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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7027640 Method and apparatus for inspecting defects on polishing pads to be used with chemical mechanical polishing apparatus Apr. 11, 2006
7023540 Method and apparatus for recognition of color brightness variations Apr. 4, 2006
7016029 Detection of lens anti-reflective coating decay by undesired residue detection Mar. 21, 2006
7016030 Extended surface parallel coating inspection method Mar. 21, 2006
7016031 System and methods for classifying anomalies of sample surfaces Mar. 21, 2006
7012681 Magnetic transfer apparatus and magnetic recording medium Mar. 14, 2006
7012682 Co-planarity examination method and optical module for electronic components Mar. 14, 2006
7012683 Apparatus and methods for optically inspecting a sample for anomalies Mar. 14, 2006
7009696 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Mar. 7, 2006
7009196 Inspection apparatus for inspecting resist removal width Mar. 7, 2006
7004421 Inspection device of winding appearance of tape and improvement processing method for the same Feb. 28, 2006
7006213 Method for inspecting the surface of a roll cylinder and device therefor Feb. 28, 2006
7001055 Uniform pupil illumination for optical inspection systems Feb. 21, 2006
7002674 Method and apparatus for inspecting defects Feb. 21, 2006
7002675 Method and apparatus for locating/sizing contaminants on a polished planar surface of a dielectric or semiconductor material Feb. 21, 2006
7002676 Appearance inspection apparatus and the method of inspecting the same Feb. 21, 2006
6995838 Device for automatic surface inspection of an unwinding strip Feb. 7, 2006
6995847 Methods and systems for substrate surface evaluation Feb. 7, 2006
6992315 In situ combustion turbine engine airfoil inspection Jan. 31, 2006
6992316 Angled sensors for detecting substrates Jan. 31, 2006
6989548 Inspection device for metal rings of a continuously variable transmission belt Jan. 24, 2006
6987561 System and apparatus for testing a micromachined optical device Jan. 17, 2006
6987562 Object detecting apparatus Jan. 17, 2006
6979815 Folding apparatus of a web-fed printing press including a conveyor belt monitoring device Dec. 27, 2005
6980291 Method of and apparatus for inspecting a curved shape Dec. 27, 2005
6974963 Substrate inspecting device, coating/developing device and substrate inspecting method Dec. 13, 2005
6975391 Method and apparatus for non-destructive testing Dec. 13, 2005
6972419 Extreme ultraviolet radiation imaging Dec. 6, 2005
6970238 System for inspecting the surfaces of objects Nov. 29, 2005
6967715 Method and apparatus for optical film measurements in a controlled environment Nov. 22, 2005
6963076 System and method for optically sensing defects in OPC devices Nov. 8, 2005
6963393 Measurement of lateral diffusion of diffused layers Nov. 8, 2005
6961127 Device and method for optical inspection Nov. 1, 2005
6958814 Apparatus and method for measuring a property of a layer in a multilayered structure Oct. 25, 2005
6954267 Device for measuring surface defects Oct. 11, 2005
6954268 Defect inspection apparatus Oct. 11, 2005
6952256 Optical compensation in high numerical aperture photomask inspection systems for inspecting photomasks through thick pellicles Oct. 4, 2005
6952257 Inspection station Oct. 4, 2005
6950181 Optical wafer presence sensor system Sep. 27, 2005
6950196 Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen Sep. 27, 2005
6950545 Nondestructive inspection method and apparatus Sep. 27, 2005
6946670 Effective scanning resolution enhancement Sep. 20, 2005
6947135 Reduced multicubic database interpolation method for optical measurement of diffractive microstructures Sep. 20, 2005
6946394 Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process Sep. 20, 2005
6943876 Method and apparatus for detecting pattern defects Sep. 13, 2005
6937329 Method for detecting and identifying defects in a laser beam weld seam Aug. 30, 2005
6937352 Positioning device for RAM testing system Aug. 30, 2005
6934018 Tire inspection apparatus and method Aug. 23, 2005
6934040 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers Aug. 23, 2005
6930771 Optical inspection equipment for semiconductor wafers with precleaning Aug. 16, 2005

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