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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619728 |
Methods and systems for in-situ machinery inspection |
Nov. 17, 2009 |
| 7616299 |
Surface inspection method and surface inspection apparatus |
Nov. 10, 2009 |
| 7616300 |
Edge flaw detection device |
Nov. 10, 2009 |
| 7609373 |
Reducing variations in energy reflected from a sample due to thin film interference |
Oct. 27, 2009 |
| 7605913 |
System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece |
Oct. 20, 2009 |
| 7605915 |
System and method to create haze standard |
Oct. 20, 2009 |
| 7602481 |
Method and apparatus for inspecting a surface |
Oct. 13, 2009 |
| 7599054 |
Pattern inspection apparatus |
Oct. 6, 2009 |
| 7599075 |
Automatic optical inspection using multiple objectives |
Oct. 6, 2009 |
| 7599052 |
Method for marking defect and device therefor |
Oct. 6, 2009 |
| 7599051 |
Calibration of a substrate inspection tool |
Oct. 6, 2009 |
| 7599050 |
Surface defect inspecting method and device |
Oct. 6, 2009 |
| 7599053 |
Pattern defect inspection method, photomask manufacturing method, and display device substrate manufacturing method |
Oct. 6, 2009 |
| 7593099 |
Method and device for configuration examination |
Sep. 22, 2009 |
| 7589835 |
High speed laser scanning inspection system |
Sep. 15, 2009 |
| 7589833 |
Foreign matter inspection apparatus and foreign matter inspection method |
Sep. 15, 2009 |
| 7589832 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device method |
Sep. 15, 2009 |
| 7586607 |
Polarization imaging |
Sep. 8, 2009 |
| 7586605 |
Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization state |
Sep. 8, 2009 |
| 7586597 |
Detection of seed layers on a semiconductor device |
Sep. 8, 2009 |
| 7586596 |
Field folding optical method for imaging system |
Sep. 8, 2009 |
| 7586595 |
Method of scanning and scanning apparatus |
Sep. 8, 2009 |
| 7586594 |
Method for inspecting defect and apparatus for inspecting defect |
Sep. 8, 2009 |
| 7586598 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
Sep. 8, 2009 |
| 7583376 |
Method and device for examination of nonuniformity defects of patterns |
Sep. 1, 2009 |
| 7580131 |
Angularly resolved scatterometer and inspection method |
Aug. 25, 2009 |
| 7580124 |
Dual stage defect region identification and defect detection method and apparatus |
Aug. 25, 2009 |
| 7576348 |
One-dimensional phase contrast microscopy with a traveling lens generated by a step function change |
Aug. 18, 2009 |
| 7576850 |
In-process vision detection of flaws and FOD by back field illumination |
Aug. 18, 2009 |
| 7576852 |
Semiconductor wafer inspection device and method |
Aug. 18, 2009 |
| 7573569 |
System for 2-D and 3-D vision inspection |
Aug. 11, 2009 |
| 7573568 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process |
Aug. 11, 2009 |
| 7570353 |
Fabrication and test methods and systems |
Aug. 4, 2009 |
| 7570354 |
Image intensification for low light inspection |
Aug. 4, 2009 |
| 7570369 |
Method and a device for measurement of edges |
Aug. 4, 2009 |
| 7567344 |
Apparatus and method for characterizing defects in a transparent substrate |
Jul. 28, 2009 |
| 7567343 |
Method and apparatus for detecting defects on a wafer |
Jul. 28, 2009 |
| 7567351 |
High resolution monitoring of CD variations |
Jul. 28, 2009 |
| 7564544 |
Method and system for inspecting surfaces with improved light efficiency |
Jul. 21, 2009 |
| 7563329 |
Monitoring of cleaning process |
Jul. 21, 2009 |
| 7557912 |
Defect inspection apparatus and defect inspection method |
Jul. 7, 2009 |
| 7557911 |
Appearance inspection apparatus |
Jul. 7, 2009 |
| 7557326 |
Laser joining head assembly and laser joining method |
Jul. 7, 2009 |
| 7557910 |
System and method for controlling a beam source in a workpiece surface inspection system |
Jul. 7, 2009 |
| 7554656 |
Methods and systems for inspection of a wafer |
Jun. 30, 2009 |
| 7553449 |
Method of determination of corrosion rate |
Jun. 30, 2009 |
| 7554654 |
Surface characteristic analysis |
Jun. 30, 2009 |
| 7551272 |
Method and an apparatus for simultaneous 2D and 3D optical inspection and acquisition of optical inspection data of an object |
Jun. 23, 2009 |
| 7551273 |
Mask defect inspection apparatus |
Jun. 23, 2009 |
| 7548308 |
Illumination energy management in surface inspection |
Jun. 16, 2009 |
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