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Class Information
Number: 355/68
Name: Photocopying > Projection printing and copying cameras > Illumination systems or details > Including photocell or phototube
Description: Subject matter including a photoelectric cell or photomultiplier tube and related electric circuitry to detect the intensity of light in some part of the optical path.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8705007 Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Apr. 22, 2014
8692978 Lithographic apparatus and device manufacturing method Apr. 8, 2014
8681313 Diffraction elements for alignment targets Mar. 25, 2014
8675175 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8634056 Lithographic apparatus and device manufacturing method Jan. 21, 2014
8634054 Particle detection on an object surface Jan. 21, 2014
8625076 Wafer edge exposure module Jan. 7, 2014
8605256 Multi-photon exposure system Dec. 10, 2013
8582079 Using phase difference of interference lithography for resolution enhancement Nov. 12, 2013
8563952 Charged particle beam writing apparatus Oct. 22, 2013
8547519 Lithographic apparatus and device manufacturing method Oct. 1, 2013
8537332 Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution Sep. 17, 2013
8538187 Defocus calibration module for light-sensing system and method thereof Sep. 17, 2013
8520189 Method and apparatus for maintaining depth of focus Aug. 27, 2013
8456613 Method and apparatus for quantification of illumination non-uniformity in the mask plane of a lithographic exposure system Jun. 4, 2013
8456617 Exposure method, exposure device, and micro device manufacturing method Jun. 4, 2013
8400618 Method for arranging an optical module in a measuring apparatus and a measuring apparatus Mar. 19, 2013
8400612 Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing device Mar. 19, 2013
8395755 Lithographic apparatus and device manufacturing method Mar. 12, 2013
8339577 Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Dec. 25, 2012
8325323 Method and system for correcting image changes Dec. 4, 2012
8305552 Exposure apparatus, exposure method, and method for producing device Nov. 6, 2012
8294875 Exposure apparatus and device fabrication method Oct. 23, 2012
8243259 Lithographic apparatus Aug. 14, 2012
8223316 Exposure apparatus and device manufacturing method Jul. 17, 2012
8208126 Exposure apparatus and device fabrication method Jun. 26, 2012
8184265 Correction method for non-uniform reticle heating in a lithographic apparatus May. 22, 2012
8139201 Exposure apparatus and method of manufacturing device Mar. 20, 2012
8134688 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method Mar. 13, 2012
8130366 Method for coarse wafer alignment in a lithographic apparatus Mar. 6, 2012
8102503 Exposure apparatus and method of manufacturing device Jan. 24, 2012
8102511 Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby Jan. 24, 2012
8081292 Exposure system and method of manufacturing a semiconductor device Dec. 20, 2011
8081294 Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure device Dec. 20, 2011
8068212 Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements Nov. 29, 2011
7990520 Microlithography illumination systems, components and methods Aug. 2, 2011
7991281 Illumination source having programmable rise and fall times Aug. 2, 2011
7936446 Exposure apparatus and device manufacturing method May. 3, 2011
7911585 Measurement apparatus, exposure apparatus, and device manufacturing method Mar. 22, 2011
7907255 Lithographic apparatus and device manufacturing method Mar. 15, 2011
7898646 Using an interferometer as a high speed variable attenuator Mar. 1, 2011
7880862 Exposure apparatus and device fabrication method Feb. 1, 2011
7737421 Electron beam exposure apparatus and method for cleaning the same Jun. 15, 2010
7709816 Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication May. 4, 2010
7696492 Radiation system and lithographic apparatus Apr. 13, 2010
7683300 Using an interferometer as a high speed variable attenuator Mar. 23, 2010
7679040 Optical control device Mar. 16, 2010
7595862 Exposure apparatus and method of manufacturing device Sep. 29, 2009
7580116 Exposure apparatus and device fabrication method Aug. 25, 2009
7541601 Ion beam irradiating apparatus and method of adjusting uniformity of a beam Jun. 2, 2009

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