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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7456948 Method for detecting particles and defects and inspection equipment thereof Nov. 25, 2008
7456947 Inspecting apparatus and inspecting method Nov. 25, 2008
7453562 Ellipsometry measurement and analysis Nov. 18, 2008
7453561 Method and apparatus for inspecting foreign particle defects Nov. 18, 2008
7453560 Method of evaluating optical element Nov. 18, 2008
7446866 Apparatus and method for inspecting pattern Nov. 4, 2008
7446865 Method of classifying defects Nov. 4, 2008
7445446 Method for in-line monitoring and controlling in heat-treating of resist coated wafers Nov. 4, 2008
7443496 Apparatus and method for testing defects Oct. 28, 2008
7440606 Defect detector and defect detection method Oct. 21, 2008
7440092 Method and apparatus for detecting defects Oct. 21, 2008
7440091 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate Oct. 21, 2008
7436506 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Oct. 14, 2008
7436505 Computer-implemented methods and systems for determining a configuration for a light scattering inspection system Oct. 14, 2008
7436504 Non-destructive testing and imaging Oct. 14, 2008
7433033 Inspection method and apparatus using same Oct. 7, 2008
7433032 Method and apparatus for inspecting defects in multiple regions with different parameters Oct. 7, 2008
7433031 Defect review system with 2D scanning and a ring detector Oct. 7, 2008
7430042 Device and method for determining the properties of surfaces Sep. 30, 2008
7427767 Apparatus for identifying the condition of a conveyor belt Sep. 23, 2008
7427747 Optical image pickup apparatus for imaging living body tissue Sep. 23, 2008
7426031 Method and apparatus for inspecting target defects on a wafer Sep. 16, 2008
7426023 Method and apparatus for detecting defects Sep. 16, 2008
7425719 Method and apparatus for selectively providing data from a test head to a processor Sep. 16, 2008
7425704 Inspection method and apparatus using an electron beam Sep. 16, 2008
7423746 Circuit-pattern inspecting apparatus and method Sep. 9, 2008
7423744 Method for marking defect and device therefor Sep. 9, 2008
7420668 Wafer surface inspection apparatus and wafer surface inspection method Sep. 2, 2008
7417724 Wafer inspection systems and methods for analyzing inspection data Aug. 26, 2008
7417723 Method of inspecting a semiconductor device and an apparatus thereof Aug. 26, 2008
7417722 System and method for controlling light scattered from a workpiece surface in a surface inspection system Aug. 26, 2008
7417721 Defect detector and defect detecting method Aug. 26, 2008
7417720 Lighting optical machine and defect inspection system Aug. 26, 2008
7417719 Method, device and software for the optical inspection of a semi-conductor substrate Aug. 26, 2008
7417244 Surface inspection apparatus and method thereof Aug. 26, 2008
7414715 Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation Aug. 19, 2008
7408633 Apparatus and method for inspecting film defect Aug. 5, 2008
7403279 Information recording medium examining apparatus and method Jul. 22, 2008
7403278 Surface inspection apparatus and surface inspection method Jul. 22, 2008
7400402 Modulated scatterometry Jul. 15, 2008
7400393 Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen Jul. 15, 2008
7400391 System and method for detection of spatial signature yield loss Jul. 15, 2008
7400390 Inspection system and a method for aerial reticle inspection Jul. 15, 2008
7397560 Surface contamination detection Jul. 8, 2008
7397554 Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage Jul. 8, 2008
7397553 Surface scanning Jul. 8, 2008
7397552 Optical inspection with alternating configurations Jul. 8, 2008
7394554 Selecting a hypothetical profile to use in optical metrology Jul. 1, 2008
7394535 Optical metrology using a photonic nanojet Jul. 1, 2008
7394533 Manufacture defect analyzer with detecting function and inspecting method thereof Jul. 1, 2008

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