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Class Information
Number: 355/55
Name: Photocopying > Projection printing and copying cameras > Focus or magnification control
Description: Subject matter including means to move the holder for the original, the objective lens, and the photosensitive paper holder relative to each other for focusing or changing and degree of magnification or reduction; or including structure adapted to allow interchanging of objective lenses of different focal lengths.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6023320 |
Scanning exposure apparatus with surface position detecting system |
Feb. 8, 2000 |
| 6018384 |
Projection exposure system |
Jan. 25, 2000 |
| 6014202 |
Optical system for transmitting a graphical image |
Jan. 11, 2000 |
| 6014201 |
High speed package printer |
Jan. 11, 2000 |
| 6002987 |
Methods to control the environment and exposure apparatus |
Dec. 14, 1999 |
| 6002487 |
Alignment method for performing alignment between shot areas on a wafer |
Dec. 14, 1999 |
| 5995201 |
Digital print method |
Nov. 30, 1999 |
| 5986744 |
Projection optical system, illumination apparatus, and exposure apparatus |
Nov. 16, 1999 |
| 5978071 |
Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage |
Nov. 2, 1999 |
| 5973814 |
Optical document scanning method and apparatus with adjustable scanning magnification |
Oct. 26, 1999 |
| 5969801 |
Correction method and correction apparatus of mask pattern |
Oct. 19, 1999 |
| 5969807 |
Method for measuring lens imaging uniformity |
Oct. 19, 1999 |
| 5953106 |
Projection optical system, exposure apparatus and semiconductor-device manufacturing method using the system |
Sep. 14, 1999 |
| 5946513 |
Photographic and video image system |
Aug. 31, 1999 |
| 5940663 |
Image exposure apparatus |
Aug. 17, 1999 |
| 5936711 |
Projection exposure method and projection exposure apparatus |
Aug. 10, 1999 |
| 5936712 |
Exposure method and apparatus including focus control |
Aug. 10, 1999 |
| 5929977 |
Exposure apparatus and exposure quantity control method |
Jul. 27, 1999 |
| 5917581 |
Projection exposure method and apparatus therefor |
Jun. 29, 1999 |
| 5914773 |
Exposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timing |
Jun. 22, 1999 |
| 5914774 |
Projection exposure apparatus with function to measure imaging characteristics of projection optical system |
Jun. 22, 1999 |
| 5912725 |
Illumination optical system to be used in an exposure apparatus and a method of manufacturing a semiconductor structure using the exposure apparatus |
Jun. 15, 1999 |
| 5900926 |
Projection exposure apparatus |
May. 4, 1999 |
| 5898479 |
System for monitoring optical properties of photolithography equipment |
Apr. 27, 1999 |
| 5894350 |
Method of in line intra-field correction of overlay alignment |
Apr. 13, 1999 |
| 5892572 |
Projection exposure apparatus and method |
Apr. 6, 1999 |
| 5892573 |
Exposure apparatus and method with multiple light receiving means |
Apr. 6, 1999 |
| 5883700 |
Method for projection exposure to light |
Mar. 16, 1999 |
| 5883704 |
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system |
Mar. 16, 1999 |
| 5884242 |
Focus spot detection method and system |
Mar. 16, 1999 |
| 5883703 |
Methods and apparatus for detecting and compensating for focus errors in a photolithography tool |
Mar. 16, 1999 |
| 5877843 |
Exposure apparatus |
Mar. 2, 1999 |
| 5875022 |
Film image detection device and method |
Feb. 23, 1999 |
| 5872619 |
Method and apparatus for printing zoomed photographs from negatives with pseudo zoomed widths |
Feb. 16, 1999 |
| 5864388 |
Surface activating process, and device and lamp for performing said process |
Jan. 26, 1999 |
| 5854671 |
Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure |
Dec. 29, 1998 |
| 5850279 |
Alignment method, projection exposure method, and projection exposure apparatus |
Dec. 15, 1998 |
| 5847884 |
Image reading apparatus |
Dec. 8, 1998 |
| 5838443 |
Exposure apparatus implementing priority speed setting arrangement |
Nov. 17, 1998 |
| 5834160 |
Method and apparatus for forming fine patterns on printed circuit board |
Nov. 10, 1998 |
| 5828496 |
Illumination optical system |
Oct. 27, 1998 |
| 5825469 |
Auto focus system using twice reflection |
Oct. 20, 1998 |
| 5825043 |
Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus |
Oct. 20, 1998 |
| 5825468 |
Exposure system for lithography apparatus |
Oct. 20, 1998 |
| 5822043 |
Exposure method and projection exposure apparatus using the same |
Oct. 13, 1998 |
| 5809381 |
Image-forming apparatus and magnification correction method using the same |
Sep. 15, 1998 |
| 5805273 |
Projection exposure apparatus and microdevice manufacturing method |
Sep. 8, 1998 |
| 5801815 |
Projection exposure apparatus |
Sep. 1, 1998 |
| 5798838 |
Projection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the same |
Aug. 25, 1998 |
| 5798822 |
Exposure apparatus |
Aug. 25, 1998 |
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