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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7312865 Method for in situ monitoring of chamber peeling Dec. 25, 2007
7310141 Inspection device and inspection method for pattern profile, exposure system Dec. 18, 2007
7310140 Method and apparatus for inspecting a wafer surface Dec. 18, 2007
7308127 Method for determining and evaluating defects in a sample surface Dec. 11, 2007
7307713 Apparatus and method for inspection of a wafer Dec. 11, 2007
7307712 Method of detecting mask defects, a computer program and reference substrate Dec. 11, 2007
7304731 Systems and methods for providing illumination of a specimen for inspection Dec. 4, 2007
7301620 Inspecting apparatus, image pickup apparatus, and inspecting method Nov. 27, 2007
7301165 Methods and apparatus for inspecting an object Nov. 27, 2007
7298496 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry Nov. 20, 2007
7298471 Surface inspection apparatus and surface inspection method Nov. 20, 2007
7298470 Defect inspection device for metal ring end faces of a continuously variable transmission belt Nov. 20, 2007
7295301 Dual stage defect region identification and defect detection method and apparatus Nov. 13, 2007
7295300 Detecting surface pits Nov. 13, 2007
7295299 Device for optically measuring surface properties Nov. 13, 2007
7292949 Method and apparatus for estimating surface moisture content of wood chips Nov. 6, 2007
7292341 Optical system operating with variable angle of incidence Nov. 6, 2007
7292335 Optical measurements of patterned structures Nov. 6, 2007
7292330 Wafer inspection with a customized reflective optical channel component Nov. 6, 2007
7292329 Test head for optically inspecting workpieces comprising a lens for elongating a laser spot on the workpieces Nov. 6, 2007
7292328 Method for inspection of a wafer Nov. 6, 2007
7292327 Circuit-pattern inspection apparatus Nov. 6, 2007
7289234 Method and system for thin film characterization Oct. 30, 2007
7289200 Confocal reflectommeter/ellipsometer to inspect low-temperature fusion seals Oct. 30, 2007
7286218 System and method for inspecting a workpiece surface using surface structure spatial frequencies Oct. 23, 2007
7283235 Optical device and inspection module Oct. 16, 2007
7283225 Particle detection device, lithographic apparatus and device manufacturing method Oct. 16, 2007
7280199 System for detecting anomalies and/or features of a surface Oct. 9, 2007
7280197 Wafer edge inspection apparatus Oct. 9, 2007
7277164 Process and station for inspecting the painting of motor vehicle bodywork parts Oct. 2, 2007
7276127 Method and apparatus for cleaning with internally reflected electromagnetic radiation Oct. 2, 2007
7274813 Defect inspection method and apparatus Sep. 25, 2007
7274445 Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or disk Sep. 25, 2007
7274444 Multi mode inspection method and apparatus Sep. 25, 2007
7274443 Corrosion monitoring system, optical corrosion probe, and methods of use Sep. 25, 2007
7271900 Magneto-optical imaging method and device Sep. 18, 2007
7271890 Method and apparatus for inspecting defects Sep. 18, 2007
7271889 Device and method for inspecting an object Sep. 18, 2007
7268940 Illuminating device Sep. 11, 2007
7268895 Inspection system and a method for inspecting a semiconductor wafer Sep. 11, 2007
7266232 Apparatus and method for inspecting pattern Sep. 4, 2007
7259844 High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Aug. 21, 2007
7253891 Method and apparatus for simultaneous 2-D and topographical inspection Aug. 7, 2007
7251024 Defect inspection method and apparatus therefor Jul. 31, 2007
7248366 Method for marking defect and device therefor Jul. 24, 2007
7248352 Method for inspecting defect and apparatus for inspecting defect Jul. 24, 2007
7245366 Surface inspection method and surface inspection apparatus Jul. 17, 2007
7245365 Apparatus and method for detecting particles on an object Jul. 17, 2007
7242467 Method and apparatus for high-resolution defect location and classification Jul. 10, 2007
7239389 Determination of irradiation parameters for inspection of a surface Jul. 3, 2007

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