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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7528943 Method and apparatus for simultaneous high-speed acquisition of multiple images May. 5, 2009
7528942 Method and apparatus for detecting defects May. 5, 2009
7528941 Order selected overlay metrology May. 5, 2009
7528940 System and method for inspecting an object using an acousto-optic device May. 5, 2009
7525651 Inspection apparatus and inspection method for pattern profile, and exposure apparatus Apr. 28, 2009
7525634 Monitoring apparatus and method particularly useful in photolithographically Apr. 28, 2009
7522275 High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Apr. 21, 2009
7518717 Exposure apparatus and a device manufacturing method using the same Apr. 14, 2009
7515258 Semiconductor device, and method and apparatus for inspecting appearance thereof Apr. 7, 2009
7511806 Apparatus and method for inspecting defects Mar. 31, 2009
7508504 Automatic wafer edge inspection and review system Mar. 24, 2009
7505147 Efficient calculation of grating matrix elements for 2-D diffraction Mar. 17, 2009
7505125 System and method for signal processing for a workpiece surface inspection system Mar. 17, 2009
7502104 Probe beam profile modulated optical reflectance system and methods Mar. 10, 2009
7502103 Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Mar. 10, 2009
7502102 System and method of imaging the characteristics of an object Mar. 10, 2009
7502101 Apparatus and method for enhanced critical dimension scatterometry Mar. 10, 2009
7499812 Method for locating flaws, and a marking system Mar. 3, 2009
7495757 Semiconductor manufacturing apparatus and wafer processing method Feb. 24, 2009
7495756 Pattern inspection apparatus Feb. 24, 2009
7492452 Defect inspection method and system Feb. 17, 2009
7492451 Simultaneous multi-spot inspection and imaging Feb. 17, 2009
7492450 Methods and apparatus for inspecting an object Feb. 17, 2009
7489395 Method and apparatus for inspecting pattern defects Feb. 10, 2009
7489394 Apparatus for inspecting a disk-like object Feb. 10, 2009
7489393 Enhanced simultaneous multi-spot inspection and imaging Feb. 10, 2009
7489392 Systems and methods for using light to indicate inconsistency locations on a composite structure Feb. 10, 2009
7487049 Surface inspection method and surface inspection apparatus Feb. 3, 2009
7486393 Multiple beam inspection apparatus and method Feb. 3, 2009
7486392 Method of inspecting for defects and apparatus for performing the method Feb. 3, 2009
7483128 Foreign matter inspection apparatus and method Jan. 27, 2009
7480050 Lithographic system, sensor, and method of measuring properties of a substrate Jan. 20, 2009
7480039 Multi mode inspection method and apparatus Jan. 20, 2009
7480038 Illumination device for product examination via pulsed illumination Jan. 20, 2009
7480037 System for projecting flaws and inspection locations and associated method Jan. 20, 2009
7477372 Optical scanning system for surface inspection Jan. 13, 2009
7477371 Process and assembly for non-destructive surface inspections Jan. 13, 2009
7477370 Method of detecting incomplete edge bead removal from a disk-like object Jan. 13, 2009
7475600 Method of and apparatus for evaluating elastic member quality Jan. 13, 2009
7474394 Apparatus of inspecting defect in semiconductor and method of the same Jan. 6, 2009
7466403 Grain angle sensor Dec. 16, 2008
7463352 Method and apparatus for article inspection including speckle reduction Dec. 9, 2008
7463349 Systems and methods for determining a characteristic of a specimen Dec. 9, 2008
7463348 Rail vehicle mounted rail measurement system Dec. 9, 2008
7462814 Methods and systems for lithography process control Dec. 9, 2008
7460962 Method for an automatic optical measuring of an OPC structure Dec. 2, 2008
7460220 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected Dec. 2, 2008
7460219 Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially Dec. 2, 2008
7460218 Device and method for determining the properties of surfaces Dec. 2, 2008
7460216 Surface strain measuring device Dec. 2, 2008

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