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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7110084 |
Illumination optical system and exposure apparatus |
Sep. 19, 2006 |
| 7110083 |
Lithographic apparatus and device manufacturing method |
Sep. 19, 2006 |
| 7110082 |
Optical system for maskless lithography |
Sep. 19, 2006 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Sep. 19, 2006 |
| 7109498 |
Radiation source, lithographic apparatus, and device manufacturing method |
Sep. 19, 2006 |
| 7105836 |
Method and apparatus for cooling a reticle during lithographic exposure |
Sep. 12, 2006 |
| 7105837 |
Lithographic apparatus, device manufacturing method and radiation system |
Sep. 12, 2006 |
| 7106412 |
Lithographic apparatus comprising a gas flushing system |
Sep. 12, 2006 |
| 7106413 |
Cooling mechanism |
Sep. 12, 2006 |
| 7106414 |
Exposure system and method for manufacturing device |
Sep. 12, 2006 |
| 7106415 |
Illumination compensator for curved surface lithography |
Sep. 12, 2006 |
| 7106416 |
Lithographic apparatus and device manufacturing method |
Sep. 12, 2006 |
| 7106417 |
Tiling of modulator arrays |
Sep. 12, 2006 |
| 7106418 |
Scanning exposure method and an apparatus thereof |
Sep. 12, 2006 |
| 7106419 |
Exposure method and apparatus |
Sep. 12, 2006 |
| 7106518 |
Optical unit and image display apparatus |
Sep. 12, 2006 |
| 7102727 |
Optical system for use in exposure apparatus and device manufacturing method using the same |
Sep. 5, 2006 |
| 7102728 |
Imaging optical system evaluation method, imaging optical system adjustment method, exposure apparatus and exposure method |
Sep. 5, 2006 |
| 7102729 |
Lithographic apparatus, measurement system, and device manufacturing method |
Sep. 5, 2006 |
| 7102730 |
Exposure device |
Sep. 5, 2006 |
| 7102731 |
Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method |
Sep. 5, 2006 |
| 7102732 |
Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element |
Sep. 5, 2006 |
| 7102733 |
System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool |
Sep. 5, 2006 |
| 7102734 |
Exposure apparatus |
Sep. 5, 2006 |
| 7102736 |
Method of calibration, calibration substrate, and method of device manufacture |
Sep. 5, 2006 |
| 7098990 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Aug. 29, 2006 |
| 7098991 |
Exposure method, exposure apparatus, and method for manufacturing device |
Aug. 29, 2006 |
| 7098992 |
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device |
Aug. 29, 2006 |
| 7099011 |
Method and apparatus for self-referenced projection lens distortion mapping |
Aug. 29, 2006 |
| 7095479 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Aug. 22, 2006 |
| 7095480 |
Cooling apparatus |
Aug. 22, 2006 |
| 7095481 |
Exposure method and apparatus |
Aug. 22, 2006 |
| 7095482 |
Multiple system vibration isolator |
Aug. 22, 2006 |
| 7095483 |
Process independent alignment marks |
Aug. 22, 2006 |
| 7095484 |
Method and apparatus for maskless photolithography |
Aug. 22, 2006 |
| 7095560 |
Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method |
Aug. 22, 2006 |
| 7092068 |
Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device |
Aug. 15, 2006 |
| 7092069 |
Projection exposure method and projection exposure system |
Aug. 15, 2006 |
| 7092070 |
Illumination system with spatially controllable partial coherence compensating for line width variances |
Aug. 15, 2006 |
| 7092071 |
Exposure apparatus and method, and device fabricating method using the same |
Aug. 15, 2006 |
| 7088419 |
Lithographic systems and methods with extended depth of focus |
Aug. 8, 2006 |
| 7088421 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Aug. 8, 2006 |
| 7088422 |
Moving lens for immersion optical lithography |
Aug. 8, 2006 |
| 7088423 |
Edge exposing apparatus |
Aug. 8, 2006 |
| 7088424 |
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method |
Aug. 8, 2006 |
| 7088425 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus |
Aug. 8, 2006 |
| 7088426 |
Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method |
Aug. 8, 2006 |
| 7088428 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method |
Aug. 8, 2006 |
| 7088429 |
Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider |
Aug. 8, 2006 |
| 7088430 |
Photomask positioning apparatus |
Aug. 8, 2006 |
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