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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.










Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034


Patents under this class:
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Patent Number Title Of Patent Date Issued
7599053 Pattern defect inspection method, photomask manufacturing method, and display device substrate manufacturing method Oct. 6, 2009
7599052 Method for marking defect and device therefor Oct. 6, 2009
7599051 Calibration of a substrate inspection tool Oct. 6, 2009
7599050 Surface defect inspecting method and device Oct. 6, 2009
7593099 Method and device for configuration examination Sep. 22, 2009
7589835 High speed laser scanning inspection system Sep. 15, 2009
7589833 Foreign matter inspection apparatus and foreign matter inspection method Sep. 15, 2009
7589832 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device method Sep. 15, 2009
7586607 Polarization imaging Sep. 8, 2009
7586605 Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization state Sep. 8, 2009
7586598 Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Sep. 8, 2009
7586597 Detection of seed layers on a semiconductor device Sep. 8, 2009
7586596 Field folding optical method for imaging system Sep. 8, 2009
7586595 Method of scanning and scanning apparatus Sep. 8, 2009
7586594 Method for inspecting defect and apparatus for inspecting defect Sep. 8, 2009
7583376 Method and device for examination of nonuniformity defects of patterns Sep. 1, 2009
7580131 Angularly resolved scatterometer and inspection method Aug. 25, 2009
7580124 Dual stage defect region identification and defect detection method and apparatus Aug. 25, 2009
7576852 Semiconductor wafer inspection device and method Aug. 18, 2009
7576850 In-process vision detection of flaws and FOD by back field illumination Aug. 18, 2009
7576348 One-dimensional phase contrast microscopy with a traveling lens generated by a step function change Aug. 18, 2009
7573569 System for 2-D and 3-D vision inspection Aug. 11, 2009
7573568 Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process Aug. 11, 2009
7570369 Method and a device for measurement of edges Aug. 4, 2009
7570354 Image intensification for low light inspection Aug. 4, 2009
7570353 Fabrication and test methods and systems Aug. 4, 2009
7567351 High resolution monitoring of CD variations Jul. 28, 2009
7567344 Apparatus and method for characterizing defects in a transparent substrate Jul. 28, 2009
7567343 Method and apparatus for detecting defects on a wafer Jul. 28, 2009
7564544 Method and system for inspecting surfaces with improved light efficiency Jul. 21, 2009
7563329 Monitoring of cleaning process Jul. 21, 2009
7557912 Defect inspection apparatus and defect inspection method Jul. 7, 2009
7557911 Appearance inspection apparatus Jul. 7, 2009
7557910 System and method for controlling a beam source in a workpiece surface inspection system Jul. 7, 2009
7557326 Laser joining head assembly and laser joining method Jul. 7, 2009
7554656 Methods and systems for inspection of a wafer Jun. 30, 2009
7554654 Surface characteristic analysis Jun. 30, 2009
7553449 Method of determination of corrosion rate Jun. 30, 2009
7551273 Mask defect inspection apparatus Jun. 23, 2009
7551272 Method and an apparatus for simultaneous 2D and 3D optical inspection and acquisition of optical inspection data of an object Jun. 23, 2009
7548309 Inspection apparatus, inspection method, and manufacturing method of pattern substrate Jun. 16, 2009
7548308 Illumination energy management in surface inspection Jun. 16, 2009
7538866 Optical sensor and method for optically inspecting surfaces May. 26, 2009
7538334 Devices and methods for targeting printing plates and measuring dot coverage thereon May. 26, 2009
7535562 Apparatus and method for defect inspection May. 19, 2009
7535561 Defect inspecting apparatus May. 19, 2009
7532328 Circuit-pattern inspection apparatus May. 12, 2009
7532318 Wafer edge inspection May. 12, 2009
7532317 Scatterometry method with characteristic signatures matching May. 12, 2009
7528944 Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool May. 5, 2009

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