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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7324187 |
Illumination system and exposure apparatus |
Jan. 29, 2008 |
| 7324186 |
Lithographic apparatus and device manufacturing method |
Jan. 29, 2008 |
| 7324185 |
Lithographic apparatus and device manufacturing method |
Jan. 29, 2008 |
| 7321419 |
Exposure apparatus, and device manufacturing method |
Jan. 22, 2008 |
| 7321418 |
Stage apparatus, exposure apparatus, and device manufacturing method |
Jan. 22, 2008 |
| 7321417 |
Spatial light modulator, lithographic apparatus and device manufacturing method |
Jan. 22, 2008 |
| 7321416 |
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conv |
Jan. 22, 2008 |
| 7321415 |
Environmental system including vacuum scavenge for an immersion lithography apparatus |
Jan. 22, 2008 |
| 7319508 |
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices |
Jan. 15, 2008 |
| 7319507 |
Apparatus and method for removing contaminant on original, method of manufacturing device, and original |
Jan. 15, 2008 |
| 7319506 |
Alignment system and method |
Jan. 15, 2008 |
| 7317510 |
Lithographic apparatus and device manufacturing method |
Jan. 8, 2008 |
| 7317509 |
Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system |
Jan. 8, 2008 |
| 7317507 |
Lithographic apparatus and device manufacturing method |
Jan. 8, 2008 |
| 7317506 |
Variable illumination source |
Jan. 8, 2008 |
| 7317505 |
Exposure apparatus and device manufacturing method |
Jan. 8, 2008 |
| 7317504 |
Lithographic apparatus and device manufacturing method |
Jan. 8, 2008 |
| 7315350 |
Exposure apparatus, reticle shape measurement apparatus and method |
Jan. 1, 2008 |
| 7315349 |
Exposure equipment with optical system positioning mechanism and related exposure method |
Jan. 1, 2008 |
| 7315348 |
Exposure apparatus, focal point detecting method, exposure method and device manufacturing method |
Jan. 1, 2008 |
| 7315347 |
Exposure apparatus and device manufacturing method |
Jan. 1, 2008 |
| 7315346 |
Lithographic apparatus and device manufacturing method |
Jan. 1, 2008 |
| 7312850 |
Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution |
Dec. 25, 2007 |
| 7312849 |
Substrate alignment apparatus and method, and exposure apparatus |
Dec. 25, 2007 |
| 7312848 |
Positioning apparatus, exposure apparatus, and device manufacturing method |
Dec. 25, 2007 |
| 7312847 |
Refractive projection objective for immersion lithography |
Dec. 25, 2007 |
| 7312846 |
Lithographic apparatus and device manufacturing method |
Dec. 25, 2007 |
| 7312463 |
Projection optical system, exposure apparatus, and exposure method |
Dec. 25, 2007 |
| 7310132 |
Lithographic apparatus and device manufacturing method |
Dec. 18, 2007 |
| 7310131 |
Lithographic apparatus and device manufacturing method |
Dec. 18, 2007 |
| 7310130 |
Lithographic apparatus and position measuring method |
Dec. 18, 2007 |
| 7310129 |
Method for carrying out a double or multiple exposure |
Dec. 18, 2007 |
| 7309870 |
Projection optical system, exposure apparatus, and exposure method |
Dec. 18, 2007 |
| 7309869 |
Lithographic apparatus, device manufacturing method and radiation system |
Dec. 18, 2007 |
| 7307707 |
Method and system for measuring the imaging quality of an optical imaging system |
Dec. 11, 2007 |
| 7307697 |
Adaptive shape substrate support system |
Dec. 11, 2007 |
| 7307695 |
Method and device for alignment of a substrate |
Dec. 11, 2007 |
| 7307693 |
Illumination optical device, photolithography machine, and exposure method |
Dec. 11, 2007 |
| 7307692 |
Exposure apparatus and device manufacturing method |
Dec. 11, 2007 |
| 7307691 |
Maskless direct exposure system and user interface |
Dec. 11, 2007 |
| 7307690 |
Device manufacturing method, computer program product and lithographic apparatus |
Dec. 11, 2007 |
| 7307689 |
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing |
Dec. 11, 2007 |
| 7307688 |
Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus |
Dec. 11, 2007 |
| 7307687 |
Lithographic apparatus, device manufacturing method and substrate |
Dec. 11, 2007 |
| 7307141 |
Thermoresponsive sensor comprising a polymer solution |
Dec. 11, 2007 |
| 7304718 |
Lithographic apparatus and device manufacturing method |
Dec. 4, 2007 |
| 7304717 |
Imaging device in a projection exposure facility |
Dec. 4, 2007 |
| 7304716 |
Method for purging an optical lens |
Dec. 4, 2007 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Dec. 4, 2007 |
| 7304318 |
System and method for maskless lithography using an array of sources and an array of focusing elements |
Dec. 4, 2007 |
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