
6376852 Surface inspection using the ratio of intensities of s--and p-polarized light components of a laser beam reflected a rough surface Apr. 23, 2002
6366351 Apparatus for detecting defects in wood processed by a planer Apr. 2, 2002
6366352 Optical inspection method and apparatus utilizing a variable angle design Apr. 2, 2002

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