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Class Information
Number: 355/73
Name: Photocopying > Projection printing and copying cameras > Detailed holder for photosensitive paper > Including vacuum or fluid pressure
Description: Subject matter wherein the photos:graphic paper is held by air or atmospheric pressure caused either by forming a partial vacuum on one side of the paper or by blowing air against the paper.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7463347 |
Simulator of optical intensity distribution, computer implemented method for simulating the optical intensity distribution, method for collecting mask pattern, and computer program product for |
Dec. 9, 2008 |
| 7461933 |
Sheet heater assembly having air bearing platelets |
Dec. 9, 2008 |
| 7413586 |
In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles |
Aug. 19, 2008 |
| 7384036 |
Sheet handling device for wide format sheets |
Jun. 10, 2008 |
| 7327438 |
Lithographic apparatus and method of a manufacturing device |
Feb. 5, 2008 |
| 7307697 |
Adaptive shape substrate support system |
Dec. 11, 2007 |
| 7230681 |
Method and apparatus for immersion lithography |
Jun. 12, 2007 |
| 7227619 |
Lithographic apparatus and device manufacturing method |
Jun. 5, 2007 |
| 7224443 |
Imprint lithography substrate processing tool for modulating shapes of substrates |
May. 29, 2007 |
| 7158211 |
Lithographic apparatus and device manufacturing method |
Jan. 2, 2007 |
| 7145642 |
Wafer support device and a wafer support method |
Dec. 5, 2006 |
| 7110085 |
Lithographic apparatus, substrate holder and method of manufacturing |
Sep. 19, 2006 |
| 7041989 |
Lithographic apparatus and device manufacturing method |
May. 9, 2006 |
| 7034924 |
Lithographic apparatus and device manufacturing method |
Apr. 25, 2006 |
| 7019819 |
Chucking system for modulating shapes of substrates |
Mar. 28, 2006 |
| 7006201 |
Photosensitive tabular member suction mechanism and image recording device |
Feb. 28, 2006 |
| 6980282 |
Method for modulating shapes of substrates |
Dec. 27, 2005 |
| 6954009 |
Positioning apparatus |
Oct. 11, 2005 |
| 6947701 |
Image forming apparatus and image forming method |
Sep. 20, 2005 |
| 6927841 |
Holddown device for hardcopy apparatus |
Aug. 9, 2005 |
| 6903808 |
Alignable low-profile substrate chuck for large-area projection lithography |
Jun. 7, 2005 |
| 6888620 |
System and method for holding a device with minimal deformation |
May. 3, 2005 |
| 6864962 |
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same |
Mar. 8, 2005 |
| 6864955 |
Stage apparatus, exposure apparatus and method for exposing substrate plate |
Mar. 8, 2005 |
| 6836316 |
Substrate holding apparatus and exposure apparatus using the same |
Dec. 28, 2004 |
| 6809799 |
Processing system and device manufacturing method using the same |
Oct. 26, 2004 |
| 6806945 |
Automatic exposing apparatus and method for exposing both sides of works |
Oct. 19, 2004 |
| 6721035 |
Lithographic projection apparatus |
Apr. 13, 2004 |
| 6720115 |
Exposure method and exposure apparatus using near-field light and exposure mask |
Apr. 13, 2004 |
| 6714277 |
Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method |
Mar. 30, 2004 |
| 6703179 |
Transfer of organic material from a donor to form a layer in an OLED device |
Mar. 9, 2004 |
| 6674085 |
Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems |
Jan. 6, 2004 |
| 6662725 |
Positioning method and positioning device for positioning printing plate relative to surface plate |
Dec. 16, 2003 |
| 6664549 |
Wafer chuck, exposure system, and method of manufacturing semiconductor device |
Dec. 16, 2003 |
| 6642996 |
Exposure apparatus |
Nov. 4, 2003 |
| 6597432 |
Board-stage for an aligner |
Jul. 22, 2003 |
| 6590633 |
Stage apparatus and method for producing circuit device utilizing the same |
Jul. 8, 2003 |
| 6583858 |
Substrate holder for lithographic apparatus |
Jun. 24, 2003 |
| 6556281 |
Flexible piezoelectric chuck and method of using the same |
Apr. 29, 2003 |
| 6549264 |
Extreme-UV lithography vacuum chamber zone seal |
Apr. 15, 2003 |
| 6545745 |
Extreme-UV lithography vacuum chamber zone seal |
Apr. 8, 2003 |
| 6496249 |
Exposure apparatus |
Dec. 17, 2002 |
| 6480260 |
Mask clamping apparatus, e.g. for a lithographic apparatus |
Nov. 12, 2002 |
| 6473161 |
Lithographic projection apparatus, supporting assembly and device manufacturing method |
Oct. 29, 2002 |
| 6450496 |
Variable cross-section vacuum grooves in an external drum imaging system |
Sep. 17, 2002 |
| 6386536 |
Hardcopy apparatus and method for loading media |
May. 14, 2002 |
| 6338580 |
Film support and feed system of a camera |
Jan. 15, 2002 |
| 6326121 |
Thermal transfer material and laser thermal transfer recording method |
Dec. 4, 2001 |
| 6307620 |
Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding section |
Oct. 23, 2001 |
| 6307616 |
Exposure apparatus and substrate handling system therefor |
Oct. 23, 2001 |
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