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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
8514388 Flaw inspecting method and device therefor Aug. 20, 2013
8508727 Defects inspecting apparatus and defects inspecting method Aug. 13, 2013
8502968 Surface scanning device Aug. 6, 2013
8502967 Apparatus for optical inspection Aug. 6, 2013
8502966 Surface defect inspection method and apparatus Aug. 6, 2013
8497986 Laser-based maintenance apparatus using ultrasonic wave detection for flaw analysis and repair Jul. 30, 2013
8497985 Inspection method based on captured image and inspection device Jul. 30, 2013
8497984 System and method for inspection of a workpiece surface using multiple scattered light collectors Jul. 30, 2013
8494802 Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer Jul. 23, 2013
8493558 Surface inspection apparatus Jul. 23, 2013
8488128 Line edge roughness measuring technique and test structure Jul. 16, 2013
8488117 Inspection system and method for fast changes of focus Jul. 16, 2013
8488116 Surface defect inspection method and apparatus Jul. 16, 2013
8482727 Defect inspection method Jul. 9, 2013
8482715 Monitoring apparatus and method particularly useful in photolithographically processing substrates Jul. 9, 2013
8477309 Method and system for inspecting beveled objects Jul. 2, 2013
8476611 Systems and methods for the detection of orientation features on a material web Jul. 2, 2013
8476581 Speckle reduction method and apparatus Jul. 2, 2013
8472016 Optical defect inspection apparatus Jun. 25, 2013
8467595 Defect review system and method, and program Jun. 18, 2013
8467047 Systems and methods for detecting defects on a wafer Jun. 18, 2013
8462330 Method and apparatus for detecting defects Jun. 11, 2013
8462329 Multi-spot illumination for wafer inspection Jun. 11, 2013
8462328 Efficient telecentric optical system (ETOS) Jun. 11, 2013
8462327 Appearance inspection apparatus Jun. 11, 2013
8456639 Measurement of critical dimension Jun. 4, 2013
8456624 Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufactu Jun. 4, 2013
8451440 Apparatus for the optical inspection of wafers May. 28, 2013
8451439 Apparatus and method for inspecting pattern May. 28, 2013
8446579 Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufactu May. 21, 2013
8446578 Defect inspection apparatus, defect inspection method and method of inspecting hole pattern May. 21, 2013
8444821 Measuring of web May. 21, 2013
8441651 Defect inspection apparatus and defect inspection method May. 14, 2013
8441647 Apparatus for detecting foreign material in pouch type battery May. 14, 2013
8441627 Surface inspection apparatus and surface inspection method May. 14, 2013
8437002 Imaging optical inspection device with a pinhole camera May. 7, 2013
8422761 Defect and critical dimension analysis systems and methods for a semiconductor lithographic process Apr. 16, 2013
8422010 Methods and systems for determining a characteristic of a wafer Apr. 16, 2013
8422009 Foreign matter inspection method and foreign matter inspection apparatus Apr. 16, 2013
8422008 Electrical machine component monitoring system and method Apr. 16, 2013
8416428 Detection Methods and Systems Apr. 9, 2013
8416402 Method and apparatus for inspecting defects Apr. 9, 2013
8411928 Scatterometry method and device for inspecting patterned medium Apr. 2, 2013
8411263 Method of evaluating silicon wafer and method of manufacturing silicon wafer Apr. 2, 2013
8408081 Method and apparatus for determining the nodosity of a wooden plank Apr. 2, 2013
8405825 Method of detecting a particle and a lithographic apparatus Mar. 26, 2013
8400628 Enclosure for an optical inspection apparatus Mar. 19, 2013
8395766 Foreign matter inspection apparatus Mar. 12, 2013
8384888 Mask defect measurement method, mask quality determination and method, and manufacturing method of semiconductor device Feb. 26, 2013
8384887 Methods and systems for inspection of a specimen using different inspection parameters Feb. 26, 2013

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