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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7394532 Surface inspection method and apparatus Jul. 1, 2008
7394531 Apparatus and method for automatic optical inspection Jul. 1, 2008
7394530 Surface inspection technology for the detection of porosity and surface imperfections on machined metal surfaces Jul. 1, 2008
7383156 Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information Jun. 3, 2008
7379192 Optical metrology of single features May. 27, 2008
7379177 System and method for performing hard glass inspection May. 27, 2008
7379172 Method and apparatus for inspection of optical component May. 27, 2008
7375362 Method and apparatus for reducing or eliminating stray light in an optical test head May. 20, 2008
7372558 Method and system for visualizing surface errors May. 13, 2008
7372062 Defect inspection device and substrate manufacturing system using the same May. 13, 2008
7369703 Method and apparatus for circuit pattern inspection May. 6, 2008
7369233 Optical system for measuring samples using short wavelength radiation May. 6, 2008
7369224 Surface inspection apparatus, surface inspection method and exposure system May. 6, 2008
7369223 Method of apparatus for detecting particles on a specimen May. 6, 2008
7366343 Pattern inspection method and apparatus Apr. 29, 2008
7365836 High speed laser scanning inspection system Apr. 29, 2008
7365834 Optical system for detecting anomalies and/or features of surfaces Apr. 29, 2008
7362450 Specular surface flaw detection Apr. 22, 2008
7362437 Vision inspection system device and method Apr. 22, 2008
7362423 Digital diagnostic apparatus and vision system with related methods Apr. 22, 2008
7359045 High speed laser scanning inspection system Apr. 15, 2008
7359044 Method and apparatus for inspecting pattern defects Apr. 15, 2008
7356176 Mounting-error inspecting method and substrate inspecting apparatus using the method Apr. 8, 2008
7355693 Pattern inspection apparatus Apr. 8, 2008
7355690 Double inspection of reticle or wafer Apr. 8, 2008
7355689 Automatic optical inspection using multiple objectives Apr. 8, 2008
7352457 Multiple beam inspection apparatus and method Apr. 1, 2008
7352456 Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes Apr. 1, 2008
7345754 Fourier filters and wafer inspection systems Mar. 18, 2008
7345751 Material independent optical profilometer Mar. 18, 2008
7339664 System and method for inspecting a light-management film and method of making the light-management film Mar. 4, 2008
7339663 Method and apparatus for classifying repetitive defects on a substrate Mar. 4, 2008
7339661 Dark field inspection system Mar. 4, 2008
7333192 Apparatus and method for inspecting defects Feb. 19, 2008
7332731 Radiation system and lithographic apparatus Feb. 19, 2008
7330265 Appearance inspection apparatus and projection method for projecting image of sample under inspection Feb. 12, 2008
7330250 Nondestructive evaluation of subsurface damage in optical elements Feb. 12, 2008
7327450 Apparatus for inspection of a wafer Feb. 5, 2008
7324193 Measuring a damaged structure formed on a wafer using optical metrology Jan. 29, 2008
7319518 Double side polished wafer scratch inspection tool Jan. 15, 2008
7319517 Wafer chuck illumination device for use in semiconductor manufacturing equipment Jan. 15, 2008
7319516 Measurement instrument for inspecting painted bodywork parts, the instrument being provided with an anti-damage device Jan. 15, 2008
7317521 Particle detection method Jan. 8, 2008
7316322 Quality evaluation apparatus for fruits and vegetables Jan. 8, 2008
7315366 Apparatus and method for inspecting defects Jan. 1, 2008
7315365 System and methods for classifying anomalies of sample surfaces Jan. 1, 2008
7315364 System for inspecting a surface employing configurable multi angle illumination modes Jan. 1, 2008
7315363 Inspection method and inspection apparatus Jan. 1, 2008
7315361 System and method for inspecting wafers in a laser marking system Jan. 1, 2008
7312866 Methods and systems for substrate surface evaluation Dec. 25, 2007

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