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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7130029 Methods and systems for determining an adhesion characteristic and a thickness of a specimen Oct. 31, 2006
7123357 Method of detecting and classifying scratches and particles on thin film disks or wafers Oct. 17, 2006
7123356 Methods and systems for inspecting reticles using aerial imaging and die-to-database detection Oct. 17, 2006
7119896 Method and system for measuring wear on a tire Oct. 10, 2006
7116816 Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen Oct. 3, 2006
7116413 Inspection system for integrated applications Oct. 3, 2006
7110106 Surface inspection system Sep. 19, 2006
7106425 Methods and systems for determining a presence of defects and a thin film characteristic of a specimen Sep. 12, 2006
7106432 Surface inspection system and method for using photo detector array to detect defects in inspection surface Sep. 12, 2006
7102740 Method and system for determining surface feature characteristics using slit detectors Sep. 5, 2006
7102743 Semiconductor wafer inspection apparatus Sep. 5, 2006
7099002 Defect detector and method of detecting defect Aug. 29, 2006
7095496 Method and apparatus for position-dependent optical metrology calibration Aug. 22, 2006
7088443 System for detecting anomalies and/or features of a surface Aug. 8, 2006
7084965 Arrangement and method for inspecting unpatterned wafers Aug. 1, 2006
7084966 Optical measurement of device features using lenslet array illumination Aug. 1, 2006
7084967 Scanning system for inspecting anomalies on surfaces Aug. 1, 2006
7084968 Method for analyzing defect data and inspection apparatus and review system Aug. 1, 2006
7081953 Apparatus and method for inspecting pattern Jul. 25, 2006
7078712 In-situ monitoring on an ion implanter Jul. 18, 2006
7078721 Object detection apparatus for a vehicle Jul. 18, 2006
7079237 Apparatus for inspecting a wafer Jul. 18, 2006
7075637 Optical scanning system for surface inspection Jul. 11, 2006
7075638 Multiple beam inspection apparatus and method Jul. 11, 2006
7068370 Optical inspection equipment for semiconductor wafers with precleaning Jun. 27, 2006
7064820 Surface inspection method and surface inspection system Jun. 20, 2006
7061599 Protective film for base substrates of multi-layered board and method and apparatus for inspecting base substrates Jun. 13, 2006
7061600 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected Jun. 13, 2006
7061601 System and method for double sided optical inspection of thin film disks or wafers Jun. 13, 2006
7061602 Method of inspecting a semiconductor device and an apparatus thereof Jun. 13, 2006
7057717 System for and method of investigating the exact same point on a sample substrate with at least two wavelengths Jun. 6, 2006
7050162 Optical metrology tool having improved contrast May. 23, 2006
7046352 Surface inspection system and method using summed light analysis of an inspection surface May. 16, 2006
7046353 Surface inspection system May. 16, 2006
7046354 Surface foreign matter inspecting device May. 16, 2006
7046355 Dual stage defect region identification and defect detection method and apparatus May. 16, 2006
7042564 Wafer inspection methods and an optical inspection tool May. 9, 2006
7042580 Apparatus for imaging metrology May. 9, 2006
7042581 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers May. 9, 2006
7038771 Backside contamination inspection device May. 2, 2006
7038772 System and methods for classifying anomalies of sample surfaces May. 2, 2006
7034928 Reading apparatus Apr. 25, 2006
7034930 System and method for defect identification and location using an optical indicia device Apr. 25, 2006
7034931 Method to grain inspect directionally solidified castings Apr. 25, 2006
7030978 System and method for inspection of a substrate that has a refractive index Apr. 18, 2006
7032208 Defect inspection apparatus Apr. 18, 2006
7027142 Optical technique for detecting buried defects in opaque films Apr. 11, 2006
7027143 Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths Apr. 11, 2006
7027145 Reconfigurable surface finish inspection apparatus for cylinder bores and other surfaces Apr. 11, 2006
7027148 Method and apparatus for determining the triacetin content in filter plugs Apr. 11, 2006

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