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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
6654108 Test structure for metal CMP process control Nov. 25, 2003
6654109 System for detecting surface defects in semiconductor wafers Nov. 25, 2003
6654110 Image pickup apparatus and defect inspection apparatus for photomask Nov. 25, 2003
6654113 Surface inspection apparatus Nov. 25, 2003
6654132 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers Nov. 25, 2003
6650408 Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus Nov. 18, 2003
6646734 Method and an arrangement for inspection of and measuring at an object Nov. 11, 2003
6646735 Surface inspection apparatus and surface inspection method Nov. 11, 2003
6642529 Methods for the automated testing of reticle feature geometries Nov. 4, 2003
6643006 Method and system for reviewing a semiconductor wafer using at least one defect sampling condition Nov. 4, 2003
6643007 Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator Nov. 4, 2003
6639660 Method for marking at least one point on an object Oct. 28, 2003
6639661 Technique for imaging electrical contacts Oct. 28, 2003
6636301 Multiple beam inspection apparatus and method Oct. 21, 2003
6636302 Scanning system for inspecting anamolies on surfaces Oct. 21, 2003
6630995 Method and apparatus for embedded substrate and system status monitoring Oct. 7, 2003
6631006 System and method of marking materials for automated processing Oct. 7, 2003
6628380 Appearance inspecting jig for small parts and inspecting method employing the same jig Sep. 30, 2003
6624884 Surface inspection tool Sep. 23, 2003
6621567 Surface inspecting method and surface inspecting device Sep. 16, 2003
6621568 Defect inspecting apparatus Sep. 16, 2003
6621569 Illuminator for machine vision Sep. 16, 2003
6617087 Use of scatterometry to measure pattern accuracy Sep. 9, 2003
6617603 Surface defect tester Sep. 9, 2003
6614519 Surface inspection tool using a parabolic mirror Sep. 2, 2003
6611325 Enhanced defect detection using surface scanning inspection tools Aug. 26, 2003
6611326 System and apparatus for evaluating the effectiveness of wafer drying operations Aug. 26, 2003
6608321 Differential wavelength inspection system Aug. 19, 2003
6608676 System for detecting anomalies and/or features of a surface Aug. 19, 2003
6603541 Wafer inspection using optimized geometry Aug. 5, 2003
6600557 Method for the detection of processing-induced defects in a silicon wafer Jul. 29, 2003
6597006 Dual beam symmetric height systems and methods Jul. 22, 2003
6597446 Holographic scatterometer for detection and analysis of wafer surface deposits Jul. 22, 2003
6597447 Method and apparatus for periodic correction of metrology data Jul. 22, 2003
6597455 Fault detection apparatus Jul. 22, 2003
6590182 Laser repair apparatus and method Jul. 8, 2003
6590645 System and methods for classifying anomalies of sample surfaces Jul. 8, 2003
6587192 Surface inspecting apparatus and method Jul. 1, 2003
6583871 System and method to measure closed area defects Jun. 24, 2003
6578961 Massively parallel inspection and imaging system Jun. 17, 2003
6573987 LCC device inspection module Jun. 3, 2003
6570607 Light and shade inspecting apparatus and light and shade inspecting method May. 27, 2003
6570650 Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces May. 27, 2003
6570662 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers May. 27, 2003
6566670 Method and system for guiding a web of moving material May. 20, 2003
6566885 Multiple directional scans of test structures on semiconductor integrated circuits May. 20, 2003
6567162 Reconfigurable apparatus and method for inspection during a manufacturing process May. 20, 2003
6563575 Optical sensing system for detecting welds and defects in metal May. 13, 2003
6563577 Defect testing apparatus and defect testing method May. 13, 2003
6563586 Wafer metrology apparatus and method May. 13, 2003

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