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Class Information
Number: 356/237.2
Name: Optics: measuring and testing > Inspection of flaws or impurities > Surface condition
Description: Inspection of imperfections or impurities wherein the exterior or interior veneer of an article is examined.

Sub-classes under this class:

Class Number Class Name Patents
356/237.3 Detection of object or particle on surface 358
356/237.5 On patterned or topographical surface (e.g., wafer, mask, circuit board) 1,034

Patents under this class:

Patent Number Title Of Patent Date Issued
8711347 Defect inspection method and device therefor Apr. 29, 2014
8711346 Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks Apr. 29, 2014
8705026 Inspection apparatus Apr. 22, 2014
8687182 Surface inspection apparatus and surface inspection method Apr. 1, 2014
8681328 Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus Mar. 25, 2014
8670116 Method and device for inspecting for defects Mar. 11, 2014
8665430 Exposure condition determining method and surface inspection apparatus Mar. 4, 2014
8659754 Inspection system and method for fast changes of focus Feb. 25, 2014
8654325 Substrate processing apparatus, substrate processing method, and computer-readable storage medium having program for executing the substrate processing method stored therein Feb. 18, 2014
8654324 Device and method for inspecting semiconductor wafers Feb. 18, 2014
8643835 Active planar autofocus Feb. 4, 2014
8643834 Apparatus of inspecting defect in semiconductor and method of the same Feb. 4, 2014
8643833 System for inspecting surface defects of a specimen and a method thereof Feb. 4, 2014
8638429 Defect inspecting method and defect inspecting apparatus Jan. 28, 2014
8634070 Method and apparatus for optically inspecting a magnetic disk Jan. 21, 2014
8629411 Photoluminescence spectroscopy Jan. 14, 2014
8629407 Contamination inspection Jan. 14, 2014
8625089 Foreign matter inspection apparatus and foreign matter inspection method Jan. 7, 2014
8615125 Apparatus and method for inspecting surface state Dec. 24, 2013
8605276 Enhanced defect scanning Dec. 10, 2013
8605275 Detecting defects on a wafer Dec. 10, 2013
8605272 Tool, tool set and method of setting the pitch of the blades of a model propeller Dec. 10, 2013
8605146 Apparatus for optically inspecting an at least partially reflecting surface of an object Dec. 10, 2013
8599369 Defect inspection device and inspection method Dec. 3, 2013
8598557 Method and apparatus for providing patterned illumination fields for machine vision systems Dec. 3, 2013
8593625 Examining apparatus and examining method Nov. 26, 2013
8577119 Wafer surface observing method and apparatus Nov. 5, 2013
8577117 Evaluating soiling of a media item Nov. 5, 2013
8576392 Multiplexed optical fiber crack sensor Nov. 5, 2013
8570614 Determining maintenance conditions in a document scanner Oct. 29, 2013
8570516 Infrared direct illumination machine vision technique for semiconductor processing equipment Oct. 29, 2013
8570506 System for inspecting defects of panel device Oct. 29, 2013
8559000 Method of inspecting a semiconductor device and an apparatus thereof Oct. 15, 2013
8558999 Defect inspection apparatus and method utilizing multiple inspection conditions Oct. 15, 2013
8558565 Wide area soft defect localization Oct. 15, 2013
8553215 Back quartersphere scattered light analysis Oct. 8, 2013
8547547 Optical surface defect inspection apparatus and optical surface defect inspection method Oct. 1, 2013
8547545 Method and apparatus for inspecting a surface of a substrate Oct. 1, 2013
8542354 Inspection apparatus Sep. 24, 2013
8537350 Inspecting a workpiece using scattered light Sep. 17, 2013
8537349 Monitoring of time-varying defect classification performance Sep. 17, 2013
8532949 Computer-implemented methods and systems for classifying defects on a specimen Sep. 10, 2013
8532364 Apparatus and method for detecting defects in wafer manufacturing Sep. 10, 2013
8526705 Driven scanning alignment for complex shapes Sep. 3, 2013
8525984 Inspection apparatus and inspection method Sep. 3, 2013
8521445 Corrosion rate monitoring Aug. 27, 2013
8520208 Segmented polarizer for optimizing performance of a surface inspection system Aug. 27, 2013
8520200 Advanced inspection method utilizing short pulses LED illumination Aug. 27, 2013
8514390 Optical equipment and registration method Aug. 20, 2013
8514389 Inspecting apparatus, three-dimensional profile measuring apparatus, and manufacturing method of structure Aug. 20, 2013

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