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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7239381 Particle detection method Jul. 3, 2007
7230723 High-accuracy pattern shape evaluating method and apparatus Jun. 12, 2007
7230695 Defect repair device and defect repair method Jun. 12, 2007
7227628 Wafer inspection systems and methods for analyzing inspection data Jun. 5, 2007
7227113 Confocal laser scanning microscope Jun. 5, 2007
7224470 Method and apparatus for measuring surface configuration May. 29, 2007
7221446 Fluid dispenser and lens inspection device May. 22, 2007
7221445 Methods and apparatus for detecting and quantifying surface characteristics and material conditions using light scattering May. 22, 2007
7220955 Three-dimensional imaging resonator and method therefor May. 22, 2007
7218391 Material independent optical profilometer May. 15, 2007
7218390 Apparatus and methods for automatically measuring a curl of an optical sheet May. 15, 2007
7218389 Method and apparatus for inspecting pattern defects May. 15, 2007
7215807 Nondestructive inspection method and apparatus May. 8, 2007
7215419 Method and apparatus for position-dependent optical metrology calibration May. 8, 2007
7215418 Inspection of transparent substrates for defects May. 8, 2007
7215417 Illuminator for inspecting substantially flat surfaces May. 8, 2007
7209227 Backside contamination inspection device Apr. 24, 2007
7206066 Reflectance surface analyzer Apr. 17, 2007
7205549 Pattern defect inspection method and its apparatus Apr. 17, 2007
7205529 Laser mirror vision Apr. 17, 2007
7202958 Modeling a sample with an underlying complicated structure Apr. 10, 2007
7193699 Method and apparatus for scanning a semiconductor wafer Mar. 20, 2007
7193698 Wafer defect detection methods and systems Mar. 20, 2007
7193696 Systems and methods for using light to indicate defect locations on a composite structure Mar. 20, 2007
7190447 Double sided optical inspection of thin film disks or wafers Mar. 13, 2007
7190446 System for processing electronic devices Mar. 13, 2007
7187438 Apparatus and method for inspecting defects Mar. 6, 2007
7187437 Plurality of light sources for inspection apparatus and method Mar. 6, 2007
7187436 Multi-resolution inspection system and method of operating same Mar. 6, 2007
7184147 Device for determining the properties of surfaces Feb. 27, 2007
7184139 Test head for optically inspecting workpieces Feb. 27, 2007
7184138 Spatial filter for sample inspection system Feb. 27, 2007
7184137 Aerial reticle inspection with particle beam conversion Feb. 27, 2007
7180585 Apparatus for wafer inspection Feb. 20, 2007
7180584 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected Feb. 20, 2007
7177019 Apparatus for imaging metrology Feb. 13, 2007
7169627 Method for inspecting a connecting surface of a flip chip Jan. 30, 2007
7164475 High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Jan. 16, 2007
7161671 Method and apparatus for inspecting defects Jan. 9, 2007
7161669 Wafer edge inspection Jan. 9, 2007
7161668 Wafer edge inspection Jan. 9, 2007
7161667 Wafer edge inspection Jan. 9, 2007
7154597 Method for inspecting surface and apparatus for inspecting it Dec. 26, 2006
7142295 Inspection of transparent substrates for defects Nov. 28, 2006
7142294 Method and apparatus for detecting defects Nov. 28, 2006
7133128 System and method for measuring properties of a semiconductor substrate in a non-destructive way Nov. 7, 2006
7133127 Lighting optical machine and defect inspection system Nov. 7, 2006
7130038 Method and apparatus for optical film measurements in a controlled environment Oct. 31, 2006
7130037 Systems for inspecting wafers and reticles with increased resolution Oct. 31, 2006
7130036 Methods and systems for inspection of an entire wafer surface using multiple detection channels Oct. 31, 2006

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