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Class Information
Number: 355/69
Name: Photocopying > Projection printing and copying cameras > Illumination systems or details > Electricity to lamp controlled
Description: Subject matter wherein the light flux given off by the lamp is controlled by varying the voltage applied to the lamp or wherein the time interval during which the lamp is on is variable by interrupting the electricity thereto, usually according to the light transmitting or reflecting quality of the original; or wherein a light switch is set forth to control the electricity to the lamp.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8619258 Lithographic apparatus and device manufacturing method Dec. 31, 2013
8525134 Lithography system Sep. 3, 2013
8493548 Lithographic apparatus and device manufacturing method Jul. 23, 2013
8451429 Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor May. 28, 2013
8432533 Method and system for photolithographic fabrication with resolution far below the diffraction limit Apr. 30, 2013
8390787 Lithographic apparatus and device manufacturing method Mar. 5, 2013
8330937 Stray light feedback for dose control in semiconductor lithography systems Dec. 11, 2012
8253926 Exposure device Aug. 28, 2012
8169595 Optical apparatus and method for modifying the imaging behavior of such apparatus May. 1, 2012
8139201 Exposure apparatus and method of manufacturing device Mar. 20, 2012
8085383 System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module Dec. 27, 2011
8035798 Lithographic apparatus and device manufacturing method Oct. 11, 2011
8014881 Lithographic apparatus and device manufacturing method Sep. 6, 2011
7991281 Illumination source having programmable rise and fall times Aug. 2, 2011
7973909 Method and apparatus for using a synchrotron as a source in extreme ultraviolet lithography Jul. 5, 2011
7965380 Lithographic apparatus and device manufacturing method Jun. 21, 2011
7907255 Lithographic apparatus and device manufacturing method Mar. 15, 2011
7868999 Lithographic apparatus, source, source controller and control method Jan. 11, 2011
7864308 Position detection method, exposure apparatus, and device manufacturing method Jan. 4, 2011
7826036 Scanning exposure apparatus and method of manufacturing device Nov. 2, 2010
7812928 Exposure apparatus Oct. 12, 2010
7795601 Method and apparatus to improve lithography throughput Sep. 14, 2010
7760328 Exposure apparatus and exposing method and method of manufacturing a printed wiring board Jul. 20, 2010
7751031 Light application apparatus, crystallization apparatus and optical modulation element assembly Jul. 6, 2010
7728955 Lithographic apparatus, radiation supply and device manufacturing method Jun. 1, 2010
7701555 Exposure apparatus, exposure method, device manufacturing method, and system Apr. 20, 2010
7687205 Photolithographic method and apparatus employing a polychromatic mask Mar. 30, 2010
7663733 Method of illuminating at least two illumination points Feb. 16, 2010
7633599 Apparatuses and methods for changing an intensity distribution of light within an illumination field without distorting the telecentricity of the light Dec. 15, 2009
7612868 Exposure apparatus and method of manufacturing device Nov. 3, 2009
7595863 Lithographic apparatus, excimer laser and device manufacturing method Sep. 29, 2009
7583362 Stray light feedback for dose control in semiconductor lithography systems Sep. 1, 2009
7564535 Seamless exposure with projection system comprises array of micromirrors with predefined reflectivity variations Jul. 21, 2009
7561252 Interferometric lithography system and method used to generate equal path lengths of interfering beams Jul. 14, 2009
7561253 Method for a multiple exposure, microlithography projection exposure installation and a projection system Jul. 14, 2009
7548302 Lithographic apparatus and device manufacturing method Jun. 16, 2009
7541601 Ion beam irradiating apparatus and method of adjusting uniformity of a beam Jun. 2, 2009
7534552 Lithographic apparatus and device manufacturing method May. 19, 2009
7525641 System and method for uniformity correction Apr. 28, 2009
7522265 Optical aligner using a compensation light Apr. 21, 2009
7522264 Projection exposure apparatus, device manufacturing method, and sensor unit Apr. 21, 2009
7508493 Exposure apparatus and device manufacturing method Mar. 24, 2009
7508492 Surface light source control apparatus and surface light source control method Mar. 24, 2009
7499147 Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly Mar. 3, 2009
7486383 Direct exposure apparatus and direct exposure method Feb. 3, 2009
7483804 Method of real time dynamic CD control Jan. 27, 2009
7480030 Method and device for lithography by extreme ultraviolet radiation Jan. 20, 2009
7477356 Exposure apparatus Jan. 13, 2009
7456934 Exposure apparatus and device manufacturing method Nov. 25, 2008
7453551 Increasing pulse-to-pulse radiation beam uniformity Nov. 18, 2008

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