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Class Information
Number: 355/69
Name: Photocopying > Projection printing and copying cameras > Illumination systems or details > Electricity to lamp controlled
Description: Subject matter wherein the light flux given off by the lamp is controlled by varying the voltage applied to the lamp or wherein the time interval during which the lamp is on is variable by interrupting the electricity thereto, usually according to the light transmitting or reflecting quality of the original; or wherein a light switch is set forth to control the electricity to the lamp.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7382438 |
Lithographic apparatus and device manufacturing method |
Jun. 3, 2008 |
| 7369216 |
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for |
May. 6, 2008 |
| 7365862 |
Methods and apparatus for inspecting an object |
Apr. 29, 2008 |
| 7362416 |
Exposure apparatus, evaluation method and device fabrication method |
Apr. 22, 2008 |
| 7345740 |
Polarized radiation in lithographic apparatus and device manufacturing method |
Mar. 18, 2008 |
| 7342644 |
Methods and systems for lithographic beam generation |
Mar. 11, 2008 |
| 7333176 |
De-focus uniformity correction |
Feb. 19, 2008 |
| 7327436 |
Method for evaluating a local flare, correction method for a mask pattern, manufacturing method for a semiconductor device and a computer program product |
Feb. 5, 2008 |
| 7326945 |
Dose transfer standard detector for a lithography tool |
Feb. 5, 2008 |
| 7317506 |
Variable illumination source |
Jan. 8, 2008 |
| 7315353 |
Apodization measurement for lithographic apparatus |
Jan. 1, 2008 |
| 7312852 |
Polarized radiation in lithographic apparatus and device manufacturing method |
Dec. 25, 2007 |
| 7307694 |
Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method |
Dec. 11, 2007 |
| 7297911 |
Lithographic apparatus, illumination system, illumination controller and control method |
Nov. 20, 2007 |
| 7298546 |
Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source |
Nov. 20, 2007 |
| 7292314 |
Exposure device with spatial light modulator and neutral density filters |
Nov. 6, 2007 |
| 7283208 |
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
Oct. 16, 2007 |
| 7276710 |
Light source unit and exposure apparatus having the same |
Oct. 2, 2007 |
| 7256868 |
Projection exposure apparatus, device manufacturing method, and sensor unit |
Aug. 14, 2007 |
| 7251012 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris |
Jul. 31, 2007 |
| 7248338 |
Multi beam exposing device and exposing method using the same |
Jul. 24, 2007 |
| 7239374 |
Light application apparatus, crystallization apparatus and optical modulation element assembly |
Jul. 3, 2007 |
| 7236231 |
Exposure apparatus and device manufacturing method |
Jun. 26, 2007 |
| 7221430 |
Lithographic apparatus and device manufacturing method |
May. 22, 2007 |
| 7212276 |
Exposure apparatus |
May. 1, 2007 |
| 7202939 |
Lithographic apparatus and device manufacturing method |
Apr. 10, 2007 |
| 7199863 |
Method of imaging using lithographic projection apparatus |
Apr. 3, 2007 |
| 7199861 |
Lithographic apparatus and device manufacturing method |
Apr. 3, 2007 |
| 7196774 |
Lithography device |
Mar. 27, 2007 |
| 7193686 |
Lithography apparatus and method for measuring alignment mark |
Mar. 20, 2007 |
| 7190437 |
Wireless signaling in a lithographic apparatus |
Mar. 13, 2007 |
| 7187431 |
Lithographic apparatus, method of determining properties thereof and computer program |
Mar. 6, 2007 |
| 7177010 |
Lithographic apparatus and device manufacturing method |
Feb. 13, 2007 |
| 7177012 |
Lithographic apparatus and device manufacturing method |
Feb. 13, 2007 |
| 7177008 |
Exposure apparatus and method |
Feb. 13, 2007 |
| 7173688 |
Method for calculating an intensity integral for use in lithography systems |
Feb. 6, 2007 |
| 7170584 |
Lithographic apparatus and device manufacturing method |
Jan. 30, 2007 |
| 7161660 |
Photolithography system and method of monitoring the same |
Jan. 9, 2007 |
| 7161661 |
Lithographic apparatus and device manufacturing method |
Jan. 9, 2007 |
| 7145640 |
Lithographic apparatus, device manufacturing method and variable attenuator |
Dec. 5, 2006 |
| 7142283 |
Exposure apparatus |
Nov. 28, 2006 |
| 7136141 |
Lithographic apparatus with debris suppression, and device manufacturing method |
Nov. 14, 2006 |
| 7130022 |
Methods and systems for controlling radiation beam characteristics for microlithographic processing |
Oct. 31, 2006 |
| 7126673 |
Illumination optical system and exposure apparatus having the same |
Oct. 24, 2006 |
| 7123348 |
Lithographic apparatus and method utilizing dose control |
Oct. 17, 2006 |
| 7123347 |
Image formation characteristics adjustment method for projection optical system |
Oct. 17, 2006 |
| 7119883 |
Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light |
Oct. 10, 2006 |
| 7098992 |
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device |
Aug. 29, 2006 |
| 7092072 |
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus |
Aug. 15, 2006 |
| 7088427 |
Apparatus and method for high resolution in-situ illumination source measurement in projection imaging systems |
Aug. 8, 2006 |
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