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Class Information
Number: 355/66
Name: Photocopying > Projection printing and copying cameras > Reflector between original and photo-sensitive paper
Description: Subject matter including a mirror reflecting prism positioned between the object to be copied and the photosensitive paper to direct light along the optical path to the photosensitive paper.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8711331 Optical module for a microlithography objective including holding and supporting devices Apr. 29, 2014
8705170 High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations Apr. 22, 2014
8659744 Method for correcting a lithography projection objective, and such a projection objective Feb. 25, 2014
8654307 Scanning type exposure apparatus, method of manufacturing micro-apparatus, mask, projection optical apparatus, and method of manufacturing mask Feb. 18, 2014
8623588 Scanning EUV interference imaging for extremely high resolution patterning Jan. 7, 2014
8614785 Microlithography projection system with an accessible diaphragm or aperture stop Dec. 24, 2013
8610877 Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type Dec. 17, 2013
8610876 Reflective optical element, projection system, and projection exposure apparatus Dec. 17, 2013
8576375 Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus Nov. 5, 2013
8576376 Imaging optical system and projection exposure system for microlithography Nov. 5, 2013
8456612 Exposure apparatus and method of manufacturing device Jun. 4, 2013
8441613 Projection objective and projection exposure apparatus for microlithography May. 14, 2013
8384875 Exposure apparatus, exposure method, and method for producing device Feb. 26, 2013
8345222 High transmission, high aperture catadioptric projection objective and projection exposure apparatus Jan. 1, 2013
8345265 Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning de Jan. 1, 2013
8294874 Exposure apparatus Oct. 23, 2012
8174676 Method for correcting a lithography projection objective, and such a projection objective May. 8, 2012
8174677 Illumination optical system for microlithography May. 8, 2012
8149386 Illumination optical system, exposure apparatus using the same and device manufacturing method Apr. 3, 2012
7834979 Off-axis catadioptric projection optical system for lithography Nov. 16, 2010
7767982 Optical auto focusing system and method for electron beam inspection tool Aug. 3, 2010
7714987 Exposure apparatus May. 11, 2010
7697115 Resonant scanning mirror Apr. 13, 2010
7643128 Large field of view projection optical system with aberration correctability Jan. 5, 2010
RE40974 Apparatus for scanning documents in front of a document plate Nov. 17, 2009
7599103 Optical carriage of scanner and method of the same Oct. 6, 2009
7545482 Projection objective of a microlithographic projection exposure apparatus Jun. 9, 2009
7511798 Off-axis catadioptric projection optical system for lithography Mar. 31, 2009
7417709 Method and apparatus for exposing semiconductor substrates Aug. 26, 2008
7411202 Irradiating apparatus Aug. 12, 2008
7397585 Imaging optical system and image reading apparatus including four, free-form shaped, resin off-axis reflective elements Jul. 8, 2008
7301605 Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices Nov. 27, 2007
7268855 Projection optical system Sep. 11, 2007
7265814 Mirror holding method and optical apparatus Sep. 4, 2007
7265365 Apparatus for curing a coating on a three-dimensional object Sep. 4, 2007
7253928 Imaging optical system and image reading apparatus using the same Aug. 7, 2007
7199862 Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system Apr. 3, 2007
7190432 Exposure apparatus Mar. 13, 2007
7170587 Lithographic apparatus and device manufacturing method Jan. 30, 2007
7161717 Self-propelled image read module Jan. 9, 2007
7158215 Large field of view protection optical system with aberration correctability for flat panel displays Jan. 2, 2007
6888151 Lithographic apparatus, device manufacturing method, and device manufactured thereby May. 3, 2005
6862074 Portable device for the photographing of book pages Mar. 1, 2005
6853441 Projection aligner Feb. 8, 2005
6831731 Projection optical system and an exposure apparatus with the projection optical system Dec. 14, 2004
6819401 Exposure method and apparatus Nov. 16, 2004
6791663 Image forming apparatus Sep. 14, 2004
6774983 Distributed projection system Aug. 10, 2004
6771352 Lithographic apparatus and device manufacturing method Aug. 3, 2004

1 2 3 4 5 6

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