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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
6788405 Nonlinear optical system for sensing the presence of contamination on a semiconductor wafer Sep. 7, 2004
6781686 Femtosecond optical surface imaging Aug. 24, 2004
6781687 Illumination and image acquisition system Aug. 24, 2004
6781688 Process for identifying defects in a substrate having non-uniform surface properties Aug. 24, 2004
6778307 Method and system for performing swept-wavelength measurements within an optical system Aug. 17, 2004
6774989 Interlayer dielectric void detection Aug. 10, 2004
6774990 Method to inspect patterns with high resolution photoemission Aug. 10, 2004
6771364 Surface inspecting apparatus Aug. 3, 2004
6768542 Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device Jul. 27, 2004
6762831 Method and apparatus for inspecting defects Jul. 13, 2004
6763131 Model registration method and image processing apparatus Jul. 13, 2004
6760100 Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate Jul. 6, 2004
6757058 Fiber-optic light line for use in an inspection system Jun. 29, 2004
6753955 Inspection device for crystal defect of silicon wafer and method for detecting crystal defect of the same Jun. 22, 2004
6749715 System and method for analyzing a semiconductor surface Jun. 15, 2004
6747734 Apparatus and method for processing a microelectronic workpiece using metrology Jun. 8, 2004
6738134 Inspection method and inspection system of a terminal metal fitting May. 18, 2004
6734997 Method of detecting defects on a transparent film in a scanner May. 11, 2004
6735333 Pattern inspection apparatus May. 11, 2004
6731383 Confocal 3D inspection system and process May. 4, 2004
6731384 Apparatus for detecting foreign particle and defect and the same method May. 4, 2004
6727987 Image pickup apparatus and defect inspection system for photomask Apr. 27, 2004
6727993 Surface inspection instrument and surface inspection method Apr. 27, 2004
6724005 Substrate defect inspection method and substrate defect inspection system Apr. 20, 2004
6724473 Method and system using exposure control to inspect a surface Apr. 20, 2004
6717664 System and method for inspecting a beam using micro fiber-optic technology Apr. 6, 2004
6717707 Method and system for controlling resonance within a resonator-enhanced optical system Apr. 6, 2004
6714295 Optical inspection method and apparatus having an enhanced height sensitivity region and roughness filtering Mar. 30, 2004
6714296 Method and apparatus for inspecting photosensitive material for surface defects Mar. 30, 2004
6714831 Paint defect automated seek and repair assembly and method Mar. 30, 2004
6710868 Optical inspection system with dual detection heads Mar. 23, 2004
6707056 Stage rotation system to improve edge measurements Mar. 16, 2004
6704101 Scatterometry based measurements of a moving substrate Mar. 9, 2004
6697151 Material inspection Feb. 24, 2004
6693707 Method of inspecting surface-emitting semiconductor laser and inspection device for surface-emitting semiconductor laser Feb. 17, 2004
6686996 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Feb. 3, 2004
6683682 Electronic component inspection equipment Jan. 27, 2004
6683683 Defect inspection method and apparatus for silicon wafer Jan. 27, 2004
6678043 Methods and apparatus for surface analysis Jan. 13, 2004
6673640 Method of manufacturing semiconductor device for evaluation capable of evaluating crystal defect using in-line test by avoiding using preferential etching process Jan. 6, 2004
6674523 Pre-viewing inspection method for article and device therefor Jan. 6, 2004
6674524 Arrangement for the visual inspection of substrates Jan. 6, 2004
6667799 Method and apparatus for inspecting an extruded tread Dec. 23, 2003
6667800 Method and device for measuring and quantifying surface defects on a test surface Dec. 23, 2003
6665066 Machine vision system and method for analyzing illumination lines in an image to determine characteristics of an object being inspected Dec. 16, 2003
6661506 Engine bearing inspection system Dec. 9, 2003
6661507 Pattern inspecting system and pattern inspecting method Dec. 9, 2003
6661912 Inspecting method and apparatus for repeated micro-miniature patterns Dec. 9, 2003
6657707 Metallurgical inspection and/or analysis of flip-chip pads and interfaces Dec. 2, 2003
6657735 Method of evaluating critical locations on a semiconductor apparatus pattern Dec. 2, 2003

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