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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
6927077 Method and apparatus for measuring contamination of a semiconductor substrate Aug. 9, 2005
6922236 Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection Jul. 26, 2005
6922237 Device and methods for inspecting soldered connections Jul. 26, 2005
6919956 Method of automatically repairing cracks and apparatus for use in such method Jul. 19, 2005
6919957 Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen Jul. 19, 2005
6919958 Wafer metrology apparatus and method Jul. 19, 2005
6917419 Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen Jul. 12, 2005
6914683 Measurement of small, periodic undulations in surfaces Jul. 5, 2005
6908773 ATR-FTIR metal surface cleanliness monitoring Jun. 21, 2005
6909514 Wheel profile inspection apparatus and method Jun. 21, 2005
6909791 Method of measuring a line edge roughness of micro objects in scanning microscopes Jun. 21, 2005
6903888 Detection of defects embedded in servo pattern on stamper by using scattered light Jun. 7, 2005
6895149 Apparatus for beam homogenization and speckle reduction May. 17, 2005
6891610 Methods and systems for determining an implant characteristic and a presence of defects on a specimen May. 10, 2005
6891627 Methods and systems for determining a critical dimension and overlay of a specimen May. 10, 2005
6888627 Optical scanning system for surface inspection May. 3, 2005
6885019 Sample positioning system to improve edge measurements Apr. 26, 2005
6882413 Rotating head ellipsometer Apr. 19, 2005
6882414 Broadband infrared spectral surface spectroscopy Apr. 19, 2005
6882415 Confocal 3D inspection system and process Apr. 19, 2005
6879390 Multiple beam inspection apparatus and method Apr. 12, 2005
6879421 Method and system for performing swept-wavelength measurements within an optical system incorporating a reference resonator Apr. 12, 2005
6876445 Method for analyzing defect data and inspection apparatus and review system Apr. 5, 2005
6871684 System for identifying defects in a composite structure Mar. 29, 2005
6873722 Method of qualitatively ascertaining the position and degree of severity of chatter marks in a fine-machined surface of a workpiece Mar. 29, 2005
6867919 Optical arrangement and microscope Mar. 15, 2005
6864971 System and method for performing optical inspection utilizing diffracted light Mar. 8, 2005
6861660 Process and assembly for non-destructive surface inspection Mar. 1, 2005
6862088 Method and apparatus for providing adaptive control of track servo Mar. 1, 2005
6862089 Methods for managing examination of foreign matters in through holes Mar. 1, 2005
6858859 Optically scanning apparatus and defect inspection system Feb. 22, 2005
6850333 Optimized aperture shape for optical CD/profile metrology Feb. 1, 2005
6850858 Method and apparatus for calibrating a metrology tool Feb. 1, 2005
6847442 Illuminator for inspecting substantially flat surfaces Jan. 25, 2005
6847443 System and method for multi-wavelength, narrow-bandwidth detection of surface defects Jan. 25, 2005
6842235 Optical measurement of planarized features Jan. 11, 2005
6833913 Apparatus and methods for optically inspecting a sample for anomalies Dec. 21, 2004
6822734 Apparatus and method for fabricating flat workpieces Nov. 23, 2004
6819416 Defect inspection method and apparatus therefor Nov. 16, 2004
6816250 Method and apparatus for measuring irregularities on an outer surface of a rotatable cylindrical shaft Nov. 9, 2004
6813376 System and method for detecting defects on a structure-bearing surface using optical inspection Nov. 2, 2004
6806105 Method of measuring meso-scale structures on wafers Oct. 19, 2004
6806951 Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen Oct. 19, 2004
6798504 Apparatus and method for inspecting surface of semiconductor wafer or the like Sep. 28, 2004
6795175 System and method for imaging contamination on a surface Sep. 21, 2004
6791099 Laser scanning wafer inspection using nonlinear optical phenomena Sep. 14, 2004
6791680 System and method for inspecting semiconductor wafers Sep. 14, 2004
6792161 Image input device with dust detector Sep. 14, 2004
6792357 Optical corrosion measurement system Sep. 14, 2004
6788404 Inspection system with multiple illumination sources Sep. 7, 2004

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