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Class Information
Number: 355/69
Name: Photocopying > Projection printing and copying cameras > Illumination systems or details > Electricity to lamp controlled
Description: Subject matter wherein the light flux given off by the lamp is controlled by varying the voltage applied to the lamp or wherein the time interval during which the lamp is on is variable by interrupting the electricity thereto, usually according to the light transmitting or reflecting quality of the original; or wherein a light switch is set forth to control the electricity to the lamp.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612868 |
Exposure apparatus and method of manufacturing device |
Nov. 3, 2009 |
| 7595863 |
Lithographic apparatus, excimer laser and device manufacturing method |
Sep. 29, 2009 |
| 7583362 |
Stray light feedback for dose control in semiconductor lithography systems |
Sep. 1, 2009 |
| 7564535 |
Seamless exposure with projection system comprises array of micromirrors with predefined reflectivity variations |
Jul. 21, 2009 |
| 7561253 |
Method for a multiple exposure, microlithography projection exposure installation and a projection system |
Jul. 14, 2009 |
| 7561252 |
Interferometric lithography system and method used to generate equal path lengths of interfering beams |
Jul. 14, 2009 |
| 7548302 |
Lithographic apparatus and device manufacturing method |
Jun. 16, 2009 |
| 7541601 |
Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
Jun. 2, 2009 |
| 7534552 |
Lithographic apparatus and device manufacturing method |
May. 19, 2009 |
| 7525641 |
System and method for uniformity correction |
Apr. 28, 2009 |
| 7522264 |
Projection exposure apparatus, device manufacturing method, and sensor unit |
Apr. 21, 2009 |
| 7522265 |
Optical aligner using a compensation light |
Apr. 21, 2009 |
| 7508492 |
Surface light source control apparatus and surface light source control method |
Mar. 24, 2009 |
| 7508493 |
Exposure apparatus and device manufacturing method |
Mar. 24, 2009 |
| 7499147 |
Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly |
Mar. 3, 2009 |
| 7486383 |
Direct exposure apparatus and direct exposure method |
Feb. 3, 2009 |
| 7483804 |
Method of real time dynamic CD control |
Jan. 27, 2009 |
| 7480030 |
Method and device for lithography by extreme ultraviolet radiation |
Jan. 20, 2009 |
| 7477356 |
Exposure apparatus |
Jan. 13, 2009 |
| 7456934 |
Exposure apparatus and device manufacturing method |
Nov. 25, 2008 |
| 7453551 |
Increasing pulse-to-pulse radiation beam uniformity |
Nov. 18, 2008 |
| 7443486 |
Method for predicting a critical dimension of a feature imaged by a lithographic apparatus |
Oct. 28, 2008 |
| 7423729 |
Method of monitoring the light integrator of a photolithography system |
Sep. 9, 2008 |
| 7423730 |
Lithographic apparatus |
Sep. 9, 2008 |
| 7408616 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method |
Aug. 5, 2008 |
| 7403266 |
Maskless lithography systems and methods utilizing spatial light modulator arrays |
Jul. 22, 2008 |
| 7382438 |
Lithographic apparatus and device manufacturing method |
Jun. 3, 2008 |
| 7369216 |
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for |
May. 6, 2008 |
| 7365862 |
Methods and apparatus for inspecting an object |
Apr. 29, 2008 |
| 7362416 |
Exposure apparatus, evaluation method and device fabrication method |
Apr. 22, 2008 |
| 7345740 |
Polarized radiation in lithographic apparatus and device manufacturing method |
Mar. 18, 2008 |
| 7342644 |
Methods and systems for lithographic beam generation |
Mar. 11, 2008 |
| 7333176 |
De-focus uniformity correction |
Feb. 19, 2008 |
| 7327436 |
Method for evaluating a local flare, correction method for a mask pattern, manufacturing method for a semiconductor device and a computer program product |
Feb. 5, 2008 |
| 7326945 |
Dose transfer standard detector for a lithography tool |
Feb. 5, 2008 |
| 7317506 |
Variable illumination source |
Jan. 8, 2008 |
| 7315353 |
Apodization measurement for lithographic apparatus |
Jan. 1, 2008 |
| 7312852 |
Polarized radiation in lithographic apparatus and device manufacturing method |
Dec. 25, 2007 |
| 7307694 |
Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method |
Dec. 11, 2007 |
| 7297911 |
Lithographic apparatus, illumination system, illumination controller and control method |
Nov. 20, 2007 |
| 7298546 |
Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source |
Nov. 20, 2007 |
| 7292314 |
Exposure device with spatial light modulator and neutral density filters |
Nov. 6, 2007 |
| 7283208 |
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
Oct. 16, 2007 |
| 7276710 |
Light source unit and exposure apparatus having the same |
Oct. 2, 2007 |
| 7256868 |
Projection exposure apparatus, device manufacturing method, and sensor unit |
Aug. 14, 2007 |
| 7251012 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris |
Jul. 31, 2007 |
| 7248338 |
Multi beam exposing device and exposing method using the same |
Jul. 24, 2007 |
| 7239374 |
Light application apparatus, crystallization apparatus and optical modulation element assembly |
Jul. 3, 2007 |
| 7236231 |
Exposure apparatus and device manufacturing method |
Jun. 26, 2007 |
| 7221430 |
Lithographic apparatus and device manufacturing method |
May. 22, 2007 |
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